TWI780554B - 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 - Google Patents
用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 Download PDFInfo
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- TWI780554B TWI780554B TW109146759A TW109146759A TWI780554B TW I780554 B TWI780554 B TW I780554B TW 109146759 A TW109146759 A TW 109146759A TW 109146759 A TW109146759 A TW 109146759A TW I780554 B TWI780554 B TW I780554B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
- G01J3/4412—Scattering spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0636—Reflectors
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202062961721P | 2020-01-16 | 2020-01-16 | |
| US62/961,721 | 2020-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202129258A TW202129258A (zh) | 2021-08-01 |
| TWI780554B true TWI780554B (zh) | 2022-10-11 |
Family
ID=76857753
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109146759A TWI780554B (zh) | 2020-01-16 | 2020-12-30 | 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 |
| TW111133636A TWI862978B (zh) | 2020-01-16 | 2020-12-30 | 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111133636A TWI862978B (zh) | 2020-01-16 | 2020-12-30 | 用於拉曼光譜法之方法、光學量測系統及非暫時性電腦可讀媒體 |
Country Status (7)
| Country | Link |
|---|---|
| US (7) | US11415519B2 (https=) |
| JP (1) | JP7773470B2 (https=) |
| KR (3) | KR102818270B1 (https=) |
| CN (2) | CN115135976A (https=) |
| IL (1) | IL301321A (https=) |
| TW (2) | TWI780554B (https=) |
| WO (2) | WO2021144634A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7241663B2 (ja) * | 2019-11-01 | 2023-03-17 | 東京エレクトロン株式会社 | 情報処理装置、情報処理方法、情報処理プログラム及び半導体製造装置 |
| US11415519B2 (en) | 2020-01-16 | 2022-08-16 | Nova Ltd | Accurate Raman spectroscopy |
| CN115128056B (zh) * | 2022-05-25 | 2025-05-23 | 南京大学 | 一种时空分辨多模态拉曼高光谱显微成像系统及方法 |
| CN116678866B (zh) * | 2023-05-30 | 2026-03-27 | 哈尔滨工业大学 | 一种多偏振态入射显微拉曼光谱应力检测方法 |
| WO2025230247A1 (ko) * | 2024-04-30 | 2025-11-06 | 주식회사 아큐옵토텍 | 분석 장치 및 이를 이용한 분석 방법 |
| GB2641380A (en) * | 2024-05-29 | 2025-12-03 | Rsp Systems As | A device for non-invasive analyte measurement |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW300280B (https=) * | 1994-05-27 | 1997-03-11 | Eastman Chem Co | |
| US20150185076A1 (en) * | 2013-12-27 | 2015-07-02 | Nuctech Company Limited | Raman spectroscopic detection method |
| WO2018140602A1 (en) * | 2017-01-27 | 2018-08-02 | University Of Maryland, College Park | Methods and devices for reducing spectral noise and spectrometry systems employing such devices |
| TWI670483B (zh) * | 2014-03-13 | 2019-09-01 | 新加坡國立大學 | 光學干涉裝置、相移陣列及用以產生空間分佈干涉光圖樣之方法 |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5211070A (en) * | 1975-07-17 | 1977-01-27 | Ckd Corp | Digital type automatic balanced circuit for ac bridge |
| JPS617629Y2 (https=) | 1978-07-20 | 1986-03-08 | ||
| US4957367A (en) * | 1988-05-31 | 1990-09-18 | Lev Dulman | Inteferometric imaging system |
| JPH07333508A (ja) * | 1994-06-13 | 1995-12-22 | Olympus Optical Co Ltd | 共焦点光学顕微鏡 |
| US5713364A (en) * | 1995-08-01 | 1998-02-03 | Medispectra, Inc. | Spectral volume microprobe analysis of materials |
| US6151522A (en) * | 1998-03-16 | 2000-11-21 | The Research Foundation Of Cuny | Method and system for examining biological materials using low power CW excitation raman spectroscopy |
| JP4286351B2 (ja) * | 1998-11-13 | 2009-06-24 | 富士通株式会社 | 光アッド/ドロップ回路 |
| US6661509B2 (en) * | 2001-02-07 | 2003-12-09 | Thermo Electron Scientific Instruments Corporation | Method and apparatus for alignment of multiple beam paths in spectroscopy |
| US6750968B2 (en) * | 2000-10-03 | 2004-06-15 | Accent Optical Technologies, Inc. | Differential numerical aperture methods and device |
