JPWO2021025119A1 - - Google Patents

Info

Publication number
JPWO2021025119A1
JPWO2021025119A1 JP2021537381A JP2021537381A JPWO2021025119A1 JP WO2021025119 A1 JPWO2021025119 A1 JP WO2021025119A1 JP 2021537381 A JP2021537381 A JP 2021537381A JP 2021537381 A JP2021537381 A JP 2021537381A JP WO2021025119 A1 JPWO2021025119 A1 JP WO2021025119A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021537381A
Other languages
Japanese (ja)
Other versions
JPWO2021025119A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021025119A1 publication Critical patent/JPWO2021025119A1/ja
Publication of JPWO2021025119A5 publication Critical patent/JPWO2021025119A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles ; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/10—Aluminium or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B23K2103/54—Glass

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2021537381A 2019-08-08 2020-08-06 Pending JPWO2021025119A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2019/031480 WO2021024480A1 (ja) 2019-08-08 2019-08-08 加工装置
PCT/JP2020/030204 WO2021025119A1 (ja) 2019-08-08 2020-08-06 加工装置

Publications (2)

Publication Number Publication Date
JPWO2021025119A1 true JPWO2021025119A1 (https=) 2021-02-11
JPWO2021025119A5 JPWO2021025119A5 (https=) 2023-08-24

Family

ID=74502798

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2021537539A Active JP7416069B2 (ja) 2019-08-08 2019-08-08 加工装置
JP2021537381A Pending JPWO2021025119A1 (https=) 2019-08-08 2020-08-06
JP2023220760A Active JP7666576B2 (ja) 2019-08-08 2023-12-27 加工装置
JP2025062332A Pending JP2025106404A (ja) 2019-08-08 2025-04-04 加工装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2021537539A Active JP7416069B2 (ja) 2019-08-08 2019-08-08 加工装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023220760A Active JP7666576B2 (ja) 2019-08-08 2023-12-27 加工装置
JP2025062332A Pending JP2025106404A (ja) 2019-08-08 2025-04-04 加工装置

Country Status (6)

Country Link
US (2) US20220355412A1 (https=)
EP (1) EP4011542A4 (https=)
JP (4) JP7416069B2 (https=)
CN (3) CN118635656A (https=)
TW (1) TW202115975A (https=)
WO (2) WO2021024480A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7270216B2 (ja) * 2019-08-23 2023-05-10 パナソニックＩｐマネジメント株式会社 レーザ加工装置、レーザ加工方法、および補正データ生成方法
WO2021038821A1 (ja) * 2019-08-30 2021-03-04 株式会社ニコン 処理システム及びロボットシステム
JP7539066B2 (ja) 2020-04-16 2024-08-23 パナソニックＩｐマネジメント株式会社 レーザ加工装置およびレーザ加工方法
JP7747048B2 (ja) * 2021-08-31 2025-10-01 株式会社ニコン 移動誤差算出システム、工作機械、算出装置、較正方法、光計測装置
US20240416449A1 (en) 2021-10-27 2024-12-19 Nikon Corporation Data generation method, cloud system, processing apparatus, computer program, and recording medium
DE102022116927A1 (de) 2022-07-07 2024-01-18 Trumpf Laser Gmbh Laserbearbeitungsmaschine mit frequenzkammbasiertem Abstandssensor sowie zugehöriges Verfahren mit frequenzkammbasierter Abstandsmessung
JPWO2024042681A1 (https=) * 2022-08-25 2024-02-29
FR3146078B1 (fr) * 2023-02-23 2025-02-14 Irt Antoine De Saint Exupery Dispositif et procédé de traitement surfacique au LASER
JP2024164367A (ja) * 2023-05-15 2024-11-27 タツモ株式会社 接合修復方法
WO2026030395A1 (en) * 2024-08-01 2026-02-05 Nikon Corporation Systems and method for large-scale optical manufacturing
DE102024122832A1 (de) * 2024-08-09 2026-02-12 Clean-Lasersysteme Gmbh Laserbasierte Vorrichtung zur Messung der Fokuslage und/oder zur Kontrastmessung

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JPS5035796A (https=) * 1973-08-01 1975-04-04
JP2002290056A (ja) * 2001-03-27 2002-10-04 Sumitomo Heavy Ind Ltd レーザ加工装置
JP2004243383A (ja) * 2003-02-14 2004-09-02 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機
JP2010099679A (ja) * 2008-10-22 2010-05-06 Honda Motor Co Ltd レーザ加工装置及びその位置検出方法
JP2013108977A (ja) * 2011-10-25 2013-06-06 The Wakasa Wan Energy Research Center レーザー除染装置
JP2017187507A (ja) * 2017-07-07 2017-10-12 株式会社東京精密 ステージの位置制御装置
JP2019076945A (ja) * 2017-10-26 2019-05-23 パナソニックＩｐマネジメント株式会社 レーザ溶接装置及びレーザ溶接方法

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US5001324A (en) * 1989-09-14 1991-03-19 General Electric Company Precision joint tracking laser welding system
JP3174473B2 (ja) * 1995-03-13 2001-06-11 キヤノン株式会社 電子放出素子の製造方法および加工装置
DE10207535B4 (de) * 2002-02-22 2006-07-06 Carl Zeiss Vorrichtung zum Bearbeiten und Vermessen eines Objekts sowie Verfahren hierzu
JP4334290B2 (ja) * 2003-07-24 2009-09-30 株式会社東芝 レーザー照射装置
JP2005161387A (ja) * 2003-12-05 2005-06-23 Nissan Motor Co Ltd レーザ加工装置及びレーザ加工方法
JP5120814B2 (ja) * 2008-03-28 2013-01-16 株式会社ブイ・テクノロジー パターン形成方法及びパターン形成装置
JP2011196785A (ja) 2010-03-18 2011-10-06 Disco Corp チャックテーブルに保持された被加工物の計測装置およびレーザー加工機
JP2011237348A (ja) 2010-05-12 2011-11-24 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の高さ位置計測装置およびレーザー加工機
ES3061078T3 (en) * 2010-09-25 2026-03-31 Ipg Photonics Canada Inc Aparatus and method for coherent imaging and feedback control for modification of materials
PL2972479T3 (pl) * 2013-03-13 2021-04-19 Ipg Photonics (Canada) Inc. Sposoby i układy do charakteryzacji właściwości obróbki laserem poprzez pomiar dynamiki kapilary z zastosowaniem interferometrii
JP6148075B2 (ja) * 2013-05-31 2017-06-14 株式会社ディスコ レーザー加工装置
DE102013015656B4 (de) * 2013-09-23 2016-02-18 Precitec Optronik Gmbh Verfahren zum Messen der Eindringtiefe eines Laserstrahls in ein Werkstück, Verfahren zum Bearbeiten eines Werkstücks sowie Laserbearbeitungsvorrichtung
JP6244017B2 (ja) 2014-04-23 2017-12-06 国立研究開発法人科学技術振興機構 ブレード複合型開放流路装置およびその接合体
JP6836048B2 (ja) * 2014-08-27 2021-02-24 国立大学法人電気通信大学 距離測定装置
JP6327525B2 (ja) 2015-01-28 2018-05-23 株式会社東京精密 レーザーダイシング装置
DE102016001661B3 (de) * 2016-02-12 2017-04-13 Lessmüller Lasertechnik GmbH Messvorrichtung und Verfahren zum Ermitteln einer relativen Neigung eines Werkstücks mittels optischer Kohärenztomographie bei einer Bearbeitung
JP2018153842A (ja) * 2017-03-17 2018-10-04 トヨタ自動車株式会社 計測装置およびレーザ溶接装置
US10744539B2 (en) * 2017-10-27 2020-08-18 The Boeing Company Optimized-coverage selective laser ablation systems and methods
JP7115973B2 (ja) * 2018-12-28 2022-08-09 株式会社キーエンス レーザ加工装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035796A (https=) * 1973-08-01 1975-04-04
JP2002290056A (ja) * 2001-03-27 2002-10-04 Sumitomo Heavy Ind Ltd レーザ加工装置
JP2004243383A (ja) * 2003-02-14 2004-09-02 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
JP2010082663A (ja) * 2008-09-30 2010-04-15 Sunx Ltd レーザ加工機
JP2010099679A (ja) * 2008-10-22 2010-05-06 Honda Motor Co Ltd レーザ加工装置及びその位置検出方法
JP2013108977A (ja) * 2011-10-25 2013-06-06 The Wakasa Wan Energy Research Center レーザー除染装置
JP2017187507A (ja) * 2017-07-07 2017-10-12 株式会社東京精密 ステージの位置制御装置
JP2019076945A (ja) * 2017-10-26 2019-05-23 パナソニックＩｐマネジメント株式会社 レーザ溶接装置及びレーザ溶接方法

Also Published As

Publication number Publication date
JP2025106404A (ja) 2025-07-15
US20260108978A1 (en) 2026-04-23
JP7416069B2 (ja) 2024-01-17
JP2024045133A (ja) 2024-04-02
JPWO2021024480A1 (https=) 2021-02-11
EP4011542A4 (en) 2023-09-20
TW202115975A (zh) 2021-04-16
JP7666576B2 (ja) 2025-04-22
CN118635656A (zh) 2024-09-13
WO2021024480A1 (ja) 2021-02-11
CN114206538A (zh) 2022-03-18
CN114206538B (zh) 2024-07-19
US20220355412A1 (en) 2022-11-10
CN118595591A (zh) 2024-09-06
WO2021025119A1 (ja) 2021-02-11
EP4011542A1 (en) 2022-06-15

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