IL301321A - Precise Raman spectroscopy - Google Patents

Precise Raman spectroscopy

Info

Publication number
IL301321A
IL301321A IL301321A IL30132123A IL301321A IL 301321 A IL301321 A IL 301321A IL 301321 A IL301321 A IL 301321A IL 30132123 A IL30132123 A IL 30132123A IL 301321 A IL301321 A IL 301321A
Authority
IL
Israel
Prior art keywords
illumination
acquisition
collection
sample
nano
Prior art date
Application number
IL301321A
Other languages
English (en)
Hebrew (he)
Inventor
Eyal Hollander
Gilad Barak
Elad Schleifer
Yonatan Oren
Amir Shayari
Original Assignee
נובה בע מ
Eyal Hollander
Gilad Barak
Elad Schleifer
Yonatan Oren
Amir Shayari
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by נובה בע מ, Eyal Hollander, Gilad Barak, Elad Schleifer, Yonatan Oren, Amir Shayari filed Critical נובה בע מ
Publication of IL301321A publication Critical patent/IL301321A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412—Scattering spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
IL301321A 2020-01-16 2021-09-14 Precise Raman spectroscopy IL301321A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062961721P 2020-01-16 2020-01-16
US17/020,587 US11415519B2 (en) 2020-01-16 2020-09-14 Accurate Raman spectroscopy
PCT/IB2021/058327 WO2022054021A1 (en) 2020-01-16 2021-09-14 Accurate raman spectroscopy

Publications (1)

Publication Number Publication Date
IL301321A true IL301321A (en) 2023-05-01

Family

ID=76857753

Family Applications (1)

Application Number Title Priority Date Filing Date
IL301321A IL301321A (en) 2020-01-16 2021-09-14 Precise Raman spectroscopy

Country Status (7)

Country Link
US (7) US11415519B2 (https=)
JP (1) JP7773470B2 (https=)
KR (3) KR102818270B1 (https=)
CN (2) CN115135976A (https=)
IL (1) IL301321A (https=)
TW (2) TWI780554B (https=)
WO (2) WO2021144634A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7241663B2 (ja) * 2019-11-01 2023-03-17 東京エレクトロン株式会社 情報処理装置、情報処理方法、情報処理プログラム及び半導体製造装置
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN115128056B (zh) * 2022-05-25 2025-05-23 南京大学 一种时空分辨多模态拉曼高光谱显微成像系统及方法
CN116678866B (zh) * 2023-05-30 2026-03-27 哈尔滨工业大学 一种多偏振态入射显微拉曼光谱应力检测方法
WO2025230247A1 (ko) * 2024-04-30 2025-11-06 주식회사 아큐옵토텍 분석 장치 및 이를 이용한 분석 방법
GB2641380A (en) * 2024-05-29 2025-12-03 Rsp Systems As A device for non-invasive analyte measurement

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211070A (en) * 1975-07-17 1977-01-27 Ckd Corp Digital type automatic balanced circuit for ac bridge
JPS617629Y2 (https=) 1978-07-20 1986-03-08
US4957367A (en) * 1988-05-31 1990-09-18 Lev Dulman Inteferometric imaging system
US5455673A (en) * 1994-05-27 1995-10-03 Eastman Chemical Company Apparatus and method for measuring and applying a convolution function to produce a standard Raman spectrum
JPH07333508A (ja) * 1994-06-13 1995-12-22 Olympus Optical Co Ltd 共焦点光学顕微鏡
US5713364A (en) * 1995-08-01 1998-02-03 Medispectra, Inc. Spectral volume microprobe analysis of materials
US6151522A (en) * 1998-03-16 2000-11-21 The Research Foundation Of Cuny Method and system for examining biological materials using low power CW excitation raman spectroscopy
JP4286351B2 (ja) * 1998-11-13 2009-06-24 富士通株式会社 光アッド／ドロップ回路
US6661509B2 (en) * 2001-02-07 2003-12-09 Thermo Electron Scientific Instruments Corporation Method and apparatus for alignment of multiple beam paths in spectroscopy
US6750968B2 (en) * 2000-10-03 2004-06-15 Accent Optical Technologies, Inc. Differential numerical aperture methods and device
GB0106342D0 (en) * 2001-03-15 2001-05-02 Renishaw Plc Spectroscopy apparatus and method
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring
EP1480467A3 (en) * 2003-03-28 2011-09-14 Samsung Electronics Co., Ltd. Video projector
WO2006005022A2 (en) * 2004-06-30 2006-01-12 Chemimage Corporation Dynamic chemical imaging of biological cells and other subjects
ATE449317T1 (de) * 2004-08-26 2009-12-15 Koninkl Philips Electronics Nv Autonome kalibrierung für optische analysesysteme
US7532314B1 (en) * 2005-07-14 2009-05-12 Battelle Memorial Institute Systems and methods for biological and chemical detection
WO2007040589A1 (en) * 2005-09-16 2007-04-12 The Regents Of The University Of Michigan Method and system for measuring sub-surface composition of a sample
FR2898992A1 (fr) * 2006-03-21 2007-09-28 Sc Spim Soc Civ Ile Dispositif de formation de spectre sur un capteur optique a rejet spatial.
JP4852439B2 (ja) * 2006-07-06 2012-01-11 株式会社リコー ラマン分光測定装置、及びこれを用いたラマン分光測定法
US7508524B2 (en) * 2007-07-20 2009-03-24 Vanderbilt University Combined raman spectroscopy-optical coherence tomography (RS-OCT) system and applications of the same
FR2930031A1 (fr) * 2008-04-14 2009-10-16 Centre Nat Rech Scient Dispositif et procede d'analyse exaltee d'un echantillon de particules.
JP5352111B2 (ja) * 2008-04-16 2013-11-27 株式会社日立ハイテクノロジーズ 欠陥検査方法及びこれを用いた欠陥検査装置
WO2010016267A1 (ja) * 2008-08-08 2010-02-11 独立行政法人科学技術振興機構 粒子プローブ近傍に存在する物質の分布を検出する方法、粒子プローブを用いた画像化方法およびその利用
CN101718589B (zh) * 2009-11-14 2011-05-25 张青川 一种用于红外热像成像仪的光学读出方法
US8014427B1 (en) * 2010-05-11 2011-09-06 Ultratech, Inc. Line imaging systems and methods for laser annealing
US20170234728A1 (en) * 2010-12-01 2017-08-17 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer
JP5703907B2 (ja) * 2011-03-31 2015-04-22 ソニー株式会社 非線形ラマン分光装置、非線形ラマン分光システム及び非線形ラマン分光方法
JP2012237714A (ja) * 2011-05-13 2012-12-06 Sony Corp 非線形ラマン分光装置、顕微分光装置及び顕微分光イメージング装置
US20160178439A1 (en) * 2013-06-17 2016-06-23 Invenio Imaging Inc. Methods and systems for coherent raman scattering
KR101643357B1 (ko) * 2013-08-26 2016-07-27 가부시키가이샤 뉴플레어 테크놀로지 촬상 장치, 검사 장치 및 검사 방법
CN104749156B (zh) 2013-12-27 2017-08-29 同方威视技术股份有限公司 拉曼光谱检测方法
KR102381930B1 (ko) * 2014-03-13 2022-04-04 내셔널 유니버시티 오브 싱가포르 광학 간섭 장치
DE102014206576B4 (de) * 2014-04-04 2015-12-03 Celltool Gmbh Vorrichtung und Verfahren zum Erkennen eines Prostatatumors
WO2016027453A1 (ja) * 2014-08-18 2016-02-25 国立大学法人大阪大学 ラマン分光顕微鏡及びラマン散乱光観察方法
JP6379212B2 (ja) * 2014-10-16 2018-08-22 株式会社日立ハイテクノロジーズ 定位置制御装置、及び方法
US10620124B2 (en) * 2014-10-20 2020-04-14 Hitachi, Ltd. Optical analysis device and biomolecular analysis device
EP3218669B1 (en) * 2014-11-16 2024-02-28 ABDULHALIM, Ibrahim Multi-spectral polarimetric variable optical device and imager
US10337983B2 (en) * 2015-04-12 2019-07-02 Taiwan Biophotonic Corporation Module, device and method for optical measurement
US10295342B2 (en) * 2015-08-14 2019-05-21 Kla-Tencor Corporation System, method and computer program product for calibration of metrology tools
TWI823344B (zh) * 2015-12-15 2023-11-21 以色列商諾威股份有限公司 用於測量圖案化結構之特性的系統
US11092494B1 (en) * 2016-05-31 2021-08-17 MKS Technology Spectrometer
EP4645615A3 (en) * 2016-06-03 2026-01-28 The General Hospital Corporation System and method for micro laser particles
US11143555B2 (en) 2017-01-27 2021-10-12 University Of Maryland, College Park Methods and devices for reducing spectral noise and spectrometry systems employing such devices
JP7089719B2 (ja) * 2017-02-07 2022-06-23 ナノフォトン株式会社 分光顕微鏡、及び分光観察方法
US10365211B2 (en) * 2017-09-26 2019-07-30 Kla-Tencor Corporation Systems and methods for metrology beam stabilization
GB201815207D0 (en) * 2018-09-18 2018-10-31 Univ Nottingham Raman spectroscopy method and apparatus
CN110231092B (zh) * 2019-07-15 2024-04-12 天津大学 角度分辨显微拉曼光谱探测装置及探测方法
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN111175282A (zh) * 2020-02-24 2020-05-19 江苏师范大学 一种基于物镜信号采集的拉曼光谱仪

Also Published As

Publication number Publication date
TW202129258A (zh) 2021-08-01
US20240085333A1 (en) 2024-03-14
TWI780554B (zh) 2022-10-11
TW202530669A (zh) 2025-08-01
US12163892B2 (en) 2024-12-10
KR20220126768A (ko) 2022-09-16
KR20230069194A (ko) 2023-05-18
WO2022054021A1 (en) 2022-03-17
WO2021144634A1 (en) 2021-07-22
KR20250088647A (ko) 2025-06-17
JP2023510413A (ja) 2023-03-13
US11740183B2 (en) 2023-08-29
US12372473B2 (en) 2025-07-29
US20240210322A1 (en) 2024-06-27
US20240019375A1 (en) 2024-01-18
US20230168200A1 (en) 2023-06-01
CN115135976A (zh) 2022-09-30
KR102818270B1 (ko) 2025-06-16
JP7773470B2 (ja) 2025-11-19
TWI862978B (zh) 2024-11-21
US20250130172A1 (en) 2025-04-24
US11415519B2 (en) 2022-08-16
CN116507905A (zh) 2023-07-28
US11860104B2 (en) 2024-01-02
TW202323799A (zh) 2023-06-16
US20210223179A1 (en) 2021-07-22
US12152993B2 (en) 2024-11-26
US20230044886A1 (en) 2023-02-09

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