WO2020255739A1 - 基板処理方法および基板処理装置 - Google Patents
基板処理方法および基板処理装置 Download PDFInfo
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- WO2020255739A1 WO2020255739A1 PCT/JP2020/022189 JP2020022189W WO2020255739A1 WO 2020255739 A1 WO2020255739 A1 WO 2020255739A1 JP 2020022189 W JP2020022189 W JP 2020022189W WO 2020255739 A1 WO2020255739 A1 WO 2020255739A1
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- Prior art keywords
- substrate
- plating
- treatment
- plating solution
- liquid
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims abstract description 259
- 238000003672 processing method Methods 0.000 title claims abstract description 12
- 238000012545 processing Methods 0.000 title claims description 93
- 238000007747 plating Methods 0.000 claims abstract description 236
- 239000007788 liquid Substances 0.000 claims abstract description 123
- 230000004913 activation Effects 0.000 claims abstract description 41
- 238000001035 drying Methods 0.000 claims abstract description 31
- 238000007772 electroless plating Methods 0.000 claims abstract description 9
- 238000011282 treatment Methods 0.000 claims description 97
- 238000000034 method Methods 0.000 claims description 44
- 238000010438 heat treatment Methods 0.000 claims description 33
- 230000003213 activating effect Effects 0.000 claims description 16
- 230000003111 delayed effect Effects 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims 1
- 238000012805 post-processing Methods 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract 4
- 238000009825 accumulation Methods 0.000 abstract 2
- 238000001994 activation Methods 0.000 description 37
- 238000004140 cleaning Methods 0.000 description 28
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- 238000010586 diagram Methods 0.000 description 12
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- 238000005429 filling process Methods 0.000 description 10
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- 150000002500 ions Chemical class 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- HHLFWLYXYJOTON-UHFFFAOYSA-N glyoxylic acid Chemical compound OC(=O)C=O HHLFWLYXYJOTON-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 150000003628 tricarboxylic acids Chemical class 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001146 hypoxic effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1632—Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1676—Heating of the solution
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1678—Heating of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1689—After-treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
Definitions
- the present disclosure relates to a substrate processing method and a substrate processing apparatus.
- plating is used as a method of embedding a metal such as copper in recesses such as trenches and vias.
- the present disclosure provides a technique capable of improving the throughput of a series of substrate processing including plating processing.
- the substrate treatment method includes a step of activating, a step of filling, a step of forming a plating film, a step of performing post-treatment, and a step of drying.
- the activating step activates the plating solution by heating and maintaining the plating solution to a predetermined temperature.
- the activated plating solution is liquid-filled on the substrate.
- the step of forming the plating film the plating film by electroless plating is formed on the substrate by heating the substrate on which the plating solution is filled.
- the step of performing the post-treatment the post-treatment using a liquid is performed on the substrate after the plating film is formed.
- the drying step dries the substrate after the post-treatment has been performed. Further, the step of activating the plating solution used for the next substrate overlaps with the step of forming the plating film on the substrate, the step of performing the post-treatment, and the step of drying.
- FIG. 1 is a diagram showing a configuration of a substrate processing apparatus according to an embodiment.
- FIG. 2 is a diagram showing a configuration of a plating processing unit according to an embodiment.
- FIG. 3 is a diagram showing a configuration of a plating solution supply unit according to an embodiment.
- FIG. 4 is a flowchart showing a processing procedure executed by the substrate processing apparatus according to the embodiment.
- FIG. 5 is an explanatory diagram of the activation treatment according to the embodiment.
- FIG. 6 is a flowchart showing the procedure of the adjustment time setting process according to the embodiment.
- FIG. 7 is a diagram showing an example of the adjustment time setting process according to the embodiment.
- FIG. 8 is an explanatory diagram of the dummy adjustment process according to the embodiment.
- FIG. 1 is a diagram showing a configuration of a substrate processing apparatus according to an embodiment.
- the substrate processing device 1 includes a loading / unloading station 2 and a processing station 3.
- the loading / unloading station 2 and the processing station 3 are provided adjacent to each other.
- the loading / unloading station 2 includes a carrier mounting table 11 and a transport section 12.
- a plurality of substrates, in the present embodiment, a plurality of carriers C for accommodating a semiconductor wafer (hereinafter, substrate W) in a horizontal state are mounted on the carrier mounting table 11.
- a plurality of load ports are arranged side by side on the carrier mounting table 11 so as to be adjacent to the transport unit 12, and one carrier C is mounted on each of the plurality of load ports.
- the transport unit 12 is provided adjacent to the carrier mounting table 11, and includes a substrate transport device 13 and a delivery unit 14 inside.
- the substrate transfer device 13 includes a wafer holding mechanism for holding the substrate W. Further, the substrate transfer device 13 can move in the horizontal direction and the vertical direction and can rotate around the vertical axis, and transfers the substrate W between the carrier C and the delivery portion 14 by using the wafer holding mechanism. Do.
- the processing station 3 is provided adjacent to the transport unit 12.
- the processing station 3 includes a transport unit 15 and a plurality of plating processing units 5.
- the plurality of plating processing units 5 are provided side by side on both sides of the transport unit 15. The configuration of the plating processing unit 5 will be described later.
- the transport unit 15 includes a substrate transport device 17 inside.
- the substrate transfer device 17 includes a wafer holding mechanism for holding the substrate W. Further, the substrate transfer device 17 can move in the horizontal direction and the vertical direction and swivel around the vertical axis, and uses a wafer holding mechanism between the delivery unit 14, the pretreatment unit 4, and the plating processing unit 5. The substrate W is transported.
- the substrate processing device 1 includes a control device 9.
- the control device 9 is, for example, a computer, and includes a control unit 91 and a storage unit 92.
- the storage unit 92 stores programs that control various processes executed by the substrate processing device 1.
- the control unit 91 controls the operation of the substrate processing device 1 by reading and executing the program stored in the storage unit 92.
- Such a program may be recorded on a storage medium readable by a computer, and may be installed from the storage medium in the storage unit 92 of the control device 9.
- Examples of storage media that can be read by a computer include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical disk (MO), and a memory card.
- the board transfer device 13 of the loading / unloading station 2 takes out the board W from the carrier C mounted on the carrier mounting table 11, and delivers the taken out board W to the delivery unit. Place on 14.
- the substrate W placed on the delivery unit 14 is transported from the delivery unit 14 to the plating processing unit 5 by the substrate transfer device 17 of the processing station 3, and is processed by the plating processing unit 5.
- recesses such as trenches and vias are formed on the surface of the substrate W, and the plating processing unit 5 embeds metal in the recesses by an electroless plating method.
- the substrate W processed by the plating processing unit 5 is carried out from the plating processing unit 5 by the substrate transfer device 17 and placed on the delivery unit 14. Then, the processed substrate W mounted on the delivery unit 14 is returned to the carrier C of the carrier mounting table 11 by the substrate transport device 13.
- FIG. 2 is a diagram showing the configuration of the plating processing unit 5 according to the embodiment.
- the plating processing unit 5 is configured to perform a liquid treatment including an electroless plating treatment.
- the plating processing unit 5 is arranged on the chamber 51, the substrate holding portion 52 which is arranged in the chamber 51 and holds the substrate W horizontally, and the plating solution L1 on the upper surface (surface) of the substrate W held by the substrate holding portion 52. It is provided with a plating solution supply unit 53 for supplying the above.
- the substrate holding portion 52 has a chuck member 521 that vacuum-adsorbs the lower surface (back surface) of the substrate W.
- the chuck member 521 is a so-called vacuum chuck type.
- a rotary motor 523 (rotary drive unit) is connected to the substrate holding unit 52 via a rotary shaft 522.
- the rotary motor 523 is driven, the substrate holding portion 52 rotates together with the substrate W.
- the rotary motor 523 is supported by a base 524 fixed to the chamber 51.
- a heating source such as a heater is not provided inside the substrate holding portion 52.
- the plating solution supply unit 53 includes a plating solution nozzle 531 that discharges the plating solution L1 onto the upper surface of the substrate W held by the substrate holding unit 52, and a plating solution supply source that stores the plating solution L1 supplied to the plating solution nozzle 531. It has 532 and.
- the plating solution nozzle 531 is held by the nozzle arm 56 and is configured to be movable.
- the plating solution L1 is a plating solution for autocatalytic (reduction type) electroless plating.
- the plating solution L1 contains, for example, a metal ion and a reducing agent.
- the metal ions contained in the plating solution L1 include, for example, cobalt (Co) ion, nickel (Ni) ion, tungsten (W) ion, copper (Cu) ion, palladium (Pd) ion, gold (Au) ion, and ruthenium ( Ru) Ions and the like.
- the reducing agent contained in the plating solution L1 is hypophosphorous acid, dimethylamine borane, glyoxylic acid and the like.
- Examples of the plating film formed by the plating treatment using the plating solution L1 include CoWB, CoB, CoWP, CoWBP, NiWB, NiB, NiWP, NiWBP, Cu, Pd, Ru and the like.
- the plating film may be formed from a single layer or may be formed over two or more layers. When the plating film has a two-layer structure, it may have a layer structure such as CoWB / CoB and Pd / CoB in order from the base metal layer (seed layer) side.
- FIG. 3 is a diagram showing the configuration of the plating solution supply unit 53 according to the embodiment.
- the plating solution supply unit 53 further includes a pump 534, a valve 535, a heating unit 536, and a heat retaining unit 537.
- the pump 534, the valve 535, the heating unit 536, and the heat retaining unit 537 are provided in this order with respect to the plating solution pipe 533 from the upstream side (plating solution supply source 532 side).
- the plating solution supply source 532 is, for example, a tank for storing the plating solution L1.
- the plating solution L1 at room temperature is stored in the plating solution supply source 532.
- the pump 534 sends the plating solution L1 stored in the plating solution supply source 532 into the plating solution pipe 533.
- the valve 535 opens and closes the plating solution pipe 533.
- the heating unit 536 is, for example, a heat exchanger, and heats the plating solution L1 flowing through the plating solution pipe 533 to a set temperature.
- the heat retaining unit 537 is provided so as to cover the plating solution pipe 533 on the downstream side of the heating unit 536, and until the plating solution L1 heated to the set temperature by the heating unit 536 is discharged from the plating solution nozzle 531.
- the temperature of the plating solution L1 is maintained at the set temperature.
- the heat retaining unit 537 brings the heat transfer medium heated to the set temperature into contact with the plating solution pipe 533 downstream of the heating unit 536, so that the plating flows through the plating solution pipe 533 downstream of the heating unit 536.
- the liquid L1 can be kept at a set temperature.
- the plating solution supply unit 53 supplies the plating solution L1 heated to the set temperature from the plating solution nozzle 531 to the upper surface of the substrate W.
- the set temperature is, for example, 55 ° C. or higher and 75 ° C. or lower, more preferably 60 ° C. or higher and 70 ° C. or lower.
- the plating processing unit 5 includes a cleaning liquid supply unit 54 that supplies the cleaning liquid L2 to the surface of the substrate W held by the substrate holding unit 52, and a rinse that supplies the rinse liquid L3 to the surface of the substrate W. It further includes a liquid supply unit 55.
- the cleaning liquid supply unit 54 supplies the cleaning liquid L2 to the rotating substrate W held by the substrate holding unit 52, and precleans the seed layer formed on the substrate W.
- the cleaning liquid supply unit 54 has a cleaning liquid nozzle 541 that discharges the cleaning liquid L2 to the substrate W held by the substrate holding unit 52, and a cleaning liquid supply source 542 that supplies the cleaning liquid L2 to the cleaning liquid nozzle 541. ..
- the cleaning liquid supply source 542 is configured to supply the cleaning liquid L2 heated or temperature-controlled to a predetermined temperature to the cleaning liquid nozzle 541 via the cleaning liquid pipe 543 as described later.
- the cleaning liquid nozzle 541 is held by the nozzle arm 56 and can move together with the plating liquid nozzle 531.
- Dicarboxylic acid or tricarboxylic acid is used as the cleaning liquid L2.
- dicarboxylic acid for example, organic acids such as malic acid, succinic acid, malonic acid, oxalic acid, glutaric acid, adipic acid, and tartaric acid can be used.
- tricarboxylic acid an organic acid such as citric acid can be used.
- the rinse liquid supply unit 55 has a rinse liquid nozzle 551 that discharges the rinse liquid L3 to the substrate W held by the substrate holding unit 52, and a rinse liquid supply source 552 that supplies the rinse liquid L3 to the rinse liquid nozzle 551. ing.
- the rinse liquid nozzle 551 is held by the nozzle arm 56 and can move together with the plating liquid nozzle 531 and the cleaning liquid nozzle 541.
- the rinse liquid supply source 552 is configured to supply the rinse liquid L3 to the rinse liquid nozzle 551 via the rinse liquid pipe 553.
- the rinse liquid L3 for example, DIW (deionized water) or the like can be used.
- a nozzle moving mechanism (not shown) is connected to the nozzle arm 56 that holds the plating liquid nozzle 531, the cleaning liquid nozzle 541, and the rinse liquid nozzle 551 described above.
- This nozzle moving mechanism moves the nozzle arm 56 in the horizontal direction and the vertical direction. More specifically, the nozzle arm 56 uses the nozzle moving mechanism to move the nozzle arm 56 between a discharge position for discharging the treatment liquid (plating liquid L1, cleaning liquid L2 or rinse liquid L3) to the substrate W and a retracted position retracted from the discharge position. It is possible to move with.
- the discharge position is not particularly limited as long as the processing liquid can be supplied to an arbitrary position on the surface of the substrate W.
- the center of the substrate W at a position where the processing liquid can be supplied.
- the ejection position of the nozzle arm 56 may be different depending on whether the plating solution L1 is supplied to the substrate W, the cleaning solution L2 is supplied, or the rinse solution L3 is supplied.
- the retracted position is a position in the chamber 51 that does not overlap the substrate W when viewed from above, and is a position away from the discharge position. When the nozzle arm 56 is positioned in the retracted position, it is possible to prevent the moving lid 6 from interfering with the nozzle arm 56.
- the plating processing section 5 includes a nozzle that supplies a volatile organic solvent such as IPA (isopropyl alcohol) to the substrate W, for example. May be good.
- IPA isopropyl alcohol
- a cup 571 is provided around the substrate holding portion 52.
- the cup 571 is formed in a ring shape when viewed from above, and when the substrate W rotates, it receives the treatment liquid scattered from the substrate W and guides it to the drain duct 581.
- An atmosphere blocking cover 572 is provided on the outer peripheral side of the cup 571 to prevent the atmosphere around the substrate W from diffusing into the chamber 51.
- the atmosphere blocking cover 572 is formed in a cylindrical shape so as to extend in the vertical direction, and the upper end is open. A lid 6 described later can be inserted into the atmosphere blocking cover 572 from above.
- the substrate W held by the substrate holding portion 52 is covered with the lid 6.
- the lid 6 has a ceiling portion 61 and a side wall portion 62 extending downward from the ceiling portion 61.
- the ceiling portion 61 includes a first ceiling plate 611 and a second ceiling plate 612 provided on the first ceiling plate 611.
- a heater 63 (heating unit) is interposed between the first ceiling plate 611 and the second ceiling plate 612.
- the first ceiling plate 611 and the second ceiling plate 612 are configured to seal the heater 63 so that the heater 63 does not come into contact with a treatment liquid such as the plating liquid L1.
- a seal ring 613 is provided on the outer peripheral side of the heater 63, and the heater 63 is sealed by the seal ring 613.
- the first ceiling plate 611 and the second ceiling plate 612 have corrosion resistance to a treatment liquid such as the plating liquid L1, and may be formed of, for example, an aluminum alloy.
- the first ceiling plate 611, the second ceiling plate 612 and the side wall portion 62 may be coated with Teflon (registered trademark).
- a lid moving mechanism 7 is connected to the lid 6 via a lid arm 71.
- the lid moving mechanism 7 moves the lid 6 in the horizontal direction and the vertical direction.
- the lid moving mechanism 7 has a swivel motor 72 that moves the lid 6 in the horizontal direction, and a cylinder 73 (interval adjusting unit) that moves the lid 6 in the vertical direction. ..
- the swivel motor 72 is mounted on a support plate 74 provided so as to be movable in the vertical direction with respect to the cylinder 73.
- an actuator (not shown) including a motor and a ball screw may be used.
- the swivel motor 72 of the lid moving mechanism 7 moves the lid 6 between an upper position arranged above the substrate W held by the substrate holding portion 52 and a retracted position retracted from the upper position.
- the upper position is a position facing the substrate W held by the substrate holding portion 52 at a relatively large interval, and is a position overlapping the substrate W when viewed from above.
- the retracted position is a position in the chamber 51 that does not overlap the substrate W when viewed from above.
- the cylinder 73 of the lid moving mechanism 7 moves the lid 6 in the vertical direction to adjust the distance between the substrate W to which the plating solution L1 is supplied and the first ceiling plate 611 of the ceiling portion 61. More specifically, the cylinder 73 positions the lid 6 at a lower position (a position shown by a solid line in FIG. 2) and an upper position (a position shown by a two-dot chain line in FIG. 2).
- the heater 63 when the heater 63 is driven and the lid 6 is positioned at the lower position described above, the substrate holding portion 52 or the plating solution L1 on the substrate W is heated.
- An inert gas (for example, nitrogen (N2) gas) is supplied to the inside of the lid 6 by the inert gas supply unit 66.
- the inert gas supply unit 66 has a gas nozzle 661 that discharges the inert gas inside the lid 6, and an inert gas supply source 662 that supplies the inert gas to the gas nozzle 661.
- the gas nozzle 661 is provided on the ceiling portion 61 of the lid body 6 and discharges the inert gas toward the substrate W with the lid body 6 covering the substrate W.
- the ceiling portion 61 and the side wall portion 62 of the lid body 6 are covered with the lid body cover 64.
- the lid cover 64 is placed on the second ceiling plate 612 of the lid 6 via a support portion 65. That is, a plurality of support portions 65 projecting upward from the upper surface of the second ceiling plate 612 are provided on the second ceiling plate 612, and the lid cover 64 is placed on the support portions 65.
- the lid cover 64 can be moved in the horizontal direction and the vertical direction together with the lid 6.
- the lid cover 64 preferably has a higher heat insulating property than the ceiling portion 61 and the side wall portion 62 in order to prevent heat in the lid body 6 from escaping to the surroundings.
- the lid cover 64 is preferably made of a resin material, and it is even more preferable that the resin material has heat resistance.
- the lid body 6 provided with the heater 63 and the lid body cover 64 are integrally provided, and when the lid body cover 64 is arranged at a lower position, the board holding portion 52 or the cover unit 10 covering the board W is provided. , These lids 6 and lid covers 64.
- a fan filter unit 59 (gas supply unit) that supplies clean air (gas) around the lid 6 is provided on the upper part of the chamber 51.
- the fan filter unit 59 supplies air into the chamber 51 (particularly, inside the atmosphere blocking cover 572), and the supplied air flows toward the exhaust pipe 81.
- a downflow through which this air flows downward is formed around the lid 6, and the gas vaporized from the treatment liquid such as the plating liquid L1 flows toward the exhaust pipe 81 by this downflow. In this way, the vaporized gas from the treatment liquid is prevented from rising and diffusing into the chamber 51.
- the gas supplied from the fan filter unit 59 described above is exhausted by the exhaust mechanism 8.
- the plating processing unit 5 having the above configuration further controls the operations of the substrate holding unit 52, the heater 63 (heating unit), and the plating solution supply unit 53 by the control unit 91.
- the control unit 91 controls the substrate holding unit 52 to be heated to 50 ° C. or higher by the heater 63 (heating unit) before the substrate holding unit 52 sucks and holds the substrate W.
- the temperature of the substrate holding portion 52 is preferably 50 ° C. or higher and 80 ° C. or lower.
