CN115135976A - 精确拉曼光谱法 - Google Patents

精确拉曼光谱法 Download PDF

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Publication number
CN115135976A
CN115135976A CN202080093252.7A CN202080093252A CN115135976A CN 115135976 A CN115135976 A CN 115135976A CN 202080093252 A CN202080093252 A CN 202080093252A CN 115135976 A CN115135976 A CN 115135976A
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CN
China
Prior art keywords
region
impinging beam
measurement system
raman
optical measurement
Prior art date
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Pending
Application number
CN202080093252.7A
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English (en)
Chinese (zh)
Inventor
埃拉德·施莱费尔
约纳坦·奥伦
阿米尔·沙亚里
埃亚尔·霍兰德
瓦莱里·戴希
希蒙·亚洛夫
吉拉德·巴拉克
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Novell Ltd
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Novell Ltd
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Publication date
Application filed by Novell Ltd filed Critical Novell Ltd
Publication of CN115135976A publication Critical patent/CN115135976A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412—Scattering spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
CN202080093252.7A 2020-01-16 2020-11-24 精确拉曼光谱法 Pending CN115135976A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062961721P 2020-01-16 2020-01-16
US62/961,721 2020-01-16
PCT/IB2020/061066 WO2021144634A1 (en) 2020-01-16 2020-11-24 Accurate raman spectroscopy

Publications (1)

Publication Number Publication Date
CN115135976A true CN115135976A (zh) 2022-09-30

Family

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Family Applications (2)

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CN202080093252.7A Pending CN115135976A (zh) 2020-01-16 2020-11-24 精确拉曼光谱法
CN202180076642.8A Pending CN116507905A (zh) 2020-01-16 2021-09-14 准确拉曼光谱

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202180076642.8A Pending CN116507905A (zh) 2020-01-16 2021-09-14 准确拉曼光谱

Country Status (7)

Country Link
US (7) US11415519B2 (https=)
JP (1) JP7773470B2 (https=)
KR (3) KR102818270B1 (https=)
CN (2) CN115135976A (https=)
IL (1) IL301321A (https=)
TW (2) TWI780554B (https=)
WO (2) WO2021144634A1 (https=)

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JP7241663B2 (ja) * 2019-11-01 2023-03-17 東京エレクトロン株式会社 情報処理装置、情報処理方法、情報処理プログラム及び半導体製造装置
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN115128056B (zh) * 2022-05-25 2025-05-23 南京大学 一种时空分辨多模态拉曼高光谱显微成像系统及方法
CN116678866B (zh) * 2023-05-30 2026-03-27 哈尔滨工业大学 一种多偏振态入射显微拉曼光谱应力检测方法
WO2025230247A1 (ko) * 2024-04-30 2025-11-06 주식회사 아큐옵토텍 분석 장치 및 이를 이용한 분석 방법
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Also Published As

Publication number Publication date
TW202129258A (zh) 2021-08-01
US20240085333A1 (en) 2024-03-14
TWI780554B (zh) 2022-10-11
TW202530669A (zh) 2025-08-01
US12163892B2 (en) 2024-12-10
KR20220126768A (ko) 2022-09-16
KR20230069194A (ko) 2023-05-18
WO2022054021A1 (en) 2022-03-17
WO2021144634A1 (en) 2021-07-22
KR20250088647A (ko) 2025-06-17
JP2023510413A (ja) 2023-03-13
US11740183B2 (en) 2023-08-29
US12372473B2 (en) 2025-07-29
US20240210322A1 (en) 2024-06-27
US20240019375A1 (en) 2024-01-18
US20230168200A1 (en) 2023-06-01
KR102818270B1 (ko) 2025-06-16
JP7773470B2 (ja) 2025-11-19
TWI862978B (zh) 2024-11-21
US20250130172A1 (en) 2025-04-24
US11415519B2 (en) 2022-08-16
CN116507905A (zh) 2023-07-28
IL301321A (en) 2023-05-01
US11860104B2 (en) 2024-01-02
TW202323799A (zh) 2023-06-16
US20210223179A1 (en) 2021-07-22
US12152993B2 (en) 2024-11-26
US20230044886A1 (en) 2023-02-09

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