JPWO2019204433A5 - - Google Patents
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- Publication number
- JPWO2019204433A5 JPWO2019204433A5 JP2020558053A JP2020558053A JPWO2019204433A5 JP WO2019204433 A5 JPWO2019204433 A5 JP WO2019204433A5 JP 2020558053 A JP2020558053 A JP 2020558053A JP 2020558053 A JP2020558053 A JP 2020558053A JP WO2019204433 A5 JPWO2019204433 A5 JP WO2019204433A5
- Authority
- JP
- Japan
- Prior art keywords
- plate member
- vias
- heater according
- aluminum material
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 10
- 230000037361 pathway Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862658768P | 2018-04-17 | 2018-04-17 | |
| US62/658,768 | 2018-04-17 | ||
| PCT/US2019/027865 WO2019204433A1 (en) | 2018-04-17 | 2019-04-17 | All aluminum heater |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2021522649A JP2021522649A (ja) | 2021-08-30 |
| JP2021522649A5 JP2021522649A5 (https=) | 2022-03-31 |
| JPWO2019204433A5 true JPWO2019204433A5 (https=) | 2022-03-31 |
| JP7379372B2 JP7379372B2 (ja) | 2023-11-14 |
Family
ID=66476829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020558053A Active JP7379372B2 (ja) | 2018-04-17 | 2019-04-17 | オールアルミニウムヒーター |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20190320501A1 (https=) |
| JP (1) | JP7379372B2 (https=) |
| KR (1) | KR102735500B1 (https=) |
| TW (2) | TWI801559B (https=) |
| WO (1) | WO2019204433A1 (https=) |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US955431A (en) | 1909-09-16 | 1910-04-19 | Arthur Priddle | Machine for slitting and flanging metal bars. |
| JPS63157401A (ja) * | 1986-12-22 | 1988-06-30 | アルプス電気株式会社 | 発熱抵抗体およびこれを用いたサ−マルヘツド |
| DE4338539A1 (de) * | 1993-11-11 | 1995-05-18 | Hoechst Ceram Tec Ag | Verfahren zum Herstellen von keramischen Heizelementen |
| JP3567678B2 (ja) * | 1996-05-05 | 2004-09-22 | 征一郎 宮田 | 通電発熱体 |
| JP2000012195A (ja) * | 1998-06-29 | 2000-01-14 | Ibiden Co Ltd | セラミックヒータ |
| JP2001244320A (ja) * | 2000-02-25 | 2001-09-07 | Ibiden Co Ltd | セラミック基板およびその製造方法 |
| CN100493267C (zh) * | 2000-11-29 | 2009-05-27 | 萨莫希雷梅克斯公司 | 具有控制电阻率的电阻加热器及其制备方法 |
| JP3929840B2 (ja) * | 2002-06-26 | 2007-06-13 | 京セラ株式会社 | ウェハ加熱装置 |
| JP2005026082A (ja) * | 2003-07-02 | 2005-01-27 | Ibiden Co Ltd | セラミックヒータ |
| TW200633947A (en) * | 2005-02-16 | 2006-10-01 | Ngk Insulators Ltd | Joined body and manufacturing method for the same |
| JPWO2008065930A1 (ja) * | 2006-11-30 | 2010-03-04 | 株式会社クリエイティブ テクノロジー | シート状ヒータ |
| US7763831B2 (en) * | 2006-12-15 | 2010-07-27 | Ngk Insulators, Ltd. | Heating device |
| JP4791571B2 (ja) * | 2009-11-26 | 2011-10-12 | 田中電子工業株式会社 | 超音波ボンディング用アルミニウムリボン |
| TWI411346B (zh) * | 2010-01-26 | 2013-10-01 | Betacera Inc | 鰭片式陶瓷加熱器 |
| KR101520201B1 (ko) * | 2010-11-18 | 2015-05-13 | 쌩-고벵 글래스 프랑스 | 온도 모니터링 기능을 갖춘 패널 히터 |
| WO2013033340A1 (en) | 2011-08-30 | 2013-03-07 | Watlow Electric Manufacturing Company | Thermal array system |
-
2019
- 2019-04-17 TW TW108113401A patent/TWI801559B/zh active
- 2019-04-17 JP JP2020558053A patent/JP7379372B2/ja active Active
- 2019-04-17 KR KR1020207033060A patent/KR102735500B1/ko active Active
- 2019-04-17 US US16/386,870 patent/US20190320501A1/en not_active Abandoned
- 2019-04-17 TW TW112113460A patent/TWI829577B/zh not_active IP Right Cessation
- 2019-04-17 WO PCT/US2019/027865 patent/WO2019204433A1/en not_active Ceased
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