JPWO2020081277A5 - - Google Patents

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Publication number
JPWO2020081277A5
JPWO2020081277A5 JP2021520961A JP2021520961A JPWO2020081277A5 JP WO2020081277 A5 JPWO2020081277 A5 JP WO2020081277A5 JP 2021520961 A JP2021520961 A JP 2021520961A JP 2021520961 A JP2021520961 A JP 2021520961A JP WO2020081277 A5 JPWO2020081277 A5 JP WO2020081277A5
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JP
Japan
Prior art keywords
lens
electron
lens element
assembly
curved grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021520961A
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English (en)
Japanese (ja)
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JP2022505064A5 (https=
JP2022505064A (ja
Publication date
Priority claimed from US16/163,263 external-priority patent/US11373838B2/en
Application filed filed Critical
Publication of JP2022505064A publication Critical patent/JP2022505064A/ja
Publication of JPWO2020081277A5 publication Critical patent/JPWO2020081277A5/ja
Publication of JP2022505064A5 publication Critical patent/JP2022505064A5/ja
Priority to JP2023132058A priority Critical patent/JP7587649B2/ja
Pending legal-status Critical Current

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JP2021520961A 2018-10-17 2019-10-08 テレセントリック照明を有するマルチビーム電子特性評価ツール Pending JP2022505064A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023132058A JP7587649B2 (ja) 2018-10-17 2023-08-14 テレセントリック照明を有するマルチビーム電子特性評価ツール

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/163,263 2018-10-17
US16/163,263 US11373838B2 (en) 2018-10-17 2018-10-17 Multi-beam electron characterization tool with telecentric illumination
PCT/US2019/055077 WO2020081277A1 (en) 2018-10-17 2019-10-08 Multi-beam electron characterization tool with telecentric illumination

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023132058A Division JP7587649B2 (ja) 2018-10-17 2023-08-14 テレセントリック照明を有するマルチビーム電子特性評価ツール

Publications (3)

Publication Number Publication Date
JP2022505064A JP2022505064A (ja) 2022-01-14
JPWO2020081277A5 true JPWO2020081277A5 (https=) 2022-10-11
JP2022505064A5 JP2022505064A5 (https=) 2022-10-11

Family

ID=70279226

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021520961A Pending JP2022505064A (ja) 2018-10-17 2019-10-08 テレセントリック照明を有するマルチビーム電子特性評価ツール
JP2023132058A Active JP7587649B2 (ja) 2018-10-17 2023-08-14 テレセントリック照明を有するマルチビーム電子特性評価ツール

Family Applications After (1)

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JP2023132058A Active JP7587649B2 (ja) 2018-10-17 2023-08-14 テレセントリック照明を有するマルチビーム電子特性評価ツール

Country Status (7)

Country Link
US (1) US11373838B2 (https=)
EP (1) EP3853880A4 (https=)
JP (2) JP2022505064A (https=)
KR (1) KR102480545B1 (https=)
CN (1) CN112805803B (https=)
TW (1) TWI799656B (https=)
WO (1) WO2020081277A1 (https=)

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US11638938B2 (en) 2019-06-10 2023-05-02 Kla Corporation In situ process chamber chuck cleaning by cleaning substrate
US11607716B1 (en) 2020-06-23 2023-03-21 Kla Corporation Systems and methods for chuck cleaning
JP7689866B2 (ja) * 2021-05-25 2025-06-09 株式会社ミツトヨ 顕微鏡ユニット
JP2023046921A (ja) * 2021-09-24 2023-04-05 株式会社ニューフレアテクノロジー マルチ電子ビーム画像取得装置、マルチ電子ビーム検査装置、及びマルチ電子ビーム画像取得方法
US11651934B2 (en) 2021-09-30 2023-05-16 Kla Corporation Systems and methods of creating multiple electron beams

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EP2019415B1 (en) * 2007-07-24 2016-05-11 IMS Nanofabrication AG Multi-beam source
JP5268170B2 (ja) 2008-04-15 2013-08-21 マッパー・リソグラフィー・アイピー・ビー．ブイ． 投影レンズ構成体
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