- FIG. 4 is a flowchart showing a procedure of processing executed by the substrate processing apparatus 1 according to the embodiment.
- the series of processing procedures shown in FIG. 4 is executed according to the control by the control unit 91.
- the heating unit 536 and the heat retaining unit 537 are in a state where the plating solution L1 flowing through the plating solution pipe 533 can always be heated and kept warm.
- the control unit 91 determines whether or not the substrate W to be processed this time is the first of a plurality of substrates W to be continuously processed (step S101). For example, the substrate W to be processed this time by a certain plating processing unit 5 is first processed by the plating processing unit 5 among a plurality of substrates W (a substrate W for one lot) housed in one carrier C. It is assumed that the substrate W is used. In this case, the control unit 91 determines that it is the first of a plurality of substrates W that are continuously processed.
- step S101 When it is determined in step S101 that the substrate W to be processed this time is the first of a plurality of substrates W to be processed continuously (steps S101, Yes), the plating processing unit 5 performs a dummy adjustment process. It is performed (step S102).
- the substrate W In the dummy adjustment process, the substrate W is kept on standby for a set time in front of the plating processing unit 5 while being held by, for example, the substrate transfer device 17. That is, the substrate W is delayed in being carried into the plating processing unit 5 by a set time.
- the activation processing is started in parallel with the dummy adjustment processing.
- the activation process may be started at the timing when the dummy adjustment process is started.
- the activation treatment is a treatment for activating the plating solution by heating and maintaining the plating solution L1 to a predetermined temperature.
- the activation treatment here is a treatment for activating the plating solution L1 used for the substrate W to be processed this time.
- the plating processing unit 5 controls the pump 534 and the valve 535 to predetermine the normal temperature plating solution L1 stored in the plating solution supply source 532 to the plating solution pipe 533 downstream of the valve 535. Send out only the amount specified.
- a part of the plating solution L1 sent out to the plating solution pipe 533 downstream of the valve 535 is discharged from the plating solution nozzle 531, but the remaining part is discharged from the plating solution piping 533 downstream of the valve 535. Remains in.
- the remaining plating solution L1 is heated to a set temperature by the heating unit 536, and is maintained at the set temperature by the heating unit 536 and the heat retaining unit 537.
- the volume of the plating solution pipe 533 downstream of the valve 535 is larger than the amount of the plating solution L1 used in the liquid filling process in the subsequent stage. Therefore, in the activation treatment, the plating solution L1 for at least one liquid filling process is heated and kept warm in the plating solution pipe 533 downstream of the valve 535.
- step S101 when the dummy adjustment process is completed, or in step S101, when the substrate W to be processed this time is not the first of a plurality of substrates W to be continuously processed (steps S101, No), the plating processing unit 5 Then, the carry-in process is performed (step S103).
- the substrate W is carried into the chamber 51 by the board transfer device 17, and then placed on the chuck member 521 of the board holding portion 52 and held by the chuck member 521.
- the plating processing unit 5 performs an adjustment processing (step S104).
- the substrate W is kept on standby for a set time while being held by the chuck member 521. That is, the substrate W delays the start of the pre-processing, which is the next processing, by the set time.
- the plating processing unit 5 performs pretreatment (step S105).
- the pretreatment first, the rotary motor 523 is driven to rotate the substrate W at a predetermined rotation speed. Subsequently, the nozzle arm 56 positioned at the retracted position (the position shown by the solid line in FIG. 2) moves to the discharge position above the center of the substrate W. Next, the cleaning liquid L2 is supplied from the cleaning liquid nozzle 541 to the rotating substrate W to clean the surface of the substrate W. As a result, deposits and the like adhering to the substrate W are removed from the substrate W. The cleaning liquid L2 supplied to the substrate W is discharged to the drain duct 581.
- the rinse liquid L3 is supplied from the rinse liquid nozzle 551 to the rotating substrate W, and the surface of the substrate W is rinsed. As a result, the cleaning liquid L2 remaining on the substrate W is washed away.
- the rinse liquid L3 supplied to the substrate W is discharged to the drain duct 581.
- the plating treatment unit 5 may further perform a treatment of supplying IPA to the substrate W.
- the liquid filling process is a process of supplying the plating solution L1 activated by heating and maintaining the temperature to a set temperature to the substrate W after the pretreatment and filling the substrate W with the liquid.
- the rotation speed of the substrate W is reduced to be lower than the rotation speed during the rinsing process.
- the rotation speed of the substrate W may be 50 to 150 rpm.
- the plating film formed on the substrate W can be made uniform.
- the rotation of the substrate W may be stopped.
- the activated plating solution L1 is discharged from the plating solution nozzle 531 to the surface of the substrate W.
- the discharged plating solution L1 stays on the surface of the substrate W due to surface tension, and the plating solution L1 is placed on the surface of the substrate W to form a layer (so-called paddle) of the plating solution L1.
- a part of the plating solution L1 flows out from the surface of the substrate W and is discharged from the drain duct 581.
- the discharge of the plating solution L1 is stopped.