| GB0106342D0 (en) * | 2001-03-15 | 2001-05-02 | Renishaw Plc | Spectroscopy apparatus and method |
| IL146924A (en) * | 2001-12-04 | 2007-03-08 | Nova Measuring Instr Ltd | Metal cmp process monitoring |
| EP1480467A3 (en) * | 2003-03-28 | 2011-09-14 | Samsung Electronics Co., Ltd. | Video projector |
| WO2006005022A2 (en) * | 2004-06-30 | 2006-01-12 | Chemimage Corporation | Dynamic chemical imaging of biological cells and other subjects |
| ATE449317T1 (de) * | 2004-08-26 | 2009-12-15 | Koninkl Philips Electronics Nv | Autonome kalibrierung für optische analysesysteme |
| US7532314B1 (en) * | 2005-07-14 | 2009-05-12 | Battelle Memorial Institute | Systems and methods for biological and chemical detection |
| WO2007040589A1 (en) * | 2005-09-16 | 2007-04-12 | The Regents Of The University Of Michigan | Method and system for measuring sub-surface composition of a sample |
| FR2898992A1 (fr) * | 2006-03-21 | 2007-09-28 | Sc Spim Soc Civ Ile | Dispositif de formation de spectre sur un capteur optique a rejet spatial. |
| JP4852439B2 (ja) * | 2006-07-06 | 2012-01-11 | 株式会社リコー | ラマン分光測定装置、及びこれを用いたラマン分光測定法 |
| US7508524B2 (en) * | 2007-07-20 | 2009-03-24 | Vanderbilt University | Combined raman spectroscopy-optical coherence tomography (RS-OCT) system and applications of the same |
| FR2930031A1 (fr) * | 2008-04-14 | 2009-10-16 | Centre Nat Rech Scient | Dispositif et procede d'analyse exaltee d'un echantillon de particules. |
| JP5352111B2 (ja) * | 2008-04-16 | 2013-11-27 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法及びこれを用いた欠陥検査装置 |
| WO2010016267A1 (ja) * | 2008-08-08 | 2010-02-11 | 独立行政法人科学技術振興機構 | 粒子プローブ近傍に存在する物質の分布を検出する方法、粒子プローブを用いた画像化方法およびその利用 |
| CN101718589B (zh) * | 2009-11-14 | 2011-05-25 | 张青川 | 一种用于红外热像成像仪的光学读出方法 |
| US8014427B1 (en) * | 2010-05-11 | 2011-09-06 | Ultratech, Inc. | Line imaging systems and methods for laser annealing |
| US20170234728A1 (en) * | 2010-12-01 | 2017-08-17 | Mks Technology (D/B/A Snowy Range Instruments) | Spectrometer |
| JP5703907B2 (ja) * | 2011-03-31 | 2015-04-22 | ソニー株式会社 | 非線形ラマン分光装置、非線形ラマン分光システム及び非線形ラマン分光方法 |
| JP2012237714A (ja) * | 2011-05-13 | 2012-12-06 | Sony Corp | 非線形ラマン分光装置、顕微分光装置及び顕微分光イメージング装置 |
| US20160178439A1 (en) * | 2013-06-17 | 2016-06-23 | Invenio Imaging Inc. | Methods and systems for coherent raman scattering |
| KR101643357B1 (ko) * | 2013-08-26 | 2016-07-27 | 가부시키가이샤 뉴플레어 테크놀로지 | 촬상 장치, 검사 장치 및 검사 방법 |
| DE102014206576B4 (de) * | 2014-04-04 | 2015-12-03 | Celltool Gmbh | Vorrichtung und Verfahren zum Erkennen eines Prostatatumors |
| WO2016027453A1 (ja) * | 2014-08-18 | 2016-02-25 | 国立大学法人大阪大学 | ラマン分光顕微鏡及びラマン散乱光観察方法 |
| JP6379212B2 (ja) * | 2014-10-16 | 2018-08-22 | 株式会社日立ハイテクノロジーズ | 定位置制御装置、及び方法 |
| US10620124B2 (en) * | 2014-10-20 | 2020-04-14 | Hitachi, Ltd. | Optical analysis device and biomolecular analysis device |
| EP3218669B1 (en) * | 2014-11-16 | 2024-02-28 | ABDULHALIM, Ibrahim | Multi-spectral polarimetric variable optical device and imager |
| US10337983B2 (en) * | 2015-04-12 | 2019-07-02 | Taiwan Biophotonic Corporation | Module, device and method for optical measurement |
| US10295342B2 (en) * | 2015-08-14 | 2019-05-21 | Kla-Tencor Corporation | System, method and computer program product for calibration of metrology tools |
| TWI823344B (zh) * | 2015-12-15 | 2023-11-21 | 以色列商諾威股份有限公司 | 用於測量圖案化結構之特性的系統 |
| US11092494B1 (en) * | 2016-05-31 | 2021-08-17 | MKS Technology | Spectrometer |
| EP4645615A3 (en) * | 2016-06-03 | 2026-01-28 | The General Hospital Corporation | System and method for micro laser particles |
