TWI862978B - 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 - Google Patents

用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 Download PDF

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TWI862978B
TWI862978B TW111133636A TW111133636A TWI862978B TW I862978 B TWI862978 B TW I862978B TW 111133636 A TW111133636 A TW 111133636A TW 111133636 A TW111133636 A TW 111133636A TW I862978 B TWI862978 B TW I862978B
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Taiwan
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measurement system
optical measurement
optical
path
wedge
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TW111133636A
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Chinese (zh)
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TW202323799A (zh
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埃拉德 施萊費爾
由納坦 奧倫
阿米爾 沙亞利
埃亞爾 荷蘭德
瓦萊里 戴希
希莫 亞洛夫
吉列德 布拉克
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以色列商諾威股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412—Scattering spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
TW111133636A 2020-01-16 2020-12-30 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 TWI862978B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202062961721P 2020-01-16 2020-01-16
US62/961,721 2020-01-16

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TW202323799A TW202323799A (zh) 2023-06-16
TWI862978B true TWI862978B (zh) 2024-11-21

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TW109146759A TWI780554B (zh) 2020-01-16 2020-12-30 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體

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US (7) US11415519B2 (https=)
JP (1) JP7773470B2 (https=)
KR (3) KR20250088647A (https=)
CN (2) CN115135976A (https=)
IL (1) IL301321A (https=)
TW (2) TWI862978B (https=)
WO (2) WO2021144634A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7241663B2 (ja) * 2019-11-01 2023-03-17 東京エレクトロン株式会社 情報処理装置、情報処理方法、情報処理プログラム及び半導体製造装置
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN115128056B (zh) * 2022-05-25 2025-05-23 南京大学 一种时空分辨多模态拉曼高光谱显微成像系统及方法
CN116678866B (zh) * 2023-05-30 2026-03-27 哈尔滨工业大学 一种多偏振态入射显微拉曼光谱应力检测方法
WO2025230247A1 (ko) * 2024-04-30 2025-11-06 주식회사 아큐옵토텍 분석 장치 및 이를 이용한 분석 방법
GB2641380A (en) * 2024-05-29 2025-12-03 Rsp Systems As A device for non-invasive analyte measurement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201636597A (zh) * 2015-04-12 2016-10-16 臺醫光電科技股份有限公司 光學檢測模組、光學檢測裝置、以及光學檢測方法
TW201716744A (zh) * 2015-08-14 2017-05-16 克萊譚克公司 用於校正計量工具之系統、方法及計算機程式產品