- the nozzle arm 56 which has been positioned at the discharge position, is positioned at the retracted position.
- the activation treatment is started in parallel with the liquid filling treatment.
- the timing at which the pump 534 and the valve 535 are operated in the above-mentioned liquid filling process, that is, the plating solution L1 at room temperature is sent from the plating solution supply source 532 to the plating solution pipe 533 downstream of the valve 535. It will start at the right timing.
- the activation treatment here is a treatment for activating the plating solution L1 used for the substrate W to be processed next time.
- the plating process is a process of forming a plating film by electroless plating on the substrate W by heating the substrate W on which the plating solution L1 is filled.
- the substrate W is covered with the lid 6.
- the swivel motor 72 of the lid moving mechanism 7 is driven, and the lid 6 swivels in the horizontal direction and is positioned at an upper position (the position indicated by the alternate long and short dash line in FIG. 2).
- the cylinder 73 of the lid moving mechanism 7 is driven, and the lid 6 positioned at the upper position is lowered to be positioned at the first interval position.
- the distance between the substrate W and the first ceiling plate 611 of the lid 6 becomes the first interval, and the side wall portion 62 of the lid 6 is arranged on the outer peripheral side of the substrate W.
- the lower end 621 of the side wall portion 62 of the lid 6 is positioned at a position lower than the lower surface of the substrate W. In this way, the substrate W is covered with the lid 6, and the space around the substrate W is closed.
- the gas nozzle 661 provided on the ceiling portion 61 of the lid body 6 discharges the inert gas inside the lid body 6.
- the inside of the lid 6 is replaced with the inert gas, and the periphery of the substrate W becomes a hypoxic atmosphere.
- the inert gas is discharged for a predetermined time, and then the discharge of the inert gas is stopped.
- the plating solution L1 placed on the substrate W is heated by the heater 63.
- the temperature of the plating solution L1 rises to the temperature at which the components are precipitated, the components of the plating solution L1 are precipitated on the surface of the seed layer to form a plating film.
- the lid moving mechanism 7 is driven, and the lid 6 is positioned at the retracted position.
- the cylinder 73 of the lid moving mechanism 7 is driven to raise the lid 6 and position it in the upper position.
- the swivel motor 72 of the lid moving mechanism 7 is driven, and the lid 6 positioned at the upper position swivels in the horizontal direction and is positioned at the retracted position.
- the plating processing unit 5 performs post-processing (step S108).
- the rotation speed of the substrate W is increased more than the rotation speed during the plating process.
- the rinse liquid nozzle 551 which was positioned at the retracted position, moves to the discharge position.
- the rinse liquid L3 is supplied from the rinse liquid nozzle 551 to the rotating substrate W to clean the surface of the substrate W.
- the plating solution L1 remaining on the substrate W is washed away.
- the plating treatment unit 5 may sequentially supply not only the rinsing liquid L3 but also the cleaning liquid L2 and the DIW to the substrate W.
- a drying process is performed (step S109).
- the rotation speed of the substrate W is increased to be higher than the rotation speed of the post-processing to rotate the substrate W at high speed.
- the rinse liquid L3 remaining on the substrate W is shaken off and the substrate W dries.
- the plating processing unit 5 replaces the processing liquid on the substrate W with IPA by supplying IPA to the substrate W in addition to the above-mentioned shake-off drying, and utilizes the volatilization of the IPA.
- the substrate W may be dried.
- the substrate W is taken out from the plating processing section 5 by the substrate transport device 17 and transported to the delivery section 14. Further, the substrate W conveyed to the delivery unit 14 is taken out from the delivery unit 14 by the substrate transfer device 13 and accommodated in the carrier C.
- FIG. 5 is an explanatory diagram of the activation process according to the embodiment.
- the time required for the activation treatment is the time required for the plating treatment, the post-treatment and the drying treatment (first time), and the time required for the adjustment treatment and the pre-treatment (second time). Time) and is set to the total time.
- the start point of the activation treatment for the plating solution L1 used for the substrate W to be processed next time is set to the start point of the plating treatment for the substrate W to be processed this time. Therefore, the first time of the activation treatment for the plating solution L1 used for the next substrate W overlaps with the plating treatment, the post-treatment, and the drying treatment for the substrate W this time. Therefore, for example, as compared with the case where the activation treatment is started after the series of treatments for the next substrate W is started, the series is only the time required for the plating treatment, the post-treatment, and the drying treatment (first time). The time required for substrate processing can be shortened. That is, the throughput of a series of substrate processing including the plating processing can be improved.
- the activation time is specified by, for example, the user of the substrate processing apparatus 1.
- the control unit 91 sets the required time (adjustment time) of the adjustment process so that the sum of the first time and the second time matches the activation time specified by the user.
- FIG. 6 is a flowchart showing the procedure of the adjustment time setting process according to the embodiment.
- FIG. 7 is a diagram showing an example of the adjustment time setting process according to the embodiment. Note that FIG. 7 shows an example of an activation time input field and recipe information displayed on a display unit (not shown) included in the control device 9, for example.
