JPWO2018235750A1 - 摺動部材及び被覆膜 - Google Patents
摺動部材及び被覆膜 Download PDFInfo
- Publication number
- JPWO2018235750A1 JPWO2018235750A1 JP2019525585A JP2019525585A JPWO2018235750A1 JP WO2018235750 A1 JPWO2018235750 A1 JP WO2018235750A1 JP 2019525585 A JP2019525585 A JP 2019525585A JP 2019525585 A JP2019525585 A JP 2019525585A JP WO2018235750 A1 JPWO2018235750 A1 JP WO2018235750A1
- Authority
- JP
- Japan
- Prior art keywords
- hard carbon
- carbon layer
- thickness
- coating film
- white
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
- F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
前記被覆膜は、断面を明視野TEM像により観察したとき、相対的に黒で示される黒色の硬質炭素層と相対的に白で示される白色の硬質炭素層とを含む繰り返し単位が厚さ方向に積層されて1μm〜50μmの範囲内の厚さを有し、
前記被覆膜は、基材側に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向に徐々に大きくなる傾斜領域と、表面側に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向で同じ又は略同じ均質領域とを有し、前記傾斜領域は、厚さ方向にV字状又は放射状に成長した形態を有し、前記均質領域は、厚さ方向にV字状又は放射状に成長した形態を有しない、ことを特徴とする。
前記被覆膜は、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向に徐々に大きくなる傾斜領域と、該傾斜領域上に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向で同じ又は略同じ均質領域とを有し、前記傾斜領域は、厚さ方向にV字状又は放射状に成長した形態を有し、前記均質領域は、厚さ方向にV字状又は放射状に成長した形態を有しない、ことを特徴とする。
本発明に係る摺動部材10は、例えば図5のピストンリングの例に示すように、摺動面16に硬質炭素層からなる被覆膜1を有する摺動部材10である。その被覆膜1は、図1〜図3に示すように、断面を明視野TEM像により観察したとき、相対的に黒で示される黒色の硬質炭素層Bと相対的に白で示される白色の硬質炭素層Wとを含む繰り返し単位(図2中、符号*で表す。)が厚さ方向Yに積層されて1μm〜50μmの範囲内の厚さを有している。被覆膜1は、基材部側に設けられて、繰り返し単位のうち白色の硬質炭素層Wの厚さが厚さ方向Yに徐々に大きくなる(「厚くなる」ということもできる。本願において同じ。)傾斜領域2と、表面側に設けられて、繰り返し単位のうち白色の硬質炭素層Wの厚さが厚さ方向Yで同じ又は略同じ均質領域3とを有している。そして、傾斜領域2は、厚さ方向YにV字状又は放射状に成長した形態を有し、均質領域3は、厚さ方向YにV字状又は放射状に成長した形態を有しない。
基材11は、図1及び図2に示すように、被覆膜1が設けられる対象部材である。基材11としては、特に限定されず、鉄系金属、非鉄系金属、セラミックス、硬質複合材料等を挙げることができる。例えば、炭素鋼、合金鋼、焼入れ鋼、高速度工具鋼、鋳鉄、アルミニウム合金、マグネシウム合金、超硬合金等を挙げることができる。なお、被覆膜1の成膜温度を考慮すれば、200℃を超える温度で特性が大きく劣化しない基材であることが好ましい。
中間層12は、図1及び図2に示すように、基材11と被覆膜1との間に必要に応じて設けられていることが好ましい。この中間層12により、基材11と被覆膜1との間の密着性をより向上させることができると共に、被覆膜1が摩耗した場合には、露出した中間層12に耐摩耗性機能を発揮させることができる。
被覆膜1は、図2〜図4に示すように、その断面の明視野TEM像を観察したとき、相対的に白黒2色で示される2種類の硬質炭素層(W,B)を有している。その白色の硬質炭素層Wと黒色の硬質炭素層Bとは交互に積層されている。そして、この被覆膜1は、基材部側に設けられて、繰り返し単位のうち白色の硬質炭素層Wの厚さが厚さ方向Yに徐々に大きくなる傾斜領域2と、表面側に設けられて、繰り返し単位のうち白色の硬質炭素層Wの厚さが厚さ方向Yで同じ又は略同じ均質領域3とを有している。
被覆膜1の成膜は、アーク式PVD法、スパッタPVD法等のPVD法を適用できる。なかでも、カーボンターゲットを用い、成膜原料に水素原子を含まないアークイオンプレーティング法で形成することが好ましい。
