JPWO2019003753A1 - 搬送システム及び搬送方法 - Google Patents
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- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
Description
MN・・・メンテナンス装置
ST・・・バッファ
TL・・・処理装置
2・・・物品
10・・・ストッカ
10A・・・ストッカエリア
10B・・・ストッカエリア(所定エリア)
10C・・・メンテナンスエリア(所定エリア)
10D・・・所定エリア
10F・・・作業者進入禁止エリア
10G・・・作業者通路
11・・・保管部
12・・・受け渡しポート
20、20C、20D・・・クレーン用天井軌道
30・・・懸垂式クレーン
31・・・クレーン用走行部
32・・・マスト
33・・・昇降台
34・・・物品移載部
35・・・昇降駆動部
40・・・天井搬送車用天井軌道
41・・・第1ベイ内周回軌道
41a、42a・・・外回り軌道
41b、42b・・・内回り軌道
41c、42c・・・連絡軌道
42・・・第2ベイ内周回軌道
43・・・第1ベイ間軌道
44・・・第2ベイ間軌道
50・・・天井搬送車
51・・・搬送車用走行部
53・・・物品保持部
54・・・昇降駆動部
60A・・・第1の連結軌道(連結軌道)
60B・・・第2の連結軌道(連結軌道)
71a・・・車輪
71b・・・走行部本体
80・・・制御装置
90・・・初期投入部
100・・・搬送システム
Claims (10)
- 上下方向に複数段設けられて物品を保管する保管部と、前記物品を受け渡すための受け渡しポートと、前記保管部及び前記受け渡しポートに沿って設けられたクレーン用天井軌道と、前記クレーン用天井軌道に沿って走行するクレーン用走行部、前記クレーン用走行部から下垂するマスト、及び前記マストにガイドされて昇降する物品移載部を有しかつ前記保管部と前記受け渡しポートとの間で物品を搬送する懸垂式クレーンと、を備え、ストッカエリア内に配置されるストッカと、
前記ストッカエリアの外に設けられて、前記受け渡しポート及び処理装置のロードポートに沿って所定エリアまで延在する天井搬送車用天井軌道と、
前記天井搬送車用天井軌道に沿って走行する搬送車用走行部、及び物品を保持して昇降する物品保持部を有しかつ前記受け渡しポートと前記ロードポートとの間で物品を搬送する天井搬送車と、
前記クレーン用天井軌道と前記天井搬送車用天井軌道とを連結する連結軌道と、を備え、
前記クレーン用走行部は、前記クレーン用天井軌道から前記連結軌道を通って前記天井搬送車用天井軌道に進入し、前記天井搬送車用天井軌道を前記所定エリアまで走行可能であり、又は前記所定エリアから前記天井搬送車用天井軌道に進入して前記連結軌道まで走行し、前記連結軌道を通って前記クレーン用天井軌道に進入して走行可能である、搬送システム。 - 前記クレーン用天井軌道、前記天井搬送車用天井軌道、及び前記連結軌道は、前記クレーン用走行部が走行する方向と直交する断面形状が同一又はほぼ同一である、請求項1に記載の搬送システム。
- 前記クレーン用走行部と前記搬送車用走行部とは、共通の車輪及び前記車輪が取り付けられる走行部本体を備える、請求項1又は請求項2に記載の搬送システム。
- 前記天井搬送車は、停止状態から前記搬送車用走行部による走行を開始する際、前記物品保持部を最上位置まで上昇させた後、走行を開始する、請求項1から請求項3のいずれか一項に記載の搬送システム。
- 前記クレーン用天井軌道は、前記懸垂式クレーンの前記マストが通過し、作業者の進入が禁止される作業者進入禁止エリアの上方に設けられ、
前記天井搬送車用天井軌道は、作業者の通行が許可される作業者通路の上方に設けられ、
前記天井搬送車用天井軌道に前記懸垂式クレーンが進入する時に、前記マストが通過する前記作業者通路への作業者の進入が禁止される、請求項4に記載の搬送システム。 - 前記所定エリアは、前記ストッカとは異なるストッカが配置された他のストッカエリアである、請求項1から請求項5のいずれか一項に記載の搬送システム。
- 前記天井搬送車用天井軌道は、第1ベイ内周回軌道と、第2ベイ内周回軌道と、前記第1ベイ内周回軌道及び前記第2ベイ内周回軌道のそれぞれにおける一方の端部に連結された第1ベイ間軌道と、前記第1ベイ内周回軌道及び前記第2ベイ内周回軌道のそれぞれにおける他方の端部に連結された第2ベイ間軌道と、を備え、
前記ストッカにおける前記クレーン用天井軌道は、第1の前記連結軌道により前記第1ベイ間軌道に連結され、前記他のストッカにおける前記クレーン用天井軌道は、第2の前記連結軌道により前記第2のベイ間軌道に連結されている、請求項6に記載の搬送システム。 - 前記所定エリアは、メンテナンスエリアである、請求項1から請求項5のいずれか一項に記載の搬送システム。
- 前記所定エリアは、前記懸垂式クレーンの初期投入部を含む、請求項1から請求項5のいずれか一項に記載の搬送システム。
- 上下方向に複数段設けられて物品を保管する保管部と、前記物品を受け渡すための受け渡しポートと、前記保管部及び前記受け渡しポートに沿って設けられたクレーン用天井軌道と、前記クレーン用天井軌道に沿って走行するクレーン用走行部、前記クレーン用走行部から下垂するマスト、及び前記マストにガイドされて昇降する物品移載部を有しかつ前記保管部と前記受け渡しポートとの間で物品を搬送する懸垂式クレーンと、を備え、ストッカエリア内に配置されるストッカと、
前記ストッカエリアの外に設けられて、前記受け渡しポート及び処理装置のロードポートに沿って所定エリアまで延在する天井搬送車用天井軌道と、
前記天井搬送車用天井軌道に沿って走行する搬送車用走行部、及び物品を保持して昇降する物品保持部を有しかつ前記受け渡しポートと前記ロードポートとの間で物品を搬送する天井搬送車と、
前記クレーン用天井軌道と前記天井搬送車用天井軌道とを連結する連結軌道と、を備える搬送システムにおける搬送方法であって、
前記クレーン用走行部を、前記クレーン用天井軌道から前記連活軌道を通って前記天井搬送車用天井軌道に進入させ、前記天井搬送車用天井軌道を前記所定エリアまで走行させること、又は前記所定エリアから前記天井搬送車用天井軌道に進入させて前記連結軌道まで走行させ、前記連結軌道を通って前記クレーン用天井軌道に進入させて走行させること、を含む、搬送方法。
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JP2017128569 | 2017-06-30 | ||
JP2017128569 | 2017-06-30 | ||
PCT/JP2018/020351 WO2019003753A1 (ja) | 2017-06-30 | 2018-05-28 | 搬送システム及び搬送方法 |
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US (1) | US11072493B2 (ja) |
EP (1) | EP3647229B1 (ja) |
JP (1) | JP6822567B2 (ja) |
KR (1) | KR102336425B1 (ja) |
CN (1) | CN110753667B (ja) |
IL (1) | IL271508B (ja) |
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JP7136236B2 (ja) * | 2019-01-25 | 2022-09-13 | 村田機械株式会社 | 保管システム |
JP7235059B2 (ja) * | 2019-01-25 | 2023-03-08 | 村田機械株式会社 | 保管システム |
US20210242057A1 (en) * | 2020-01-30 | 2021-08-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Automated material handling systems |
JP7481466B2 (ja) | 2020-08-24 | 2024-05-10 | 株式会社Fuji | 部品実装システム |
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US20230115863A1 (en) * | 2021-10-12 | 2023-04-13 | Dexterity, Inc. | Modular stack mover |
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CN110753667B (zh) | 2021-08-31 |
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