- control unit 91 accepts the designation of the activation time by, for example, an input operation to an input unit such as a keyboard or a touch panel display included in the control device 9 (step S201).
- an input operation to an input unit such as a keyboard or a touch panel display included in the control device 9 (step S201).
- FIG. 7 it is assumed that "600 sec (second)" is specified as the activation time.
- control unit 91 calculates the adjustment time by subtracting the first time and the time required for the pretreatment from the received activation time (step S202).
- the pretreatment time is "120 sec”
- the liquid filling process is “30 sec”
- the plating process is “60 sec”
- the post process is “120 sec”
- the drying process is "60 sec”.
- the control unit 91 calculates the adjustment time "240 sec” by subtracting "120 sec", “30 sec”, “60 sec”, "120 sec” and "60 sec” from the designated adjustment time "600 sec”. ..
- control unit 91 sets the calculated adjustment time "240 sec" in the recipe information as the adjustment processing time (step S203).
- the plating processing unit 5 according to the embodiment can automatically adjust the recipe according to the received activation time based on the activation time received from the user. Therefore, according to the plating processing unit 5 according to the embodiment, it is possible to easily grasp the activation time and set the recipe.
- the control unit 91 may calculate the adjustment time as the time obtained by subtracting the first time from the designated activation time.
- FIG. 8 is an explanatory diagram of the dummy adjustment process according to the embodiment.
- the substrate W to be processed this time is the first of a plurality of substrates W to be processed continuously, since the "previous substrate W" does not exist, the first substrate W is processed during the processing of the previous substrate W. I can't secure the time.
- the plating processing unit 5 when processing the first of the plurality of substrates W, the plating processing unit 5 performs a processing on the substrate W this time, specifically, a dummy adjustment process before starting the carry-in process.
- the dummy adjustment process is, for example, a process of causing the substrate W held by the substrate transport device 17 to stand by in front of the plating processing unit 5 for only the first time.
- the substrate treatment method includes a step of activating (as an example, an activation treatment), a step of filling with a liquid (as an example, a liquid filling treatment), and a step of forming a plating film (example).
- the activation step activates the plating solution by heating and maintaining the plating solution (for example, the plating solution L1) to a predetermined temperature.
- the activated plating solution is liquid-filled on a substrate (as an example, substrate W).
- the plating film by electroless plating is formed on the substrate by heating the substrate on which the plating solution is filled.
- the substrate after the plating film is formed is subjected to the post-treatment using a liquid (as an example, a rinse liquid L3).
- the drying step dries the substrate after the post-treatment has been performed. Further, the step of activating the plating solution used for the next substrate overlaps with the step of forming the plating film on the substrate, the step of performing the post-treatment, and the step of drying.
- the time required for the series of substrate treatments is reduced by the time of the plating treatment, the post-treatment, and the drying treatment, as compared with the case where the activation treatment is started after the series of treatments for the next substrate is started. can do. Therefore, the throughput of a series of substrate processing including the plating processing can be improved.
- the substrate processing method may further include a step of accepting and a step of delaying the start (as an example, an adjustment process).
- the accepting process accepts the designation of the time required for the process of activating the plating solution.
- the step of delaying the start is based on the time required in the receiving step, the time of forming the plating film, the step of performing the post-treatment, and the time of the drying step (for example, the first time) for the next substrate. Delay the start of the filling process.
- the substrate processing method may further include a step of performing pretreatment (for example, pretreatment).
- a pretreatment using a liquid for example, cleaning liquid L2 and rinsing liquid L3
- the step of delaying the start is the time obtained by subtracting the time of the step of forming the plating film, the step of performing the post-treatment, the step of drying, and the time of the step of performing the pre-treatment from the time required in the receiving step. Only delay the start of the next filling process for the substrate.
- the recipe can be automatically adjusted according to the activation time received from the user, so that it is possible to easily grasp the activation time and set the recipe.
- the substrate processing method may include a step of further delaying the start (as an example, a dummy adjustment process).
- the step of further delaying the start is a time corresponding to the time of the step of forming the plating film, the step of performing the post-treatment, and the step of drying when the first of the plurality of substrates to be continuously treated is treated.
- the start of the filling process is further delayed. As a result, it is possible to secure an appropriate activation time for the plating solution used for the first sheet of the plurality of substrates to be continuously processed.
- the substrate processing apparatus includes an activation unit (for example, a plating solution pipe 533, a heating unit 536 and a heat retaining unit 537) and a holding unit (as an example, a substrate holding unit).
- an activation unit for example, a plating solution pipe 533, a heating unit 536 and a heat retaining unit 537) and a holding unit (as an example, a substrate holding unit).
- Part 52) the first liquid supply part (for example, the plating liquid supply part 53), the heating part (for example, the lid 6), and the second liquid supply part (for example, the rinse liquid supply part 55).
- a control unit (as an example, a control unit 91).
- the activating unit activates the plating solution by heating and maintaining the plating solution (for example, the plating solution L1) to a predetermined temperature.
- the holding portion rotatably holds the substrate (as an example, the substrate W).
- the first liquid supply unit supplies the plating solution activated by the activation unit to the substrate held by the holding unit.
