JPWO2021144634A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2021144634A5
JPWO2021144634A5 JP2022543478A JP2022543478A JPWO2021144634A5 JP WO2021144634 A5 JPWO2021144634 A5 JP WO2021144634A5 JP 2022543478 A JP2022543478 A JP 2022543478A JP 2022543478 A JP2022543478 A JP 2022543478A JP WO2021144634 A5 JPWO2021144634 A5 JP WO2021144634A5
Authority
JP
Japan
Prior art keywords
incident beam
region
propagation
raman
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022543478A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023510413A (ja
JP7773470B2 (ja
JP2023510413A5 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2020/061066 external-priority patent/WO2021144634A1/en
Publication of JP2023510413A publication Critical patent/JP2023510413A/ja
Publication of JPWO2021144634A5 publication Critical patent/JPWO2021144634A5/ja
Publication of JP2023510413A5 publication Critical patent/JP2023510413A5/ja
Application granted granted Critical
Publication of JP7773470B2 publication Critical patent/JP7773470B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022543478A 2020-01-16 2020-11-24 正確なラマン分光法 Active JP7773470B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062961721P 2020-01-16 2020-01-16
US62/961,721 2020-01-16
PCT/IB2020/061066 WO2021144634A1 (en) 2020-01-16 2020-11-24 Accurate raman spectroscopy

Publications (4)

Publication Number Publication Date
JP2023510413A JP2023510413A (ja) 2023-03-13
JPWO2021144634A5 true JPWO2021144634A5 (https=) 2023-11-16
JP2023510413A5 JP2023510413A5 (https=) 2023-11-16
JP7773470B2 JP7773470B2 (ja) 2025-11-19

Family

ID=76857753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022543478A Active JP7773470B2 (ja) 2020-01-16 2020-11-24 正確なラマン分光法

Country Status (7)

Country Link
US (7) US11415519B2 (https=)
JP (1) JP7773470B2 (https=)
KR (3) KR102818270B1 (https=)
CN (2) CN115135976A (https=)
IL (1) IL301321A (https=)
TW (2) TWI780554B (https=)
WO (2) WO2021144634A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7241663B2 (ja) * 2019-11-01 2023-03-17 東京エレクトロン株式会社 情報処理装置、情報処理方法、情報処理プログラム及び半導体製造装置
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN115128056B (zh) * 2022-05-25 2025-05-23 南京大学 一种时空分辨多模态拉曼高光谱显微成像系统及方法
CN116678866B (zh) * 2023-05-30 2026-03-27 哈尔滨工业大学 一种多偏振态入射显微拉曼光谱应力检测方法
WO2025230247A1 (ko) * 2024-04-30 2025-11-06 주식회사 아큐옵토텍 분석 장치 및 이를 이용한 분석 방법
GB2641380A (en) * 2024-05-29 2025-12-03 Rsp Systems As A device for non-invasive analyte measurement

