JPWO2020110522A1 - 走行車システム - Google Patents
走行車システム Download PDFInfo
- Publication number
- JPWO2020110522A1 JPWO2020110522A1 JP2020558181A JP2020558181A JPWO2020110522A1 JP WO2020110522 A1 JPWO2020110522 A1 JP WO2020110522A1 JP 2020558181 A JP2020558181 A JP 2020558181A JP 2020558181 A JP2020558181 A JP 2020558181A JP WO2020110522 A1 JPWO2020110522 A1 JP WO2020110522A1
- Authority
- JP
- Japan
- Prior art keywords
- track
- traveling
- guide surface
- guide
- traveling vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005096 rolling process Methods 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
- B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/02—Runways, tracks or trackways for trolleys or cranes for underhung trolleys or cranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Abstract
Description
D1・・・第1方向
D2・・・第2方向
G1・・・第1ガイド面
G2・・・第2ガイド面
G3a・・・第1接続ガイド面
G3b・・・第2接続ガイド面
G3c・・・連続面
M・・・物品
L1、L2・・・間隔
R・・・格子状軌道(軌道)
R1・・・第1軌道
R2・・・第2軌道
R3・・・接続軌道
Rp・・・ガイド板
SYS・・・走行車システム
10・・・本体部
20・・・走行部
21・・・走行車輪
21a,22a・・・車軸
22・・・補助車輪
30・・・連結部
40・・・ガイド部
41・・・ガイドローラ
41a・・・ローラ軸
50・・・制御部
100・・・天井走行車
本発明の態様に係る走行車システムは、第1方向に沿って延在する第1軌道と、第1方向とは異なる第2方向に沿って延在する第2軌道と、第1軌道に対して第1方向に隣り合うと共に第2軌道に対して第2方向に隣り合い、且つ第1軌道及び第2軌道それぞれとの間に間隙を隔てて配置された接続軌道と、を有する軌道と、軌道に沿って走行する天井走行車と、を備える走行車システムであって、軌道は、第1軌道に沿って設けられた第1ガイド面と、第2軌道に沿って設けられた第2ガイド面と、を有し、天井走行車は、第1軌道上、第2軌道上、及び接続軌道上を転動する走行車輪と、軌道よりも下方に配置される本体部と、走行車輪の車軸と本体部とを連結し、走行車輪が接続軌道上を転動する際に間隙を通過する連結部と、本体部に対して連結部を旋回軸まわりに旋回させることにより、走行車輪が第1軌道上を転動する第1状態と、走行車輪が第2軌道上を転動する第2状態とに切り替える方向転換機構と、連結部に設けられて、第1状態においては第1ガイド面に沿って移動し、第2状態においては第2ガイド面に沿って移動するガイド部と、を有する。
Claims (9)
- 第1方向に沿って延在する第1軌道と、前記第1方向とは異なる第2方向に沿って延在する第2軌道と、前記第1軌道に対して前記第1方向に隣り合うと共に前記第2軌道に対して前記第2方向に隣り合い、且つ前記第1軌道及び前記第2軌道それぞれとの間に間隙を隔てて配置された接続軌道と、を有する軌道と、
前記軌道に沿って走行する天井走行車と、を備える走行車システムであって、
前記軌道は、
前記第1軌道に沿って設けられた第1ガイド面と、
前記第2軌道に沿って設けられた第2ガイド面と、を有し、
前記天井走行車は、
前記第1軌道上、前記第2軌道上、及び前記接続軌道上を転動する走行車輪と、
前記軌道よりも下方に配置される本体部と、
前記走行車輪の車軸と前記本体部とを連結し、前記走行車輪が前記接続軌道上を転動する際に前記間隙を通過する連結部と、
前記本体部に対して前記連結部を旋回軸まわりに旋回させることにより、前記走行車輪が前記第1軌道上を転動する第1状態と、前記走行車輪が前記第2軌道上を転動する第2状態とを切り替える方向転換機構と、
前記連結部に設けられて、前記第1状態においては前記第1ガイド面に沿って移動し、前記第2状態においては前記第2ガイド面に沿って移動するガイド部と、を有する、走行車システム。 - 前記第1ガイド面は、前記第1軌道の側面であり、
前記第2ガイド面は、前記第2軌道の側面である、請求項1に記載の走行車システム。 - 前記ガイド部は、前記走行車輪の前記車軸と、前記本体部との間の高さに配置され、
前記第1ガイド面及び前記第2ガイド面は、前記走行車輪の前記車軸と、前記本体部との間の高さに配置される、請求項1又は請求項2に記載の走行車システム。 - 前記ガイド部は、前記第1ガイド面又は前記第2ガイド面に接触した際に転動可能なガイドローラである、請求項1から請求項3のいずれか一項に記載の走行車システム。
