JPWO2016104517A1 - バイオセンサ - Google Patents
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- JPWO2016104517A1 JPWO2016104517A1 JP2016566396A JP2016566396A JPWO2016104517A1 JP WO2016104517 A1 JPWO2016104517 A1 JP WO2016104517A1 JP 2016566396 A JP2016566396 A JP 2016566396A JP 2016566396 A JP2016566396 A JP 2016566396A JP WO2016104517 A1 JPWO2016104517 A1 JP WO2016104517A1
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- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000011159 matrix material Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims description 74
- 239000000126 substance Substances 0.000 claims description 52
- 238000001514 detection method Methods 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 230000006870 function Effects 0.000 claims description 12
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 229910021645 metal ion Inorganic materials 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 99
- 238000005259 measurement Methods 0.000 description 60
- 229910052581 Si3N4 Inorganic materials 0.000 description 44
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 44
- 239000010410 layer Substances 0.000 description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 30
- 238000005192 partition Methods 0.000 description 30
- 229910052814 silicon oxide Inorganic materials 0.000 description 30
- 238000012546 transfer Methods 0.000 description 22
- 239000004020 conductor Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 18
- 230000000638 stimulation Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 8
- 210000004027 cell Anatomy 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000012491 analyte Substances 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 239000002555 ionophore Substances 0.000 description 6
- 230000000236 ionophoric effect Effects 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 229920001940 conductive polymer Polymers 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 150000003609 titanium compounds Chemical class 0.000 description 5
- -1 H + Chemical class 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 201000010099 disease Diseases 0.000 description 4
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 description 4
- OIPILFWXSMYKGL-UHFFFAOYSA-N acetylcholine Chemical compound CC(=O)OCC[N+](C)(C)C OIPILFWXSMYKGL-UHFFFAOYSA-N 0.000 description 3
- 229960004373 acetylcholine Drugs 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 238000005415 bioluminescence Methods 0.000 description 3
- 230000029918 bioluminescence Effects 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 3
- 239000011575 calcium Substances 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000007641 inkjet printing Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 210000004379 membrane Anatomy 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 210000001519 tissue Anatomy 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 2
- 108010067973 Valinomycin Proteins 0.000 description 2
- 230000036982 action potential Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- FCFNRCROJUBPLU-UHFFFAOYSA-N compound M126 Natural products CC(C)C1NC(=O)C(C)OC(=O)C(C(C)C)NC(=O)C(C(C)C)OC(=O)C(C(C)C)NC(=O)C(C)OC(=O)C(C(C)C)NC(=O)C(C(C)C)OC(=O)C(C(C)C)NC(=O)C(C)OC(=O)C(C(C)C)NC(=O)C(C(C)C)OC1=O FCFNRCROJUBPLU-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 210000004748 cultured cell Anatomy 0.000 description 2
- 238000004720 dielectrophoresis Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- VYFYYTLLBUKUHU-UHFFFAOYSA-N dopamine Chemical compound NCCC1=CC=C(O)C(O)=C1 VYFYYTLLBUKUHU-UHFFFAOYSA-N 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000002207 metabolite Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- FCFNRCROJUBPLU-DNDCDFAISA-N valinomycin Chemical compound CC(C)[C@@H]1NC(=O)[C@H](C)OC(=O)[C@@H](C(C)C)NC(=O)[C@@H](C(C)C)OC(=O)[C@H](C(C)C)NC(=O)[C@H](C)OC(=O)[C@@H](C(C)C)NC(=O)[C@@H](C(C)C)OC(=O)[C@H](C(C)C)NC(=O)[C@H](C)OC(=O)[C@@H](C(C)C)NC(=O)[C@@H](C(C)C)OC1=O FCFNRCROJUBPLU-DNDCDFAISA-N 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 206010010356 Congenital anomaly Diseases 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 241000700605 Viruses Species 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000427 antigen Substances 0.000 description 1
- 102000036639 antigens Human genes 0.000 description 1
- 108091007433 antigens Proteins 0.000 description 1
- FNEPSTUXZLEUCK-UHFFFAOYSA-N benzo-15-crown-5 Chemical compound O1CCOCCOCCOCCOC2=CC=CC=C21 FNEPSTUXZLEUCK-UHFFFAOYSA-N 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- FJSZDECKJYYBGE-UHFFFAOYSA-N bis(1,4,7,10-tetraoxacyclododec-2-ylmethyl) 2-dodecyl-2-methylpropanedioate Chemical compound C1OCCOCCOCCOC1COC(=O)C(C)(CCCCCCCCCCCC)C(=O)OCC1COCCOCCOCCO1 FJSZDECKJYYBGE-UHFFFAOYSA-N 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 229910001424 calcium ion Inorganic materials 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000033310 detection of chemical stimulus Effects 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229960003638 dopamine Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000002779 inactivation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 239000002858 neurotransmitter agent Substances 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 108020004707 nucleic acids Proteins 0.000 description 1
- 150000007523 nucleic acids Chemical class 0.000 description 1
- 238000001139 pH measurement Methods 0.000 description 1
- 244000045947 parasite Species 0.000 description 1
- 230000035479 physiological effects, processes and functions Effects 0.000 description 1
- 210000002381 plasma Anatomy 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000028327 secretion Effects 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
電極1の位置のイオン(A)の補間値=([イオン(A)1+イオン(A)3])/2
電極2の位置のイオン(A)の補間値=([イオン(A)2]+イオン(A)4)/2
光1の位置のイオン(A)の補間値=([イオン(A)1]+[イオン(A)2])/2
光3の位置のイオン(A)の補間値=([イオン(A)3]+[イオン(A)4])/2。
y=A・x
ここで、xは各イオンの真の濃度ベクトル、yは各イオンの計測濃度ベクトル、Aは選択係数行列である。
(1)センシング部分に化学物質感応性膜を含む化学物質センサ素子;
(2)センシング部分に水素イオン感応性膜を含むpHセンサ素子;
(3)センシング部に金属イオン感応性膜を含む金属イオン濃度センサ素子;
(4)センシング部分に金属層と前記金属層上に積層された絶縁層とを含む電極センサ素子;
(5)センシング部分に第1の金属層と、前記金属層上に積層された第2の金属層とを含む電極センサ素子;
(6)センシング部分に少なくとも2層の無機光学フィルタ層と前記無機光学フィルタ層よりも上方に積層された少なくとも1層の有機光学フィルタ層とを含む光センサ素子;
(7)センシング部分に光透過性部材と前記光透過部材を通過した光を受け取る受光素子とを含む光センサ素子;
(8)センシング部分に透明電極と前記透明電極を通過した光を受け取る受光素子とを含む光電気センサ素子;
(9)センシング部分に透明電極と前記透明電極上に積層された化学物質感応膜とを含む化学物質・電気センサ素子;
(10)センシング部分に少なくとも1層の有機光学フィルタ層および/または少なくとも2層の無機光学フィルタ層と、透明電極とを含む電気・光センサ素子;および
(11)センシング部分に少なくとも2層の無機光学フィルタ層と前記無機光学フィルタ層よりも上方に積層された少なくとも1層の有機光学フィルタ層と前記有機光学フィルタ層の上方に積層された透明電極とを含む電気・光センサ素子。
104 区画壁 105 配線 108 受光素子
111 イオン濃度計測画素 112 イオン感応膜
121 水素イオン濃度計測画素 131,141 電気計測画素
151,161,171,181 光センサ画素 182 透明電極
310 バイオセンサ 311 センサアレイ 312 ロウコントローラ
313 読み出し回路
Claims (11)
- 基板と、前記基板上の二次元領域に存在するセンサマトリックスとを備え、
前記センサマトリックスは、透明電極を含むセンシング部を有する少なくとも3種類のセンサ素子を備える複数の基本ブロックで構成されることを特徴とするバイオセンサ。 - 前記センシング部は、前記バイオセンサの1つの表面側を向いており、前記センサマトリックスが全体としてセンサ画素アレイを構成していることを特徴とする請求項1に記載のバイオセンサ。
- 前記少なくとも3種類のセンサ素子は、互いに異なる機能を有するように化学物質センサ素子、光センサ素子および/または電気センサ素子であることを特徴とする請求項1または2に記載のバイオセンサ。
- 前記少なくとも3種類のセンサ素子は、化学物質センサ素子、光センサ素子および電気センサ素子を含むことを特徴とする請求項3に記載のバイオセンサ。
- 前記少なくとも3種類のセンサ素子は、互いに異なる機能を有するように以下の群から少なくとも1つ選択されることを特徴とする請求項1〜4の何れか1項に記載のバイオセンサ;
(1)前記透明電極を通過した光を受け取る受光素子を含む光電気センサ素子;
(2)前記透明電極上に積層された化学物質感応膜を含む化学物質・電気センサ素子;
(3)前記センシング部に少なくとも1層の有機光学フィルタ層および/または少なくとも2層の無機光学フィルタ層と、前記透明電極とを含む電気・光センサ素子;および
(4)前記センシング部に少なくとも2層の無機光学フィルタ層と前記無機光学フィルタ層よりも上方に積層された少なくとも1層の有機光学フィルタ層と前記有機光学フィルタ層の上方に積層された前記透明電極とを含む電気・光センサ素子。 - 前記少なくとも3種類のセンサ素子は、互いに異なる機能を有するように以下の群から少なくとも1つ選択されることを特徴とする請求項1〜5の何れか1項に記載のバイオセンサ;
(1)前記センシング部に化学物質感応性膜を含む化学物質センサ素子;
(2)前記センシング部に水素イオン感応性膜を含むpHセンサ素子;
(3)前記センシング部に金属イオン感応性膜を含む金属イオン濃度センサ素子;
(4)前記センシング部に金属層と前記金属層上に積層された絶縁層とを含む電極センサ素子;
(5)前記センシング部に第1の金属層と、前記金属層上に積層された第2の金属層とを含む電極センサ素子;
(6)前記センシング部に少なくとも2層の無機光学フィルタ層と前記無機光学フィルタ層よりも上方に積層された少なくとも1層の有機光学フィルタ層とを含む光センサ素子;
(7)前記センシング部に光透過性部材と前記光透過性部材を通過した光を受け取る受光素子とを含む光センサ素子。 - 更に、前記基板上に温度センサ画素を備えることを特徴とする請求項1〜6の何れか1項に記載のバイオセンサ。
- 更に、前記センサ素子の種類毎に当該センサ素子からの信号を読み出す第1の回路部分を前記基板上に備えることを特徴とする請求項1〜7何れか1項に記載のバイオセンサ。
- 更に、それぞれの前記センサ素子からの検出信号をそれぞれに読み出す第2の回路部分を前記基板上に備えることを特徴とする請求項1〜7何れか1項に記載のバイオセンサ。
- 前記第1または第2の回路部分が、前記センサ素子からの信号の読み出し順を制御するコントローラと、前記コントローラの制御の下で、前記センサ素子からの当該信号を外部に出力する出力回路とを備えることを特徴とする請求項8または9に記載のバイオセンサ。
- 更に、前記第1の回路部分または前記第2の回路部分に連絡している、A/D変換回路、信号処理回路、通信回路、メモリ回路および/または電源回路を前記基板上に備えることを特徴とする請求項8〜10の何れか1項に記載のバイオセンサ。
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