- the heating unit heats the substrate held by the holding unit.
- the second liquid supply unit supplies a treatment liquid (for example, a rinse liquid L3) other than the plating liquid to the substrate held by the holding unit.
- the control unit controls the activation unit to activate the plating solution, and controls the first liquid supply unit to fill the plating solution activated by the activation unit on the substrate. By controlling the filling process and the heating section, the plating process of forming a plating film by electroless plating on the substrate by heating the substrate on which the plating solution is filled, and the second liquid supply section are controlled.
- a post-treatment that performs a liquid treatment on the substrate after the plating treatment and a drying treatment that controls the holding portion to dry the substrate after the post-treatment are executed.
- the control unit performs the activation treatment for activating the plating solution used for the next substrate in an overlapping manner with the plating treatment, the post-treatment, and the drying treatment for the substrate this time.
- the substrate processing apparatus it is possible to improve the throughput of a series of substrate processing including the plating process.
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Abstract
Description
図1は、実施形態に係る基板処理装置の構成を示す図である。図1に示すように、基板処理装置1は、搬入出ステーション2と、処理ステーション3とを備える。搬入出ステーション2と処理ステーション3とは隣接して設けられる。
次に、図2を参照して、めっき処理部5の構成を説明する。図2は、実施形態に係るめっき処理部5の構成を示す図である。
次に、上述した基板処理装置1の具体的動作について図4を参照して説明する。図4は、実施形態に係る基板処理装置1が実行する処理の手順を示すフローチャートである。なお、図4に示す一連の処理手順は、制御部91による制御に従って実行される。
1 基板処理装置
5 めっき処理部
6 蓋体
9 制御装置
51 チャンバ
52 基板保持部
53 めっき液供給部
54 洗浄液供給部
55 リンス液供給部
56 ノズルアーム
531 めっき液ノズル
532 めっき液供給源
533 めっき液配管
534 ポンプ
535 バルブ
536 加熱部
537 保温部
Claims (5)
- めっき液を予め決められた温度に加熱して維持することによって前記めっき液を活性化する工程と、
活性化された前記めっき液を基板上に液盛りする工程と、
前記めっき液が液盛りされた前記基板を加熱することによって前記基板上に無電解めっきによるめっき膜を形成する工程と、
前記めっき膜が形成された後の前記基板に対して液体を用いた後処理を行う工程と、
前記後処理が行われた後の前記基板を乾燥させる工程と
を含み、
次回の前記基板に用いられる前記めっき液を活性化する工程は、
今回の前記基板に対する前記めっき膜を形成する工程、前記後処理を行う工程および前記乾燥させる工程と重複して行われる、基板処理方法。 - 前記めっき液を活性化する工程の所要時間の指定を受け付ける工程と、
前記受け付ける工程において受け付けた前記所要時間と、前記めっき膜を形成する工程、前記後処理を行う工程および前記乾燥させる工程の時間とに基づき、次回の前記基板に対する前記液盛りする工程の開始を遅らせる工程と
をさらに含む、請求項1に記載の基板処理方法。 - 前記液盛りする工程が行われる前の前記基板に対して液体を用いた前処理を行う工程
をさらに含み、
前記開始を遅らせる工程は、
前記受け付ける工程において受け付けた前記所要時間から、前記めっき膜を形成する工程、前記後処理を行う工程および前記乾燥させる工程の時間と、前記前処理を行う工程の時間とを減じた時間だけ、次回の前記基板に対する前記液盛りする工程の開始を遅らせる、請求項2に記載の基板処理方法。 - 連続して処理される複数の前記基板のうちの1枚目を処理する場合に、前記めっき膜を形成する工程、前記後処理を行う工程および前記乾燥させる工程の時間に相当する時間だけ、前記液盛りする工程の開始をさらに遅らせる工程
をさらに含む、請求項2または3に記載の基板処理方法。 - めっき液を予め決められた温度に加熱して維持することによって前記めっき液を活性化する活性化部と、
基板を回転可能に保持する保持部と、
前記保持部に保持された前記基板に対して前記活性化部によって活性化された前記めっき液を供給する第1液供給部と、
前記保持部に保持された前記基板を加熱する加熱部と、
前記保持部に保持された前記基板に対して前記めっき液以外の処理液を供給する第2液供給部と、
前記活性化部を制御して前記めっき液を活性化する活性化処理と、前記第1液供給部を制御して、前記活性化部によって活性化された前記めっき液を前記基板上に液盛りする液盛処理と、前記加熱部を制御して、前記めっき液が液盛りされた前記基板を加熱することによって前記基板上に無電解めっきによるめっき膜を形成するめっき処理と、前記第2液供給部を制御して、前記めっき処理後の前記基板に対して液処理を行う後処理と、前記保持部を制御して、前記後処理後の前記基板を乾燥させる乾燥処理と、を実行させる制御部と
を備え、
前記制御部は、
次回の前記基板に用いられる前記めっき液を活性化する前記活性化処理を、今回の前記基板に対する前記めっき処理、前記後処理および前記乾燥処理と重複して行う、基板処理装置。
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