- 前記接続軌道は、前記第1ガイド面と同一の高さかつ同一方向に設けられる第1接続ガイド面と、前記第2ガイド面と同一の高さかつ同一方向に設けられる第2接続ガイド面と、を有する、請求項1から請求項4のいずれか一項に記載の走行車システム。
- 前記接続軌道は、前記第1接続ガイド面と前記第2接続ガイド面とを連続させる連続面を備える、請求項5に記載の走行車システム。
- 前記連続面は、前記第1接続ガイド面と前記第2接続ガイド面とを滑らかに接続する曲面である、請求項6に記載の走行車システム。
- 前記本体部は、前記連結部の前記旋回軸の軸方向から見て矩形状であり、4つのコーナー部のそれぞれに前記走行車輪、前記連結部、前記方向転換機構、及び前記ガイド部を有する、請求項1から請求項7のいずれか一項に記載の走行車システム。
- 前記天井走行車の走行方向に並ぶ2つの前記ガイド部の間隔は、前記第1方向又は前記第2方向において隣り合う2つの前記間隙の間隔と異なる、請求項8に記載の走行車システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018222552 | 2018-11-28 | ||
JP2018222552 | 2018-11-28 | ||
PCT/JP2019/041503 WO2020110522A1 (ja) | 2018-11-28 | 2019-10-23 | 走行車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020110522A1 true JPWO2020110522A1 (ja) | 2021-11-11 |
JP7070704B2 JP7070704B2 (ja) | 2022-05-18 |
Family
ID=70853448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020558181A Active JP7070704B2 (ja) | 2018-11-28 | 2019-10-23 | 走行車システム |
Country Status (9)
Country | Link |
---|---|
US (1) | US20220032971A1 (ja) |
EP (1) | EP3888994A4 (ja) |
JP (1) | JP7070704B2 (ja) |
KR (1) | KR102461617B1 (ja) |
CN (1) | CN113165671B (ja) |
IL (1) | IL283506A (ja) |
SG (1) | SG11202105601SA (ja) |
TW (1) | TWI810407B (ja) |
WO (1) | WO2020110522A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022255062A1 (ja) | 2021-06-03 | 2022-12-08 | 村田機械株式会社 | 走行車システム、単位ユニット、及び格子状軌道 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004189209A (ja) * | 2002-12-06 | 2004-07-08 | Samsung Electronics Co Ltd | オーバヘッドタイプの移送装置 |
JP2016175506A (ja) * | 2015-03-19 | 2016-10-06 | 村田機械株式会社 | 搬送台車と搬送台車システム |
WO2018037762A1 (ja) * | 2016-08-26 | 2018-03-01 | 村田機械株式会社 | 有軌道台車システム、及び有軌道台車 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6629502B2 (en) * | 2000-09-14 | 2003-10-07 | Daifuku Co., Ltd. | Conveyance system |
JP5440870B2 (ja) * | 2010-08-19 | 2014-03-12 | 株式会社ダイフク | 物品搬送設備 |
SG189232A1 (en) * | 2010-11-04 | 2013-05-31 | Murata Machinery Ltd | Conveying system and conveying method |
JP5630661B2 (ja) * | 2011-12-19 | 2014-11-26 | 株式会社ダイフク | 天井設置型の物品搬送設備 |
KR101521498B1 (ko) * | 2013-05-31 | 2015-05-19 | 주식회사 에스에프에이 | 반송대차 및 이를 이용하는 반송시스템 |
WO2015005873A1 (en) * | 2013-07-12 | 2015-01-15 | Kavcic Samo | A vehicle |
KR101530028B1 (ko) * | 2013-10-18 | 2015-06-19 | 주식회사 에스에프에이 | 이송대차 시스템 |
JP6168477B2 (ja) * | 2015-03-31 | 2017-07-26 | 村田機械株式会社 | 走行台車システム及び走行台車の走行方法 |