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211070A (en) * 1975-07-17 1977-01-27 Ckd Corp Digital type automatic balanced circuit for ac bridge
JPS617629Y2 (https=) 1978-07-20 1986-03-08
US4957367A (en) * 1988-05-31 1990-09-18 Lev Dulman Inteferometric imaging system
US5455673A (en) * 1994-05-27 1995-10-03 Eastman Chemical Company Apparatus and method for measuring and applying a convolution function to produce a standard Raman spectrum
JPH07333508A (ja) * 1994-06-13 1995-12-22 Olympus Optical Co Ltd 共焦点光学顕微鏡
US5713364A (en) * 1995-08-01 1998-02-03 Medispectra, Inc. Spectral volume microprobe analysis of materials
US6151522A (en) * 1998-03-16 2000-11-21 The Research Foundation Of Cuny Method and system for examining biological materials using low power CW excitation raman spectroscopy
JP4286351B2 (ja) * 1998-11-13 2009-06-24 富士通株式会社 光アッド／ドロップ回路
US6661509B2 (en) * 2001-02-07 2003-12-09 Thermo Electron Scientific Instruments Corporation Method and apparatus for alignment of multiple beam paths in spectroscopy
US6750968B2 (en) * 2000-10-03 2004-06-15 Accent Optical Technologies, Inc. Differential numerical aperture methods and device
GB0106342D0 (en) * 2001-03-15 2001-05-02 Renishaw Plc Spectroscopy apparatus and method
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring
EP1480467A3 (en) * 2003-03-28 2011-09-14 Samsung Electronics Co., Ltd. Video projector
WO2006005022A2 (en) * 2004-06-30 2006-01-12 Chemimage Corporation Dynamic chemical imaging of biological cells and other subjects
DE602005017797D1 (de) * 2004-08-26 2009-12-31 Koninkl Philips Electronics Nv Autonome kalibrierung für optische analysesysteme
US7518710B2 (en) * 2005-07-14 2009-04-14 Battelle Memorial Institute Optical devices for biological and chemical detection
WO2007040589A1 (en) * 2005-09-16 2007-04-12 The Regents Of The University Of Michigan Method and system for measuring sub-surface composition of a sample
FR2898992A1 (fr) * 2006-03-21 2007-09-28 Sc Spim Soc Civ Ile Dispositif de formation de spectre sur un capteur optique a rejet spatial.
JP4852439B2 (ja) * 2006-07-06 2012-01-11 株式会社リコー ラマン分光測定装置、及びこれを用いたラマン分光測定法
US7508524B2 (en) * 2007-07-20 2009-03-24 Vanderbilt University Combined raman spectroscopy-optical coherence tomography (RS-OCT) system and applications of the same
FR2930031A1 (fr) * 2008-04-14 2009-10-16 Centre Nat Rech Scient Dispositif et procede d'analyse exaltee d'un echantillon de particules.
JP5352111B2 (ja) * 2008-04-16 2013-11-27 株式会社日立ハイテクノロジーズ 欠陥検査方法及びこれを用いた欠陥検査装置
JP5519506B2 (ja) * 2008-08-08 2014-06-11 独立行政法人科学技術振興機構 粒子プローブを用いた画像化方法およびその利用
CN101718589B (zh) * 2009-11-14 2011-05-25 张青川 一种用于红外热像成像仪的光学读出方法
US8014427B1 (en) * 2010-05-11 2011-09-06 Ultratech, Inc. Line imaging systems and methods for laser annealing
US20170234728A1 (en) * 2010-12-01 2017-08-17 Mks Technology (D/B/A Snowy Range Instruments) Spectrometer
JP5703907B2 (ja) * 2011-03-31 2015-04-22 ソニー株式会社 非線形ラマン分光装置、非線形ラマン分光システム及び非線形ラマン分光方法
JP2012237714A (ja) * 2011-05-13 2012-12-06 Sony Corp 非線形ラマン分光装置、顕微分光装置及び顕微分光イメージング装置
WO2014205007A1 (en) * 2013-06-17 2014-12-24 Invenio Imaging Inc. Methods and systems for coherent raman scattering
KR101643357B1 (ko) * 2013-08-26 2016-07-27 가부시키가이샤 뉴플레어 테크놀로지 촬상 장치, 검사 장치 및 검사 방법
CN104749156B (zh) 2013-12-27 2017-08-29 同方威视技术股份有限公司 拉曼光谱检测方法
KR102381930B1 (ko) * 2014-03-13 2022-04-04 내셔널 유니버시티 오브 싱가포르 광학 간섭 장치
DE102014206576B4 (de) * 2014-04-04 2015-12-03 Celltool Gmbh Vorrichtung und Verfahren zum Erkennen eines Prostatatumors
JP6673552B2 (ja) * 2014-08-18 2020-03-25 ナノフォトン株式会社 ラマン分光顕微鏡及びラマン散乱光観察方法
WO2016059703A1 (ja) * 2014-10-16 2016-04-21 株式会社日立ハイテクノロジーズ 定位置制御装置、及び方法
US10620124B2 (en) * 2014-10-20 2020-04-14 Hitachi, Ltd. Optical analysis device and biomolecular analysis device
WO2016075694A1 (en) * 2014-11-16 2016-05-19 B.G. Negev Technologies & Applications Ltd. At Ben-Gurion University Multi-spectral polarimetric variable optical device and imager
TWI823344B (zh) * 2015-12-15 2023-11-21 以色列商諾威股份有限公司 用於測量圖案化結構之特性的系統
US11092494B1 (en) * 2016-05-31 2021-08-17 MKS Technology Spectrometer
CN111786260B (zh) * 2016-06-03 2025-01-24 通用医疗公司 用于微激光器粒子的系统和方法
EP3574294A4 (en) 2017-01-27 2020-12-09 University of Maryland, College Park SPECTRAL NOISE REDUCTION METHODS AND DEVICES AND SPECTROMETRY SYSTEMS USING THE SAID DEVICES
JP7089719B2 (ja) * 2017-02-07 2022-06-23 ナノフォトン株式会社 分光顕微鏡、及び分光観察方法
US10365211B2 (en) * 2017-09-26 2019-07-30 Kla-Tencor Corporation Systems and methods for metrology beam stabilization
GB201815207D0 (en) * 2018-09-18 2018-10-31 Univ Nottingham Raman spectroscopy method and apparatus
CN110231092B (zh) * 2019-07-15 2024-04-12 天津大学 角度分辨显微拉曼光谱探测装置及探测方法
US11415519B2 (en) 2020-01-16 2022-08-16 Nova Ltd Accurate Raman spectroscopy
CN111175282A (zh) * 2020-02-24 2020-05-19 江苏师范大学 一种基于物镜信号采集的拉曼光谱仪

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201636597A (zh) * 2015-04-12 2016-10-16 臺醫光電科技股份有限公司 光學檢測模組、光學檢測裝置、以及光學檢測方法
TW201716744A (zh) * 2015-08-14 2017-05-16 克萊譚克公司 用於校正計量工具之系統、方法及計算機程式產品

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US11860104B2 (en) 2024-01-02
WO2022054021A1 (en) 2022-03-17
JP2023510413A (ja) 2023-03-13
US12372473B2 (en) 2025-07-29
KR20250088647A (ko) 2025-06-17
IL301321A (en) 2023-05-01
US12163892B2 (en) 2024-12-10
TW202530669A (zh) 2025-08-01
US20230044886A1 (en) 2023-02-09
US11740183B2 (en) 2023-08-29
US20240210322A1 (en) 2024-06-27
CN116507905A (zh) 2023-07-28
US20230168200A1 (en) 2023-06-01
US20210223179A1 (en) 2021-07-22
US12152993B2 (en) 2024-11-26
TWI780554B (zh) 2022-10-11
KR102818270B1 (ko) 2025-06-16
CN115135976A (zh) 2022-09-30
US11415519B2 (en) 2022-08-16
JP7773470B2 (ja) 2025-11-19
TW202323799A (zh) 2023-06-16
WO2021144634A1 (en) 2021-07-22
TW202129258A (zh) 2021-08-01
KR20230069194A (ko) 2023-05-18
US20240085333A1 (en) 2024-03-14
US20240019375A1 (en) 2024-01-18
KR20220126768A (ko) 2022-09-16
US20250130172A1 (en) 2025-04-24

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