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211070A (en) * 1975-07-17 1977-01-27 Ckd Corp Digital type automatic balanced circuit for ac bridge
JPS617629Y2 (https=) 1978-07-20 1986-03-08
US4957367A (en) * 1988-05-31 1990-09-18 Lev Dulman Inteferometric imaging system
US5455673A (en) * 1994-05-27 1995-10-03 Eastman Chemical Company Apparatus and method for measuring and applying a convolution function to produce a standard Raman spectrum
JPH07333508A (ja) * 1994-06-13 1995-12-22 Olympus Optical Co Ltd 共焦点光学顕微鏡
US5713364A (en) * 1995-08-01 1998-02-03 Medispectra, Inc. Spectral volume microprobe analysis of materials
US6151522A (en) * 1998-03-16 2000-11-21 The Research Foundation Of Cuny Method and system for examining biological materials using low power CW excitation raman spectroscopy
JP4286351B2 (ja) * 1998-11-13 2009-06-24 富士通株式会社 光アッド/ドロップ回路
US6661509B2 (en) * 2001-02-07 2003-12-09 Thermo Electron Scientific Instruments Corporation Method and apparatus for alignment of multiple beam paths in spectroscopy
US6750968B2 (en) * 2000-10-03 2004-06-15 Accent Optical Technologies, Inc. Differential numerical aperture methods and device
GB0106342D0 (en) * 2001-03-15 2001-05-02 Renishaw Plc Spectroscopy apparatus and method
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring
EP1480467A3 (en) * 2003-03-28 2011-09-14 Samsung Electronics Co., Ltd. Video projector
WO2006005022A2 (en) * 2004-06-30 2006-01-12 Chemimage Corporation Dynamic chemical imaging of biological cells and other subjects
ATE449317T1 (de) * 2004-08-26 2009-12-15 Koninkl Philips Electronics Nv Autonome kalibrierung für optische analysesysteme
US7532314B1 (en) * 2005-07-14 2009-05-12 Battelle Memorial Institute Systems and methods for biological and chemical detection
WO2007040589A1 (en) * 2005-09-16 2007-04-12 The Regents Of The University Of Michigan Method and system for measuring sub-surface composition of a sample
FR2898992A1 (fr) * 2006-03-21 2007-09-28 Sc Spim Soc Civ Ile Dispositif de formation de spectre sur un capteur optique a rejet spatial.
JP4852439B2 (ja) * 2006-07-06 2012-01-11 株式会社リコー ラマン分光測定装置、及びこれを用いたラマン分光測定法
US7508524B2 (en) * 2007-07-20 2009-03-24 Vanderbilt University Combined raman spectroscopy-optical coherence tomography (RS-OCT) system and applications of the same
FR2930031A1 (fr) * 2008-04-14 2009-10-16 Centre Nat Rech Scient Dispositif et procede d'analyse exaltee d'un echantillon de particules.
JP5352111B2 (ja) * 2008-04-16 2013-11-27 株式会社日立ハイテクノロジーズ 欠陥検査方法及びこれを用いた欠陥検査装置
WO2010016267A1 (ja) * 2008-08-08 2010-02-11 独立行政法人科学技術振興機構 粒子プローブ近傍に存在する物質の分布を検出する方法、粒子プローブを用いた画像化方法およびその利用
CN101718589B (zh) * 2009-11-14 2011-05-25 张青川 一种用于红外热像成像仪的光学读出方法
US8014427B1 (en) * 2010-05-11 2011-09-06 Ultratech, Inc. Line imaging systems and methods for laser annealing
US20170234728A1 (en) * 2010-12-01 2017-08-17 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer
JP5703907B2 (ja) * 2011-03-31 2015-04-22 ソニー株式会社 非線形ラマン分光装置、非線形ラマン分光システム及び非線形ラマン分光方法
JP2012237714A (ja) * 2011-05-13 2012-12-06 Sony Corp 非線形ラマン分光装置、顕微分光装置及び顕微分光イメージング装置
US20160178439A1 (en) * 2013-06-17 2016-06-23 Invenio Imaging Inc. Methods and systems for coherent raman scattering
KR101643357B1 (ko) * 2013-08-26 2016-07-27 가부시키가이샤 뉴플레어 테크놀로지 촬상 장치, 검사 장치 및 검사 방법
CN104749156B (zh) 2013-12-27 2017-08-29 同方威视技术股份有限公司 拉曼光谱检测方法
KR102381930B1 (ko) * 2014-03-13 2022-04-04 내셔널 유니버시티 오브 싱가포르 광학 간섭 장치
DE102014206576B4 (de) * 2014-04-04 2015-12-03 Celltool Gmbh Vorrichtung und Verfahren zum Erkennen eines Prostatatumors
WO2016027453A1 (ja) * 2014-08-18 2016-02-25 国立大学法人大阪大学 ラマン分光顕微鏡及びラマン散乱光観察方法
JP6379212B2 (ja) * 2014-10-16 2018-08-22 株式会社日立ハイテクノロジーズ 定位置制御装置、及び方法
US10620124B2 (en) * 2014-10-20 2020-04-14 Hitachi, Ltd. Optical analysis device and biomolecular analysis device
EP3218669B1 (en) * 2014-11-16 2024-02-28 ABDULHALIM, Ibrahim Multi-spectral polarimetric variable optical device and imager
US10337983B2 (en) * 2015-04-12 2019-07-02 Taiwan Biophotonic Corporation Module, device and method for optical measurement
US10295342B2 (en) * 2015-08-14 2019-05-21 Kla-Tencor Corporation System, method and computer program product for calibration of metrology tools
TWI823344B (zh) * 2015-12-15 2023-11-21 以色列商諾威股份有限公司 用於測量圖案化結構之特性的系統
US11092494B1 (en) * 2016-05-31 2021-08-17 MKS Technology Spectrometer
EP4645615A3 (en) * 2016-06-03 2026-01-28 The General Hospital Corporation System and method for micro laser particles
US11143555B2 (en) 2017-01-27 2021-10-12 University Of Maryland, College Park Methods and devices for reducing spectral noise and spectrometry systems employing such devices
JP7089719B2 (ja) * 2017-02-07 2022-06-23 ナノフォトン株式会社 分光顕微鏡、及び分光観察方法
US10365211B2 (en) * 2017-09-26 2019-07-30 Kla-Tencor Corporation Systems and methods for metrology beam stabilization
GB201815207D0 (en) * 2018-09-18 2018-10-31 Univ Nottingham Raman spectroscopy method and apparatus
CN110231092B (zh) * 2019-07-15 2024-04-12 天津大学 角度分辨显微拉曼光谱探测装置及探测方法
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN111175282A (zh) * 2020-02-24 2020-05-19 江苏师范大学 一种基于物镜信号采集的拉曼光谱仪

Similar Documents

Publication Publication Date Title
JP6921243B2 (ja) 測定方法の性能を予測する方法及び装置、測定方法及び装置
US9222897B2 (en) Method for characterizing a feature on a mask and device for carrying out the method
KR102592917B1 (ko) 표면 검사 방법 및 반도체 소자의 제조 방법
JP2022533246A (ja) ハイパースペクトルイメージングを使用する半導体プロセスの光学的診断
US11571747B2 (en) Multi-spectral method for detection of anomalies during powder bed fusion additive manufacturing
JPH0915156A (ja) 分光測定方法及び測定装置
US20120142122A1 (en) Method of inspecting and processing semiconductor wafers
CN102680450A (zh) 测定装置及测定方法
JPWO2021144634A5 (https=)
JP2926277B2 (ja) Ftirを用いた多成分定量分析方法
JPWO2016174963A1 (ja) 顕微鏡装置
US10989687B2 (en) Capillary electrophoresis device and focal position adjustment method for the same
JP3270829B2 (ja) 蛍光x線分析装置
WO2017170975A1 (ja) 分光曲線取得装置及びコンクリート測定装置及び分光曲線取得方法及びコンクリート測定方法
JP4595572B2 (ja) ラマン分光装置及びラマン分光測定方法
JPH0972848A (ja) ラマン分光装置
EP3995820B1 (en) X-ray measurement apparatus and x-ray measurement method
US12373936B2 (en) System and method for overlay metrology using a phase mask
KR100531958B1 (ko) 웨이퍼 표면 분석용 광학 시스템 및 그 분석 방법
KR101051072B1 (ko) 실시간 투과율 측정시스템
JP2009222727A (ja) 分光器
JP4628127B2 (ja) 試料表面の測定方法及び分析方法並びに電子ビーム装置
JPH07225186A (ja) 蛍光/ラマン分光光度計
JP5645676B2 (ja) ガスの温度及び成分濃度計測装置
JPWO2023026523A5 (https=)