JPWO2020026839A1 - 基板液処理装置および基板液処理方法 - Google Patents
基板液処理装置および基板液処理方法 Download PDFInfo
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- 238000010438 heat treatment Methods 0.000 claims abstract description 62
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Abstract
Description
まず、基板保持部52がヒータ63(加熱部)を具備した蓋体6によって覆われ、基板保持部52を加熱する(ステップS1)。この場合、まず、蓋体移動機構7の旋回モータ72が駆動されて、退避位置に位置づけられていた蓋体6が水平方向に旋回移動して、上方位置に位置づけられる。続いて、蓋体移動機構7のシリンダ73が駆動されて、上方位置に位置づけられた蓋体6が下降する。これにより、基板保持部52が蓋体6によって覆われ、ヒータ63(加熱部)が駆動されて、基板保持部52が加熱される。基板保持加熱工程での基板保持部52の加熱温度は、50℃以上に加熱される。例えば、めっき液L1の吐出時の温度が55℃以上75℃以下である場合には、基板保持部52の温度を50℃以上80℃以下とすることが好ましい。
次に、めっき処理部5に基板Wが搬入され、搬入された基板Wが、基板保持部52に保持される(ステップS2)。ここでは、基板Wの下面が真空吸着されて、基板保持部52に基板Wが水平に保持される。
次に、基板保持部52に水平に保持された基板Wが、前洗浄処理される(ステップS3)。この場合、まず、回転モータ523が駆動されて基板Wが所定の回転数で回転する。続いて、退避位置に位置づけられていたノズルアーム56が、吐出位置に移動する。次に、回転する基板Wに、前洗浄液ノズル541から前洗浄液L2が供給されて、基板Wの表面が洗浄される。これにより、基板Wの表面に形成された酸化皮膜や付着物等が、基板Wから除去される。基板Wに供給された前洗浄液L2は、ドレンダクト581に排出される。
続いて、洗浄処理された基板Wがリンス処理される(ステップS4)。この場合、回転する基板Wに、リンス液ノズル551からリンス液L3が供給されて、基板Wの表面がリンス処理される。これにより、基板W上に残存する前洗浄液L2が洗い流される。基板Wに供給されたリンス液L3はドレンダクト581に排出される。なお、リンス液L3の温度は常温に限らず、リンス液供給部55に設けられた加熱機構(図示しない)によって、めっき液L1を加熱する温度と同等以上に加熱されても良い。
次に、めっき液供給工程として、リンス処理された基板W上にめっき液L1が供給されて盛り付けられる(ステップS5)。この場合、まず、基板Wの回転数を、リンス処理時の回転数よりも低減させる。例えば、基板Wの回転数を50〜150rpmにしてもよい。このことにより、基板W上に形成される後述のめっき膜を均一化させることができる。なお、めっき液L1の盛り付け量を増大させるために、基板Wの回転は停止させてもよい。
次に、めっき液加熱処理工程として、基板W上に盛り付けられためっき液L1が加熱される。このめっき液加熱処理工程は、基板Wを蓋体6で覆う工程(ステップS6)と、不活性ガスを供給する工程(ステップS7)と、めっき液L1を加熱する加熱工程(ステップS8)と、を有している。なお、めっき液加熱処理工程においても、基板Wの回転数は、めっき液供給工程と同様の速度(あるいは回転停止)で維持されることが好適である。
まず、基板Wが蓋体6によって覆われる(ステップS6)。この場合、まず、蓋体移動機構7の旋回モータ72が駆動されて、退避位置に位置づけられていた蓋体6が水平方向に旋回移動して、上方位置に位置づけられる。続いて、蓋体移動機構7のシリンダ73が駆動されて、上方位置に位置づけられた蓋体6が下降する。これにより、基板Wが蓋体6によって覆われて、基板Wの周囲の空間が閉塞化される。
基板Wが蓋体6によって覆われた後、蓋体6の天井部61に設けられたガスノズル661が、蓋体6の内側に不活性ガスを吐出する(ステップS7)。このことにより、蓋体6の内側が不活性ガスに置換され、基板Wの周囲が低酸素雰囲気になる。不活性ガスは、所定時間吐出され、その後、不活性ガスの吐出を停止する。
次に、基板W上に盛り付けられためっき液L1が加熱される(ステップS8)。加熱工程において、ヒータ63が駆動されて、基板W上に盛り付けられためっき液L1が加熱される。加熱工程でのめっき液L1の加熱は、めっき液L1の温度が所定温度まで上昇するように設定された所定時間行われる。めっき液L1の温度が、成分が析出する温度まで上昇すると、基板Wの上面にめっき液L1の成分が析出し、めっき膜が形成され始める。
加熱工程が終了すると、蓋体移動機構7が駆動されて、蓋体6が退避位置に位置づけられる(ステップS9)。この場合、まず、蓋体移動機構7のシリンダ73が駆動されて、蓋体6が上昇して、上方位置に位置づけられる。その後、蓋体移動機構7の旋回モータ72が駆動されて、上方位置に位置づけられた蓋体6が水平方向に旋回移動して、退避位置に位置づけられる。
次に、めっき液加熱処理された基板Wがリンス処理される(ステップS10)。この場合、まず、基板Wの回転数を、めっき処理時の回転数よりも増大させる。例えば、めっき処理前の基板リンス処理工程(ステップS4)と同様の回転数で基板Wを回転させる。続いて、退避位置に位置づけられていたリンス液ノズル551が、吐出位置に移動する。次に、回転する基板Wに、リンス液ノズル551からリンス液L3が供給されて、基板Wの表面が洗浄される。このことにより、基板W上に残存するめっき液L1が洗い流される。
続いて、リンス処理された基板Wが乾燥処理される(ステップS11)。この場合、例えば、基板Wの回転数を、基板リンス処理工程(ステップS10)の回転数よりも増大させて、基板Wを高速で回転させる。これにより、基板W上に残存するリンス液L3が振り切られて除去され、基板W上にめっき膜が形成された基板Wが得られる。この場合、基板Wに、窒素(N2)ガスなどの不活性ガスを噴出して、基板Wの乾燥を促進させてもよい。また、基板リンス処理工程(ステップS10)では、例えばIPA(イソプロピルアルコール)等の有機系溶剤からなる処理液を基板Wに供給しても良い。この際、基板W上に残留していたリンス液L3をIPA等の処理液中に取り込むとともに、この処理液を基板W上から振り切って蒸発させ、基板Wを乾燥しても良い。
その後、基板Wが基板保持部52から取り出されて、めっき処理部5から搬出される(ステップS12)。
2 めっき処理ユニット
3 制御部
10 カバーユニット
31 記録媒体
5 めっき処理部
51 チャンバ
52 基板保持部
53 めっき液供給部
54 前洗浄液供給部
63 ヒータ
530 ヒータ
541 前洗浄液ノズル
542 前洗浄液供給源
544 加熱機構
55 リンス液供給部
56 ノズルアーム
Claims (9)
- 基板を吸着保持して回転させる基板保持部と、
前記基板保持部を外部から加熱する加熱部と、
前記基板保持部に保持されて回転する前記基板に対してめっき液を供給するめっき液供給部と、
前記基板保持部と前記加熱部と前記めっき液供給部の動作を制御する制御部と、を備え、
前記制御部は、前記基板保持部で前記基板を保持する前に、前記加熱部で前記基板保持部を50℃以上に加熱するよう制御する、基板液処理装置。 - 前記加熱部は、前記基板保持部よりも上方に設けられる、請求項1に記載の基板液処理装置。
- 前記加熱部は、ヒータを具備し、前記基板保持部または前記基板を覆う下方位置に配置可能なカバーユニットである、請求項2に記載の基板液処理装置。
- 前記加熱部は、前記基板保持部の下方に設けられる、請求項1に記載の基板液処理装置。
- 前記加熱部は、前記基板保持部の外周より内側にヒータまたはランプが設けられている、請求項4に記載の基板液処理装置。
- 前記加熱部の温度は、80℃以下である、請求項1〜5のいずれか一つに記載の基板液処理装置。
- 基板を吸着保持する基板保持部を外部から加熱する基板保持加熱工程と、
前記基板保持部で基板を保持する基板保持工程と、
前記基板を水平に保持して回転させながら、前記基板上にめっき液を供給してめっき処理するめっき処理工程と、を備え
前記基板保持加熱工程は、前記基板保持部で前記基板を吸着保持する前に、前記基板保持部を50度以上に加熱する、基板液処理方法。 - 前記基板保持加熱工程の加熱部は、前記基板保持部よりも上方位置および下方位置の少なくともいずれか一方に設けられる、請求項7に記載の基板液処理方法。
- 前記加熱部の温度は、80℃以下である、請求項8に記載の基板液処理方法。
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