JPWO2020222940A5 - - Google Patents

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Publication number
JPWO2020222940A5
JPWO2020222940A5 JP2021563049A JP2021563049A JPWO2020222940A5 JP WO2020222940 A5 JPWO2020222940 A5 JP WO2020222940A5 JP 2021563049 A JP2021563049 A JP 2021563049A JP 2021563049 A JP2021563049 A JP 2021563049A JP WO2020222940 A5 JPWO2020222940 A5 JP WO2020222940A5
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JP
Japan
Prior art keywords
mixer
fluid
process fluid
nozzle
slotted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021563049A
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English (en)
Japanese (ja)
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JP2022530617A (ja
JP7445105B2 (ja
Publication date
Priority claimed from US16/560,481 external-priority patent/US11383211B2/en
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Publication of JP2022530617A publication Critical patent/JP2022530617A/ja
Publication of JPWO2020222940A5 publication Critical patent/JPWO2020222940A5/ja
Application granted granted Critical
Publication of JP7445105B2 publication Critical patent/JP7445105B2/ja
Active legal-status Critical Current
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JP2021563049A 2019-04-29 2020-03-24 高い流量及び高い均一性を有するユースポイント動的濃度送達システム Active JP7445105B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962839917P 2019-04-29 2019-04-29
US62/839,917 2019-04-29
US16/560,481 2019-09-04
US16/560,481 US11383211B2 (en) 2019-04-29 2019-09-04 Point-of-use dynamic concentration delivery system with high flow and high uniformity
PCT/US2020/024387 WO2020222940A1 (en) 2019-04-29 2020-03-24 Point-of-use dynamic concentration delivery system with high flow and high uniformity

Publications (3)

Publication Number Publication Date
JP2022530617A JP2022530617A (ja) 2022-06-30
JPWO2020222940A5 true JPWO2020222940A5 (zh) 2022-11-16
JP7445105B2 JP7445105B2 (ja) 2024-03-07

Family

ID=72922590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021563049A Active JP7445105B2 (ja) 2019-04-29 2020-03-24 高い流量及び高い均一性を有するユースポイント動的濃度送達システム

Country Status (6)

Country Link
US (1) US11383211B2 (zh)
JP (1) JP7445105B2 (zh)
KR (1) KR20210150546A (zh)
CN (1) CN113767338A (zh)
TW (1) TWI828896B (zh)
WO (1) WO2020222940A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220236639A1 (en) * 2021-01-22 2022-07-28 Tokyo Electron Limited Directed self-assembly

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3910462A (en) * 1974-06-06 1975-10-07 Flushing Plastics Corp Apparatus for dispensing cleaning solution
JPS60161725A (ja) * 1984-01-30 1985-08-23 Mitsubishi Heavy Ind Ltd 液体配合方法及び装置
JPH05283332A (ja) * 1992-04-01 1993-10-29 Hitachi Ltd 現像方法および装置
JP3559144B2 (ja) * 1997-05-23 2004-08-25 大日本スクリーン製造株式会社 基板処理装置
JP3529979B2 (ja) * 1997-06-06 2004-05-24 大日本スクリーン製造株式会社 基板処理装置
US6376013B1 (en) * 1999-10-06 2002-04-23 Advanced Micro Devices, Inc. Multiple nozzles for dispensing resist
US7516909B2 (en) * 2000-02-11 2009-04-14 United States Gypsum Company Continuous slurry dispenser apparatus
US7097347B2 (en) * 2001-05-07 2006-08-29 Uop Llc Static mixer and process for mixing at least two fluids
CN101424886A (zh) * 2001-08-28 2009-05-06 东京威力科创股份有限公司 显影液涂布装置
JP3939556B2 (ja) 2002-01-18 2007-07-04 富士フイルム株式会社 マイクロミキサー
AU2003268000A1 (en) * 2002-07-19 2004-02-09 Mykrolis Corporation Liquid flow controller and precision dispense apparatus and system
TW200536601A (en) 2003-11-21 2005-11-16 Ebara Corp Micorfluidic treatment method and device
DE10359490A1 (de) * 2003-12-18 2005-07-14 Gerold Heckert Scherenhubtisch
WO2005063368A2 (en) * 2003-12-23 2005-07-14 The Regents Of The University Of Michigan Method for mixing fluid streams, microfluidic mixer and microfluidic chip utilizing same
EP2261650A3 (en) * 2004-09-15 2011-07-06 IntegenX Inc. Microfluidic devices
US10035113B2 (en) * 2015-02-26 2018-07-31 Tokyo Electron Limited Method and system for a spiral mixer
TWI760354B (zh) * 2016-08-11 2022-04-11 日商東京威力科創股份有限公司 高純度分配單元
US10403501B2 (en) * 2016-08-11 2019-09-03 Tokyo Electron Limited High-purity dispense system
GB201701946D0 (en) * 2017-02-06 2017-03-22 Univ Leeds Innovations Ltd Fluid flow device

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