| JP7089719B2 (ja) * | 2017-02-07 | 2022-06-23 | ナノフォトン株式会社 | 分光顕微鏡、及び分光観察方法 |
| US10365211B2 (en) * | 2017-09-26 | 2019-07-30 | Kla-Tencor Corporation | Systems and methods for metrology beam stabilization |
| GB201815207D0 (en) * | 2018-09-18 | 2018-10-31 | Univ Nottingham | Raman spectroscopy method and apparatus |
| CN110231092B (zh) * | 2019-07-15 | 2024-04-12 | 天津大学 | 角度分辨显微拉曼光谱探测装置及探测方法 |
| US11415519B2 (en) | 2020-01-16 | 2022-08-16 | Nova Ltd | Accurate Raman spectroscopy |
| CN111175282A (zh) * | 2020-02-24 | 2020-05-19 | 江苏师范大学 | 一种基于物镜信号采集的拉曼光谱仪 |
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2020
- 2020-09-14 US US17/020,587 patent/US11415519B2/en active Active
- 2020-11-24 WO PCT/IB2020/061066 patent/WO2021144634A1/en not_active Ceased
- 2020-11-24 JP JP2022543478A patent/JP7773470B2/ja active Active
- 2020-11-24 KR KR1020227028272A patent/KR102818270B1/ko active Active
- 2020-11-24 US US17/759,031 patent/US11740183B2/en active Active
- 2020-11-24 CN CN202080093252.7A patent/CN115135976A/zh active Pending
- 2020-11-24 KR KR1020257018469A patent/KR20250088647A/ko active Pending
- 2020-12-30 TW TW109146759A patent/TWI780554B/zh active
- 2020-12-30 TW TW111133636A patent/TWI862978B/zh active
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2021
- 2021-09-14 CN CN202180076642.8A patent/CN116507905A/zh active Pending
- 2021-09-14 IL IL301321A patent/IL301321A/en unknown
- 2021-09-14 US US18/245,161 patent/US12152993B2/en active Active
- 2021-09-14 KR KR1020237012756A patent/KR20230069194A/ko active Pending
- 2021-09-14 WO PCT/IB2021/058327 patent/WO2022054021A1/en not_active Ceased
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2022
- 2022-08-01 US US17/816,713 patent/US11860104B2/en active Active
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2023
- 2023-08-18 US US18/452,494 patent/US12163892B2/en active Active
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2024
- 2024-01-02 US US18/402,708 patent/US12372473B2/en active Active
- 2024-11-04 US US18/936,790 patent/US20250130172A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW300280B (https=) * | 1994-05-27 | 1997-03-11 | Eastman Chem Co | |
| US20150185076A1 (en) * | 2013-12-27 | 2015-07-02 | Nuctech Company Limited | Raman spectroscopic detection method |
| TWI670483B (zh) * | 2014-03-13 | 2019-09-01 | 新加坡國立大學 | 光學干涉裝置、相移陣列及用以產生空間分佈干涉光圖樣之方法 |
| WO2018140602A1 (en) * | 2017-01-27 | 2018-08-02 | University Of Maryland, College Park | Methods and devices for reducing spectral noise and spectrometry systems employing such devices |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202129258A (zh) | 2021-08-01 |
| US20240085333A1 (en) | 2024-03-14 |
| TW202530669A (zh) | 2025-08-01 |
| US12163892B2 (en) | 2024-12-10 |
| KR20220126768A (ko) | 2022-09-16 |
| KR20230069194A (ko) | 2023-05-18 |
| WO2022054021A1 (en) | 2022-03-17 |
| WO2021144634A1 (en) | 2021-07-22 |
| KR20250088647A (ko) | 2025-06-17 |
| JP2023510413A (ja) | 2023-03-13 |
| US11740183B2 (en) | 2023-08-29 |
| US12372473B2 (en) | 2025-07-29 |
| US20240210322A1 (en) | 2024-06-27 |
| US20240019375A1 (en) | 2024-01-18 |
| US20230168200A1 (en) | 2023-06-01 |
| CN115135976A (zh) | 2022-09-30 |
| KR102818270B1 (ko) | 2025-06-16 |
| JP7773470B2 (ja) | 2025-11-19 |
| TWI862978B (zh) | 2024-11-21 |
| US20250130172A1 (en) | 2025-04-24 |
| US11415519B2 (en) | 2022-08-16 |
| CN116507905A (zh) | 2023-07-28 |
| IL301321A (en) | 2023-05-01 |
| US11860104B2 (en) | 2024-01-02 |
| TW202323799A (zh) | 2023-06-16 |
| US20210223179A1 (en) | 2021-07-22 |
| US12152993B2 (en) | 2024-11-26 |
| US20230044886A1 (en) | 2023-02-09 |
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