JP6686834B2 (ja) * | 2016-10-12 | 2020-04-22 | 株式会社ダイフク | 物品搬送設備 |
JP6677187B2 (ja) * | 2017-01-31 | 2020-04-08 | 株式会社ダイフク | 物品搬送設備 |
JP6769336B2 (ja) * | 2017-02-23 | 2020-10-14 | 株式会社ダイフク | 物品搬送車 |
-
2019
- 2019-10-23 CN CN201980078570.3A patent/CN113165671B/zh active Active
- 2019-10-23 JP JP2020558181A patent/JP7070704B2/ja active Active
- 2019-10-23 WO PCT/JP2019/041503 patent/WO2020110522A1/ja active Application Filing
- 2019-10-23 US US17/297,508 patent/US20220032971A1/en active Pending
- 2019-10-23 EP EP19888268.0A patent/EP3888994A4/en active Pending
- 2019-10-23 SG SG11202105601SA patent/SG11202105601SA/en unknown
- 2019-10-23 KR KR1020217016113A patent/KR102461617B1/ko active IP Right Grant
- 2019-11-20 TW TW108142071A patent/TWI810407B/zh active
-
2021
- 2021-05-27 IL IL283506A patent/IL283506A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004189209A (ja) * | 2002-12-06 | 2004-07-08 | Samsung Electronics Co Ltd | オーバヘッドタイプの移送装置 |
JP2016175506A (ja) * | 2015-03-19 | 2016-10-06 | 村田機械株式会社 | 搬送台車と搬送台車システム |
WO2018037762A1 (ja) * | 2016-08-26 | 2018-03-01 | 村田機械株式会社 | 有軌道台車システム、及び有軌道台車 |
Also Published As
Publication number | Publication date |
---|---|
TW202028036A (zh) | 2020-08-01 |
WO2020110522A1 (ja) | 2020-06-04 |
CN113165671B (zh) | 2024-02-02 |
EP3888994A4 (en) | 2022-08-03 |
IL283506A (en) | 2021-07-29 |
JP7070704B2 (ja) | 2022-05-18 |
TWI810407B (zh) | 2023-08-01 |
US20220032971A1 (en) | 2022-02-03 |
SG11202105601SA (en) | 2021-06-29 |
KR102461617B1 (ko) | 2022-11-01 |
KR20210080536A (ko) | 2021-06-30 |
CN113165671A (zh) | 2021-07-23 |
EP3888994A1 (en) | 2021-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2020090288A1 (ja) | 天井搬送車及び天井搬送車システム | |
KR102165190B1 (ko) | 유궤도 대차 시스템 및 유궤도 대차 | |
WO2019102743A1 (ja) | 走行台車 | |
JP7001167B2 (ja) | 天井走行車システム | |
JP7070704B2 (ja) | 走行車システム | |
JP7040636B2 (ja) | 走行車システム | |
WO2022255062A1 (ja) | 走行車システム、単位ユニット、及び格子状軌道 | |
TW201943638A (zh) | 搬送裝置 | |
WO2021235029A1 (ja) | 天井搬送システム | |
WO2022149305A1 (ja) | 天井保管システム | |
JP2023168764A (ja) | 走行設備 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210527 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210527 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220405 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220418 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7070704 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |