JPWO2017217076A1 - セラミックス基複合材料部品及びその製造方法 - Google Patents
セラミックス基複合材料部品及びその製造方法 Download PDFInfo
- Publication number
- JPWO2017217076A1 JPWO2017217076A1 JP2018523336A JP2018523336A JPWO2017217076A1 JP WO2017217076 A1 JPWO2017217076 A1 JP WO2017217076A1 JP 2018523336 A JP2018523336 A JP 2018523336A JP 2018523336 A JP2018523336 A JP 2018523336A JP WO2017217076 A1 JPWO2017217076 A1 JP WO2017217076A1
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- Prior art keywords
- silicon carbide
- composite material
- base material
- ceramic matrix
- matrix composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000463 material Substances 0.000 title claims abstract description 305
- 239000011153 ceramic matrix composite Substances 0.000 title claims abstract description 74
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 170
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 124
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 47
- 239000010703 silicon Substances 0.000 claims abstract description 42
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 29
- 239000000956 alloy Substances 0.000 claims abstract description 29
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 27
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000005219 brazing Methods 0.000 claims description 118
- 239000006023 eutectic alloy Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 48
- 239000002002 slurry Substances 0.000 claims description 36
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 33
- 239000000919 ceramic Substances 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 25
- 239000002131 composite material Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000002844 melting Methods 0.000 claims description 17
- 230000008018 melting Effects 0.000 claims description 17
- 239000012783 reinforcing fiber Substances 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 8
- 238000005470 impregnation Methods 0.000 claims description 7
- 239000000155 melt Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 37
- 238000005452 bending Methods 0.000 description 30
- 239000000835 fiber Substances 0.000 description 28
- 239000012071 phase Substances 0.000 description 20
- 239000000945 filler Substances 0.000 description 16
- 239000011159 matrix material Substances 0.000 description 15
- 229910008332 Si-Ti Inorganic materials 0.000 description 13
- 229910006749 Si—Ti Inorganic materials 0.000 description 13
- 239000000843 powder Substances 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 230000005496 eutectics Effects 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 8
- 238000011049 filling Methods 0.000 description 8
- 238000005304 joining Methods 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 239000011184 SiC–SiC matrix composite Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 239000002759 woven fabric Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 230000008595 infiltration Effects 0.000 description 5
- 238000001764 infiltration Methods 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910008326 Si-Y Inorganic materials 0.000 description 4
- 229910006773 Si—Y Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 239000013065 commercial product Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000005055 methyl trichlorosilane Substances 0.000 description 2
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229920001795 coordination polymer Polymers 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 235000011837 pasties Nutrition 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 229920003257 polycarbosilane Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K1/0018—Brazing of turbine parts
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K1/008—Soldering within a furnace
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- F02K—JET-PROPULSION PLANTS
- F02K9/00—Rocket-engine plants, i.e. plants carrying both fuel and oxidant therefor; Control thereof
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- B23K1/00—Soldering, e.g. brazing, or unsoldering
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- B23K2101/001—Turbines
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K2103/16—Composite materials, e.g. fibre reinforced
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/61—Joining two substrates of which at least one is porous by infiltrating the porous substrate with a liquid, such as a molten metal, causing bonding of the two substrates, e.g. joining two porous carbon substrates by infiltrating with molten silicon
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F05D2230/23—Manufacture essentially without removing material by permanently joining parts together
- F05D2230/232—Manufacture essentially without removing material by permanently joining parts together by welding
- F05D2230/237—Brazing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/90—Coating; Surface treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/22—Non-oxide ceramics
- F05D2300/226—Carbides
- F05D2300/2261—Carbides of silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/603—Composites; e.g. fibre-reinforced
- F05D2300/6033—Ceramic matrix composites [CMC]
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Abstract
Description
Claims (17)
- セラミックス基複合材料部品であって、
珪化物を含むセラミックス基複合材料で各々形成される第1基材及び第2基材と、
前記第1基材の接合面と、前記第2基材の接合面とを各々被覆する炭化珪素層と、
前記第1基材の接合面を被覆する炭化珪素層と、前記第2基材の接合面を被覆する炭化珪素層との間に設けられ、珪素を含む合金で形成される接合層と、
を備える、セラミックス基複合材料部品。 - 請求項1に記載のセラミックス基複合材料部品であって、
前記第1基材及び前記第2基材は、前記第1基材の接合面の空隙と、前記第2基材の接合面の空隙とに、炭化珪素粉末が充填された目止め部を有している、セラミックス基複合材料部品。 - 請求項1または2に記載のセラミックス基複合材料部品であって、
前記接合層は、珪素を含む共晶合金で形成されている、セラミックス基複合材料部品。 - 請求項3に記載のセラミックス基複合材料部品であって、
前記珪素を含む共晶合金は、Siと、Ti、Y及びHfの少なくとも1つの元素と、を含む共晶合金である、セラミックス基複合材料部品。 - 請求項1から4のいずれか1つに記載のセラミックス基複合材料部品であって、
前記接合層の組織サイズが、100μm未満である、セラミックス基複合材料部品。 - 請求項5に記載のセラミックス基複合材料部品であって、
前記接合層の組織サイズは、金属シリサイド相のサイズである、セラミックス基複合材料部品。 - セラミックス基複合材料部品の製造方法であって、
珪化物を含むセラミックス基複合材料で各々形成される第1基材及び第2基材の各々接合面を、炭化珪素層で被覆する炭化珪素層被覆工程と、
前記第1基材の接合面を被覆する炭化珪素層と、前記第2基材の接合面を被覆する炭化珪素層とを、珪素を含む合金からなるろう材を加熱することにより溶融させてろう付けするろう付け工程と、
を備える、セラミックス基複合材料部品の製造方法。 - 請求項7に記載のセラミックス基複合材料部品の製造方法であって、
前記炭化珪素層被覆工程は、前記炭化珪素層を被覆する前に、前記第1基材の接合面の空隙と、前記第2基材の接合面の空隙とに、炭化珪素粉末を充填して目止めする、セラミックス基複合材料部品の製造方法。 - 請求項8に記載のセラミックス基複合材料部品の製造方法であって、
前記炭化珪素層被覆工程は、前記炭化珪素層を被覆する前に、前記第1基材と前記第2基材とを、前記炭化珪素粉末を含むスラリに浸漬し、前記スラリに超音波振動を加えながら、前記第1基材の接合面の空隙と、前記第2基材の接合面の空隙とに、炭化珪素粉末を充填して目止めする、セラミックス基複合材料部品の製造方法。 - 請求項9に記載のセラミックス基複合材料部品の製造方法であって、
前記炭化珪素層被覆工程は、前記スラリを脱泡し、脱泡させた前記スラリに前記第1基材と前記第2基材とを浸漬させて静置した後に、前記スラリに超音波振動を加える、セラミックス基複合材料部品の製造方法。 - 請求項8から10のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記炭化珪素粉末の平均粒径は、3μm以上5μm以下である、セラミックス基複合材料部品の製造方法。 - 請求項7から11のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記ろう材は、珪素を含む共晶合金である、セラミックス基複合材料部品の製造方法。 - 請求項7から12のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記炭化珪素層被覆工程は、前記炭化珪素層を化学気相含浸法により形成する、セラミックス基複合材料部品の製造方法。 - 請求項7から13のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記ろう付け工程は、前記ろう材を、珪素を含む合金の融点以上、且つ前記セラミックス基複合材料の強化繊維の結晶粒粗大化温度未満で加熱する、セラミックス基複合材料部品の製造方法。 - 請求項7から14のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記ろう付け工程は、前記第1基材の接合面を被覆する炭化珪素層と、前記第2基材の接合面を被覆する炭化珪素層とを、隙間をあけて突き合せ、前記隙間の外側から溶融させた前記ろう材を前記隙間に流して充填する、セラミックス基複合材料部品の製造方法。 - 請求項7から14のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記ろう付け工程は、前記第1基材及び前記第2基材の各々接合面に被覆された各々炭化珪素層の表面の少なくとも一方に前記ろう材を塗布した後に突き当ててろう付けする、セラミックス基複合材料部品の製造方法。 - 請求項7から16のいずれか1つに記載のセラミックス基複合材料部品の製造方法であって、
前記ろう付け工程は、前記ろう材の平均粒径が、45μm以下である、セラミックス基複合材料部品の製造方法。
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