JPWO2020178651A5 - - Google Patents
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- Publication number
- JPWO2020178651A5 JPWO2020178651A5 JP2021503228A JP2021503228A JPWO2020178651A5 JP WO2020178651 A5 JPWO2020178651 A5 JP WO2020178651A5 JP 2021503228 A JP2021503228 A JP 2021503228A JP 2021503228 A JP2021503228 A JP 2021503228A JP WO2020178651 A5 JPWO2020178651 A5 JP WO2020178651A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive
- conductive film
- layer
- metal oxide
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 9
- 229910044991 metal oxide Inorganic materials 0.000 claims 5
- 150000004706 metal oxides Chemical class 0.000 claims 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024106783A JP7794897B2 (ja) | 2019-03-01 | 2024-07-02 | 半導体装置 |
| JP2025265450A JP2026048898A (ja) | 2019-03-01 | 2025-12-18 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019037921 | 2019-03-01 | ||
| JP2019037921 | 2019-03-01 | ||
| PCT/IB2020/051294 WO2020178651A1 (ja) | 2019-03-01 | 2020-02-17 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024106783A Division JP7794897B2 (ja) | 2019-03-01 | 2024-07-02 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020178651A1 JPWO2020178651A1 (https=) | 2020-09-10 |
| JPWO2020178651A5 true JPWO2020178651A5 (https=) | 2023-02-27 |
| JP7515453B2 JP7515453B2 (ja) | 2024-07-12 |
Family
ID=72338412
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021503228A Active JP7515453B2 (ja) | 2019-03-01 | 2020-02-17 | 半導体装置 |
| JP2024106783A Active JP7794897B2 (ja) | 2019-03-01 | 2024-07-02 | 半導体装置 |
| JP2025265450A Pending JP2026048898A (ja) | 2019-03-01 | 2025-12-18 | 半導体装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024106783A Active JP7794897B2 (ja) | 2019-03-01 | 2024-07-02 | 半導体装置 |
| JP2025265450A Pending JP2026048898A (ja) | 2019-03-01 | 2025-12-18 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US12136674B2 (https=) |
| JP (3) | JP7515453B2 (https=) |
| KR (1) | KR20210129114A (https=) |
| CN (1) | CN113508468A (https=) |
| WO (1) | WO2020178651A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116240630A (zh) * | 2018-08-01 | 2023-06-09 | 出光兴产株式会社 | 晶体化合物、氧化物烧结体、溅射靶、晶质及无定形氧化物薄膜、薄膜晶体管及电子设备 |
| KR102940621B1 (ko) * | 2021-11-02 | 2026-03-17 | 엘지디스플레이 주식회사 | 박막 트랜지스터 및 이를 포함하는 표시장치 |
| TWI870090B (zh) * | 2023-11-08 | 2025-01-11 | 友達光電股份有限公司 | 顯示裝置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100295042A1 (en) * | 2008-01-23 | 2010-11-25 | Idemitsu Kosan Co., Ltd. | Field-effect transistor, method for manufacturing field-effect transistor, display device using field-effect transistor, and semiconductor device |
| CN106200185A (zh) * | 2009-10-16 | 2016-12-07 | 株式会社半导体能源研究所 | 显示设备 |
| KR102071545B1 (ko) | 2012-05-31 | 2020-01-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| CN111524967B (zh) | 2014-02-21 | 2024-07-12 | 株式会社半导体能源研究所 | 半导体膜、晶体管、半导体装置、显示装置以及电子设备 |
| US10043913B2 (en) * | 2014-04-30 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, display device, module, and electronic device |
| JP6647841B2 (ja) * | 2014-12-01 | 2020-02-14 | 株式会社半導体エネルギー研究所 | 酸化物の作製方法 |
| TWI686874B (zh) * | 2014-12-26 | 2020-03-01 | 日商半導體能源研究所股份有限公司 | 半導體裝置、顯示裝置、顯示模組、電子裝置、氧化物及氧化物的製造方法 |
| KR20170101233A (ko) * | 2014-12-26 | 2017-09-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링용 타깃의 제작 방법 |
| US9917209B2 (en) * | 2015-07-03 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including step of forming trench over semiconductor |
| US10553690B2 (en) * | 2015-08-04 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US10685614B2 (en) * | 2016-03-17 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
| US10043659B2 (en) | 2016-05-20 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device or display device including the same |
| US10692452B2 (en) | 2017-01-16 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
-
2020
- 2020-02-17 JP JP2021503228A patent/JP7515453B2/ja active Active
- 2020-02-17 US US17/433,728 patent/US12136674B2/en active Active
- 2020-02-17 CN CN202080018234.2A patent/CN113508468A/zh active Pending
- 2020-02-17 KR KR1020217029419A patent/KR20210129114A/ko active Pending
- 2020-02-17 WO PCT/IB2020/051294 patent/WO2020178651A1/ja not_active Ceased
-
2024
- 2024-07-02 JP JP2024106783A patent/JP7794897B2/ja active Active
- 2024-10-29 US US18/930,006 patent/US20250169113A1/en active Pending
-
2025
- 2025-12-18 JP JP2025265450A patent/JP2026048898A/ja active Pending
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