JPWO2017217431A1 - 積層装置および積層方法 - Google Patents
積層装置および積層方法 Download PDFInfo
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Abstract
Description
特許文献1 特開2013−258377号公報
Claims (23)
- 第1の基板と第2の基板とを積層する積層装置であって、
前記第1の基板を保持する保持部材を複数備え、
複数の前記保持部材は、前記第2の基板に対する前記第1の基板の位置ずれを、予め設定された補正量で補正し、
前記複数の保持部材は、前記補正量が互いに異なる保持部材を含む積層装置。 - 前記第1の基板および前記第2の基板に関する情報に基づいて、前記第1の基板を保持する保持部材を複数の前記保持部材から選択する保持部材選択部を備える請求項1に記載の積層装置。
- 前記保持部材選択部が選択した前記保持部材に保持することにより補正する他の基板を選択する基板選択部を更に備え、
前記基板選択部が選択した前記他の基板を、前記保持部材選択部が選択した前記保持部材に保持して、前記第1の基板の積層に連続して前記他の基板を積層する請求項2に記載の積層装置。 - 前記保持部材選択部により選択された前記保持部材を、当該保持部材が収容された位置から前記第1の基板を保持する位置まで搬送する搬送部を更に備える請求項2または3に記載の積層装置。
- 前記第1の基板および前記第2の基板に関する情報は、前記第1の基板および前記第2の基板の少なくとも一方の形状に関する情報を含む請求項4に記載の積層装置。
- 前記形状に関する情報は、前記第1の基板および前記第2の基板の少なくとも一方の反りまたは撓みに関する情報を含む請求項5に記載の積層装置。
- 前記形状に関する情報は、前記第1の基板および前記第2の基板の少なくとも一方の面方向の歪みに関する情報を含む請求項5または6に記載の積層装置。
- 前記形状に関する情報は、予め定められた形状に対する前記第1の基板の形状の相違を含む請求項5から7のいずれか一項に記載の積層装置。
- 前記形状に関する情報は、前記第2の基板の形状に対する前記第1の基板の形状の相違を含む請求項5から7のいずれか一項に記載の積層装置。
- 前記第1の基板および前記第2の基板に関する情報は、前記第1の基板および前記第2の基板の間の位置ずれに関する情報を含み、
前記保持部材選択部は、前記位置ずれに関する情報に基づいて前記保持部材を選択する請求項4から9のいずれか一項に記載の積層装置。 - 前記第1の基板および前記第2の基板の間の位置ずれ量が閾値以下となる補正量を算出する算出部を備え、
前記保持部材選択部は、前記算出部で算出された補正量に対応する前記保持部材を選択する請求項10に記載の積層装置。 - 複数の前記保持部材の保持力を制御する制御部を備え、
前記算出部は、前記保持部材選択部で選択された前記保持部材に設定された補正量と、算出した補正量との差分を算出し、
前記制御部は、算出した差分に基づいて前記保持力を制御する請求項11に記載の積層装置。 - 複数の前記保持部材は、それぞれ前記第1の基板を予め設定された変形量で変形し、前記変形量が互いに異なる保持部材を含む請求項1から11のいずれか一項に記載の積層装置。
- 複数の前記保持部材は、それぞれ前記第1の基板を保持する保持面を有し、前記保持面の形状が互いに異なる保持部材を含む請求項1から13のいずれか一項に記載の積層装置。
- 複数の前記保持部材は、前記保持面の凸量および曲率の少なくとも一方が互いに異なる保持部材を含む請求項14に記載の積層装置。
- 複数の前記保持部材は、それぞれ前記第1の基板を保持する保持面を有し、前記第1の基板に対する前記保持面の表面粗さが互いに異なる保持部材を含む請求項1から15のいずれか一項に記載の積層装置。
- 複数の前記保持部材は、それぞれ前記第1の基板を保持する保持面を有し、前記保持面の温度が互いに異なる保持部材を含む請求項1から16のいずれか一項に記載の積層装置。
- 複数の前記保持部材は、前記第1の基板を保持する保持面を有し、前記保持面における前記第1の基板の保持力が互いに異なる保持部材18を含む請求項1から17のいずれか一項に記載の積層装置。
- 複数の前記保持部材は、保持した前記第1の基板と共に搬送される基板ホルダを含む請求項1から18のいずれか一項に記載の積層装置。
- 複数の前記保持部材のいずれかは、搬入された前記第1の基板を保持するステージを含む請求項1から19のいずれか一項に記載の積層装置。
- 前複数の前記保持部材は、互いに同じ補正量で前記位置ずれを補正する保持部材を更に含む請求項1から20のいずれか一項に記載の積層装置。
- 第1の基板および第2の基板を積層する積層方法であって、
前記第1の基板を保持し、前記第2の基板に対する前記第1の基板の位置ずれを、予め設定された補正量で補正する複数の保持部材であって、互いに異なる補正量で前記第1の基板を補正する保持部材を含む複数の保持部材を用意する段階と、
前記第1の基板および前記第2の基板に関する情報に基づいて、前記複数の保持部材のいずれかにより前記第1の基板を保持させる段階と
を含む積層方法。 - 前記複数の保持部材のうちのひとつに対して、当該保持部材に設定された補正量で補正する複数の基板を選択する段階と、
前記ひとつの保持部材を繰り返し用いて、選択した前記複数の基板を連続して積層する段階と
を更に備える請求項22に記載の積層方法。
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WO2017217431A1 (ja) * | 2016-06-16 | 2017-12-21 | 株式会社ニコン | 積層装置および積層方法 |
JP7147847B2 (ja) * | 2018-07-25 | 2022-10-05 | 株式会社ニコン | 接合方法および接合装置 |
TWI828760B (zh) * | 2018-10-25 | 2024-01-11 | 日商尼康股份有限公司 | 基板貼合裝置、參數計算裝置、基板貼合方法及參數計算方法 |
WO2020208985A1 (ja) * | 2019-04-08 | 2020-10-15 | 株式会社村田製作所 | 接合基板の製造方法 |
TWI822993B (zh) * | 2019-05-08 | 2023-11-21 | 日商尼康股份有限公司 | 基板貼合裝置及基板貼合方法 |
CN114127907A (zh) * | 2019-07-25 | 2022-03-01 | 东京毅力科创株式会社 | 接合装置和接合方法 |
JP7325357B2 (ja) * | 2020-02-25 | 2023-08-14 | 三菱電機株式会社 | 半導体装置の製造方法 |
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US11823935B2 (en) | 2023-11-21 |
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TWI720208B (zh) | 2021-03-01 |
WO2017217431A1 (ja) | 2017-12-21 |
TW202129806A (zh) | 2021-08-01 |
TWI750999B (zh) | 2021-12-21 |
KR20220137144A (ko) | 2022-10-11 |
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