硬質炭素層は、グラファイトに代表される炭素結合sp2結合と、ダイヤモンドに代表される炭素結合sp3結合とが混在する膜である。ここでは、EELS分析(Electron Energy−Loss Spectroscopy:電子エネルギー損失分光法)により、1s→π*強度と1s→σ*強度を測定し、1s→π*強度をsp2強度、1s→σ*強度をsp3強度と見立てて、その比である1s→π*強度と1s→σ*強度の比をsp2/sp3比として算出した。したがって、本発明でいうsp2/sp3比とは、正確にはπ/σ強度比のことを指す。具体的には、STEM(走査型TEM)モードでのスペクトルイメージング法を適用し、加速電圧200kv、試料吸収電流10-9A、ビームスポットサイズ径が1nmの条件で、1nmのピッチで得たEELSを積算し、約10nm領域からの平均情報としてC−K吸収スペクトルを抽出し、sp2/sp3比を算出する。
摺動部材10としてピストンリングを適用した。C:0.65質量%、Si:0.38質量%、Mn:0.35質量%、Cr:13.5質量%、Mo:0.3質量%、P:0.02質量%、S:0.02質量%、残部:鉄及び不可避不純物からなるピストンリング基材11(直径88mm、リング径方向幅2.9mm、リング軸方向幅1.2mm)を用いた、このピストンリング基材11上に、窒化処理により40μmの窒化層を形成し、中間層12として、厚さ0.2μmの金属クロム層をイオンプレーティング法にて形成した。次に、中間層12の上に、炭素ターゲットを使用したアークイオンプレーティング装置を用いて、傾斜領域2と均質領域3の各繰り返し単位を成膜して被覆膜1を得た。
成膜された被覆膜1について、その断面の明視野TEM像を撮影した。図3及び図4に示すように、被覆膜1は、相対的に白で示される白色の硬質炭素層Wと、相対的に黒で示される黒色の硬質炭素層Bとが厚さ方向に交互に積層されているのが確認できた。また、基材側に設けられて、白色の硬質炭素層Wの厚さが厚さ方向Yに徐々に大きくなる3つの繰り返し単位からなる傾斜領域2と、表面側に設けられて、白色の硬質炭素層Wの厚さが厚さ方向Yで同じ又は略同じ6つの繰り返し単位からなる均質領域3とを有することが確認できた。また、sp2/sp3比は、白色の硬質炭素層Wの各部で0.2〜0.7の範囲内であり、黒色の硬質炭素層Bの各部で0.05〜0.3の範囲内であった。なじみ層を最表面形成した場合のなじみ層も同様であった。
上記した被覆膜1の断面写真は、被覆膜1の断面を加速電圧200kVの明視野TEMで撮像して得た。また、被覆膜1の総厚さ、白色の硬質炭素層Wや黒色の硬質炭素層Bの厚さは、明視野TEM像から求めた。厚さの測定には、用いたアークイオンプレーティング装置のコーティング有効範囲の中央付近で被覆膜1を成膜したピストンリングと、上端及び下端付近で被覆膜1を成膜したピストンリングとを測定試料として用いた。得られた黒色の硬質炭素層Bの厚さと白色の硬質炭素層Wの厚さとの比(黒色厚さ/白色厚さ)を計算し、表1に示した。表1より、いずれの試料でも、順次積層する厚さ方向において、黒色の硬質炭素層Bの厚さが徐々に小さくなってその比(黒色厚さ/白色厚さ)が徐々に小さくなる傾斜領域2を確認することができた。また、傾斜領域2の後には、黒色の硬質炭素層Bの厚さと白色の硬質炭素層Wの厚さが厚さ方向で同じ又は略同じでその比(黒色厚さ/白色厚さ)が0.01〜0.3の範囲内に収まっている均質領域3を確認することができた。
成膜された被覆膜1の各種の特性は、自動車用摺動部材の評価で一般的に行われているSRV(Schwingungs Reihungund und Verschleiss)試験機120による摩擦摩耗試験方法により得た。具体的には、図7に示すように、摩擦摩耗試験試料20の摺動面を摺動対象物21であるSUJ2材に当接させた状態で、潤滑油に5W−30(Mo−DTCなし)を用いて、1000Nの荷重をかけながら、それぞれの荷重で10分間(図8(A)の写真を参照)及び60分間(図8(B)の写真を参照)往復摺動させ、摩擦摩耗試験試料20の摺動面を顕微鏡で観察した。図7において、符号12は中間層であり、符号1は被覆膜である。その観察結果を図8に示す。
2 傾斜領域
3 均質領域
11 基材(ピストンリング基材)
11a 下地層
12 中間層
16 摺動面
20 摩擦摩耗試験試料
21 摺動対象物
120 SRV試験機
B 黒色の硬質炭素層
W 白色の硬質炭素層
Y 厚さ方向
Claims (7)
- 摺動面に硬質炭素層からなる被覆膜を有する摺動部材であって、
前記被覆膜は、断面を明視野TEM像により観察したとき、相対的に黒で示される黒色の硬質炭素層と相対的に白で示される白色の硬質炭素層とを含む繰り返し単位が厚さ方向に積層されて1μm〜50μmの範囲内の厚さを有し、
前記被覆膜は、基材側に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向に徐々に大きくなる傾斜領域と、表面側に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向で同じ又は略同じ均質領域とを有し、前記傾斜領域は、厚さ方向にV字状又は放射状に成長した形態を有し、前記均質領域は、厚さ方向にV字状又は放射状に成長した形態を有しない、ことを特徴とする摺動部材。 - 前記均質領域における前記黒色の硬質炭素層と前記白色の硬質炭素層との厚さの比(黒色厚さ/白色厚さ)が、0.01〜0.3である、請求項1に記載の摺動部材。
- 前記白色の硬質炭素層のsp2/sp3比が0.2〜0.7であり、前記黒色の硬質炭素層のsp2/sp3比が前記白色の硬質炭素層のsp2/sp3比よりも小さく且つ0.05〜0.3である、請求項1又は2に記載の摺動部材。
- 断面を明視野TEM像により観察したとき、前記基材又は該基材上に設けられた下地膜と、前記被覆膜との間に、相対的に白で示される硬質炭素下地膜が設けられている、請求項1〜3のいずれか1項に記載の摺動部材。
- 断面を明視野TEM像により観察したとき、前記被覆膜の上に、相対的に白で示される硬質炭素表面膜が設けられている、請求項1〜4のいずれか1項に記載の摺動部材。
- 前記摺動部材がピストンリングである、請求項1〜5のいずれか1項に記載の摺動部材。
- 断面を明視野TEM像により観察したとき、相対的に黒で示される黒色の硬質炭素層と相対的に白で示される白色の硬質炭素層とを含む繰り返し単位が厚さ方向に積層されて1μm〜50μmの範囲内の厚さを有する被覆膜であって、
前記被覆膜は、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向に徐々に大きくなる傾斜領域と、該傾斜領域上に設けられて、前記繰り返し単位のうち前記白色の硬質炭素層の厚さが厚さ方向で同じ又は略同じ均質領域とを有し、前記傾斜領域は、厚さ方向にV字状又は放射状に成長した形態を有し、前記均質領域は、厚さ方向にV字状又は放射状に成長した形態を有しない、ことを特徴とする被覆膜。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017120461 | 2017-06-20 | ||
JP2017120461 | 2017-06-20 | ||
PCT/JP2018/023026 WO2018235750A1 (ja) | 2017-06-20 | 2018-06-15 | 摺動部材及び被覆膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018235750A1 true JPWO2018235750A1 (ja) | 2020-06-18 |
JP6920698B2 JP6920698B2 (ja) | 2021-08-18 |
Family
ID=64735624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019525585A Active JP6920698B2 (ja) | 2017-06-20 | 2018-06-15 | 摺動部材及び被覆膜 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11293548B2 (ja) |
EP (1) | EP3643805A4 (ja) |
JP (1) | JP6920698B2 (ja) |
CN (1) | CN110770362B (ja) |
WO (1) | WO2018235750A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3604782A4 (en) | 2017-03-31 | 2020-12-23 | Kabushiki Kaisha Riken | SLIDING ELEMENT AND PISTON RING |
US10883601B2 (en) * | 2017-03-31 | 2021-01-05 | Kabushiki Kaisha Riken | Sliding member and piston ring |
EP3636795A1 (en) * | 2018-10-09 | 2020-04-15 | Nanofilm Technologies International Pte Ltd | Thick, low-stress tetrahedral amorphous carbon coatings |
JP7053531B2 (ja) * | 2019-05-28 | 2022-04-12 | Tpr株式会社 | 表面処理方法 |
WO2021019084A1 (en) * | 2019-07-31 | 2021-02-04 | Oerlikon Surface Solutions Ag, Pfäffikon | Graded hydrogen-free carbon-based hard material layer coated onto a substrate |
WO2021066058A1 (ja) | 2019-09-30 | 2021-04-08 | 日本ピストンリング株式会社 | 摺動部材、その製造方法及び被覆膜 |
EP4316802A4 (en) | 2021-03-26 | 2024-02-07 | Nippon Piston Ring Co Ltd | SLIDING ELEMENT, ITS MANUFACTURING METHOD AND COATING FILM |
JP7058781B1 (ja) * | 2021-03-30 | 2022-04-22 | 株式会社リケン | ピストンリング及びその製造方法 |
WO2024063157A1 (ja) * | 2022-09-22 | 2024-03-28 | 日本ピストンリング株式会社 | 摺動部材、その製造方法及び被覆膜 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007169698A (ja) * | 2005-12-21 | 2007-07-05 | Riken Corp | 非晶質硬質炭素皮膜 |
WO2016042629A1 (ja) * | 2014-09-17 | 2016-03-24 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
JP2017053435A (ja) * | 2015-09-09 | 2017-03-16 | 株式会社リケン | 摺動部材及びピストンリング |
WO2017104822A1 (ja) * | 2015-12-18 | 2017-06-22 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
WO2017163807A1 (ja) * | 2016-03-23 | 2017-09-28 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3826453B2 (ja) | 1996-09-10 | 2006-09-27 | 住友電気工業株式会社 | 硬質炭素膜 |
JP4730753B2 (ja) | 2000-03-23 | 2011-07-20 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜および耐摩耗性、耐摺動性に優れた部材 |
JP4929531B2 (ja) | 2001-04-27 | 2012-05-09 | 住友電気工業株式会社 | 導電性硬質炭素皮膜 |
US8999604B2 (en) | 2009-12-25 | 2015-04-07 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Oriented amorphous carbon film and process for forming the same |
DE102011003254A1 (de) | 2011-01-27 | 2012-08-02 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, mit einer Beschichtung sowie Verfahren zur Herstellung eines Gleitelements |
BR102012003607A2 (pt) * | 2012-02-16 | 2013-10-29 | Mahle Metal Leve Sa | Componente deslizante para uso em motores de combustão interna |
JPWO2013153614A1 (ja) * | 2012-04-09 | 2015-12-17 | オーエスジー株式会社 | 切削工具用硬質被膜及び硬質被膜被覆切削工具 |
DE102012219930A1 (de) * | 2012-10-31 | 2014-04-30 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, mit einer Beschichtung |
JP5965378B2 (ja) * | 2013-10-31 | 2016-08-03 | 株式会社リケン | ピストンリング及びその製造方法 |
JP6311175B2 (ja) * | 2014-09-17 | 2018-04-18 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
-
2018
- 2018-06-15 WO PCT/JP2018/023026 patent/WO2018235750A1/ja unknown
- 2018-06-15 US US16/624,781 patent/US11293548B2/en active Active
- 2018-06-15 CN CN201880040572.9A patent/CN110770362B/zh active Active
- 2018-06-15 JP JP2019525585A patent/JP6920698B2/ja active Active
- 2018-06-15 EP EP18820160.2A patent/EP3643805A4/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007169698A (ja) * | 2005-12-21 | 2007-07-05 | Riken Corp | 非晶質硬質炭素皮膜 |
WO2016042629A1 (ja) * | 2014-09-17 | 2016-03-24 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
JP2017053435A (ja) * | 2015-09-09 | 2017-03-16 | 株式会社リケン | 摺動部材及びピストンリング |
WO2017104822A1 (ja) * | 2015-12-18 | 2017-06-22 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
WO2017163807A1 (ja) * | 2016-03-23 | 2017-09-28 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6920698B2 (ja) | 2021-08-18 |
EP3643805A1 (en) | 2020-04-29 |
US20200217416A1 (en) | 2020-07-09 |
EP3643805A4 (en) | 2020-10-14 |
CN110770362B (zh) | 2022-03-22 |
WO2018235750A1 (ja) | 2018-12-27 |
US11293548B2 (en) | 2022-04-05 |
CN110770362A (zh) | 2020-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6920698B2 (ja) | 摺動部材及び被覆膜 | |
JP5667176B2 (ja) | 保護コーティング、保護コーティングを有するコーティング部材、並びに保護コーティングを製造するための方法 | |
JP6494505B2 (ja) | 硬質炭素皮膜 | |
JP7290171B2 (ja) | 摺動部材、その製造方法及び被覆膜 | |
JPH11172413A (ja) | ピストンリング | |
JP6557342B2 (ja) | ピストンリング及びその製造方法 | |
WO2015115601A9 (ja) | ピストンリング及びその製造方法 | |
JP6718452B2 (ja) | ピストンリング及びその製造方法 | |
JP2008286354A (ja) | 摺動部材 | |
JP2008241032A (ja) | ピストンリング及びその製造方法 | |
JP7298083B2 (ja) | ピストンリング及びその製造方法 | |
JP6762887B2 (ja) | ピストンリング | |
US20240093344A1 (en) | Hard carbon coatings with improved adhesion strength by means of hipims and method thereof | |
JP5436486B2 (ja) | 摺動部材 | |
WO2022203052A1 (ja) | 摺動部材、その製造方法及び被覆膜 | |
JP2003042294A (ja) | ピストンリング | |
JP6756641B2 (ja) | ピストンリング | |
JP2003014121A (ja) | ピストンリング | |
JP4374160B2 (ja) | ピストンリング | |
WO2024063157A1 (ja) | 摺動部材、その製造方法及び被覆膜 | |
JP2006207691A (ja) | 硬質皮膜被覆摺動部材 | |
WO2021140851A1 (ja) | 摺動部材及びピストンリング | |
JP2006206960A (ja) | 硬質皮膜被覆摺動部材 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200221 |
|
AA64 | Notification of invalidation of claim of internal priority (with term) |
Free format text: JAPANESE INTERMEDIATE CODE: A241764 Effective date: 20200324 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200402 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210316 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210511 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210713 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210714 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6920698 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |