JPWO2020213603A1 - - Google Patents
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- Publication number
- JPWO2020213603A1 JPWO2020213603A1 JP2021514171A JP2021514171A JPWO2020213603A1 JP WO2020213603 A1 JPWO2020213603 A1 JP WO2020213603A1 JP 2021514171 A JP2021514171 A JP 2021514171A JP 2021514171 A JP2021514171 A JP 2021514171A JP WO2020213603 A1 JPWO2020213603 A1 JP WO2020213603A1
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- Japan
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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TWI804234B (zh) * | 2022-03-15 | 2023-06-01 | 新唐科技股份有限公司 | 半導體結構及其形成方法 |
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JP2013045973A (ja) * | 2011-08-25 | 2013-03-04 | Panasonic Corp | 半導体装置 |
JP2013219150A (ja) * | 2012-04-06 | 2013-10-24 | National Institute Of Advanced Industrial & Technology | 炭化珪素半導体装置のオーミック電極の製造方法 |
JP2015046500A (ja) * | 2013-08-28 | 2015-03-12 | 三菱電機株式会社 | 炭化珪素半導体装置 |
JP2017059636A (ja) * | 2015-09-15 | 2017-03-23 | 三菱電機株式会社 | 半導体装置の製造方法 |
JP2017118060A (ja) * | 2015-12-25 | 2017-06-29 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP2017168663A (ja) * | 2016-03-16 | 2017-09-21 | 株式会社東芝 | 半導体装置 |
JP2018120929A (ja) * | 2017-01-24 | 2018-08-02 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
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JP5525940B2 (ja) * | 2009-07-21 | 2014-06-18 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP2015207780A (ja) | 2015-06-16 | 2015-11-19 | 富士電機株式会社 | ワイドバンドギャップ半導体装置 |
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JP2013045973A (ja) * | 2011-08-25 | 2013-03-04 | Panasonic Corp | 半導体装置 |
JP2013219150A (ja) * | 2012-04-06 | 2013-10-24 | National Institute Of Advanced Industrial & Technology | 炭化珪素半導体装置のオーミック電極の製造方法 |
JP2015046500A (ja) * | 2013-08-28 | 2015-03-12 | 三菱電機株式会社 | 炭化珪素半導体装置 |
JP2017059636A (ja) * | 2015-09-15 | 2017-03-23 | 三菱電機株式会社 | 半導体装置の製造方法 |
JP2017118060A (ja) * | 2015-12-25 | 2017-06-29 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP2017168663A (ja) * | 2016-03-16 | 2017-09-21 | 株式会社東芝 | 半導体装置 |
JP2018120929A (ja) * | 2017-01-24 | 2018-08-02 | トヨタ自動車株式会社 | 半導体装置とその製造方法 |
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WO2020213603A1 (ja) | 2020-10-22 |
DE212020000212U1 (de) | 2020-10-20 |
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