JPWO2016031039A1 - エピタキシャル成長用テンプレート及びその作製方法、並びに、窒化物半導体装置 - Google Patents
エピタキシャル成長用テンプレート及びその作製方法、並びに、窒化物半導体装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 77
- 239000004065 semiconductor Substances 0.000 title claims description 29
- 150000004767 nitrides Chemical class 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 71
- 239000010980 sapphire Substances 0.000 claims abstract description 71
- 238000004381 surface treatment Methods 0.000 claims abstract description 34
- 238000009826 distribution Methods 0.000 claims abstract description 28
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims abstract description 14
- 150000001875 compounds Chemical class 0.000 claims description 15
- 239000002994 raw material Substances 0.000 claims description 11
- 238000002360 preparation method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 90
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 23
- 230000002950 deficient Effects 0.000 description 20
- 239000013078 crystal Substances 0.000 description 14
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 10
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000005253 cladding Methods 0.000 description 5
- -1 oxygen ions Chemical class 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- NCMHKCKGHRPLCM-UHFFFAOYSA-N caesium(1+) Chemical compound [Cs+] NCMHKCKGHRPLCM-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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Abstract
Description
サファイア基板の表面にGa原子を分散して供給する表面処理工程と、前記サファイア基板上にAlN層をエピタキシャル成長させるAlN成長工程と、を有し、
前記AlN層の表面から深さ100nmまでの表面近傍領域を除く前記AlN層の内部領域における2次イオン質量分析法により得られるGa濃度の前記サファイア基板の表面に垂直な深さ方向の濃度分布における前記Ga濃度の最大値を得る前記深さ方向の位置が、前記サファイア基板の界面から前記AlN層側に400nm離間した位置までの界面近傍領域内に存在し、前記Ga濃度の最大値が、3×1017atoms/cm3以上、2×1020atoms/cm3以下となることを特徴とするテンプレートの作製方法を提供する。
前記AlN層の表面から深さ100nmまでの表面近傍領域を除く前記AlN層の内部領域における2次イオン質量分析法により得られるGa濃度の前記サファイア基板の表面に垂直な深さ方向の濃度分布における前記Ga濃度の最大値を得る前記深さ方向の位置が、前記サファイア基板の界面から前記AlN層側に400nm離間した位置までの界面近傍領域内に存在し、前記Ga濃度の最大値が、3×1017atoms/cm3以上、2×1020atoms/cm3以下であることを特徴とするエピタキシャル成長用テンプレートを提供する。
2: サファイア基板
3: AlN層
4: Ga原子
Claims (7)
- サファイア基板の表面上にAlN層を有し、GaN系化合物半導体層をエピタキシャル成長させる下地となるテンプレートの作製方法であって、
サファイア基板の表面にGa原子を分散して供給する表面処理工程と、
前記サファイア基板上にAlN層をエピタキシャル成長させるAlN成長工程と、を有し、
前記AlN層の表面から深さ100nmまでの表面近傍領域を除く前記AlN層の内部領域における2次イオン質量分析法により得られるGa濃度の前記サファイア基板の表面に垂直な深さ方向の濃度分布における前記Ga濃度の最大値を得る前記深さ方向の位置が、前記サファイア基板の界面から前記AlN層側に400nm離間した位置までの界面近傍領域内に存在し、前記Ga濃度の最大値が、3×1017atoms/cm3以上、2×1020atoms/cm3以下となることを特徴とするテンプレートの作製方法。 - 前記表面処理工程において、前記AlN成長工程を行う成長室内にGaの原料となる化合物を供給することを特徴とする請求項1に記載のテンプレートの作製方法。
- 前記AlN成長工程を、前記表面処理工程の終了後、前記表面処理工程の開始と同時、または、前記表面処理工程の途中の何れかのタイミングで開始することを特徴とする請求項1または2に記載のテンプレートの作製方法。
- 前記2次イオン質量分析法で使用する1次イオン種がO2 +であることを特徴とする請求項1〜3の何れか1項に記載のテンプレートの作製方法。
- 表面にGa原子が分散して存在しているサファイア基板と、
前記サファイア基板上にエピタキシャル成長してなるAlN層と、を備え、
前記AlN層の表面から深さ100nmまでの表面近傍領域を除く前記AlN層の内部領域における2次イオン質量分析法により得られるGa濃度の前記サファイア基板の表面に垂直な深さ方向の濃度分布における前記Ga濃度の最大値を得る前記深さ方向の位置が、前記サファイア基板の界面から前記AlN層側に400nm離間した位置までの界面近傍領域内に存在し、前記Ga濃度の最大値が、3×1017atoms/cm3以上、2×1020atoms/cm3以下であることを特徴とするエピタキシャル成長用テンプレート。 - 前記2次イオン質量分析法で使用する1次イオン種がO2 +であることを特徴とする請求項5に記載のエピタキシャル成長用テンプレート。
- 請求項5または6に記載のエピタキシャル成長用テンプレートと、
前記テンプレート上にエピタキシャル成長してなる1層以上のGaN系化合物半導体層と、を備えることを特徴とする窒化物半導体装置。
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Application Number | Priority Date | Filing Date | Title |
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PCT/JP2014/072701 WO2016031039A1 (ja) | 2014-08-29 | 2014-08-29 | エピタキシャル成長用テンプレート及びその作製方法、並びに、窒化物半導体装置 |
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US10199532B1 (en) * | 2017-09-08 | 2019-02-05 | Mikro Mesa Technology Co., Ltd. | Light-emitting diode and method for manufacturing the same |
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CN109686821B (zh) * | 2018-11-30 | 2021-02-19 | 华灿光电(浙江)有限公司 | 一种发光二极管的外延片的制备方法 |
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JP3455512B2 (ja) | 1999-11-17 | 2003-10-14 | 日本碍子株式会社 | エピタキシャル成長用基板およびその製造方法 |
WO2002017369A1 (en) * | 2000-08-18 | 2002-02-28 | Showa Denko K.K. | Method of fabricating group-iii nitride semiconductor crystal, metho of fabricating gallium nitride-based compound semiconductor, gallium nitride-based compound semiconductor, gallium nitride-based compound semiconductor light-emitting device, and light source using the semiconductor light-emitting device |
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CN100550440C (zh) * | 2004-10-27 | 2009-10-14 | 三菱电机株式会社 | 半导体元件以及半导体元件的制造方法 |
US20060175681A1 (en) * | 2005-02-08 | 2006-08-10 | Jing Li | Method to grow III-nitride materials using no buffer layer |
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JP5079361B2 (ja) | 2007-03-23 | 2012-11-21 | 日本碍子株式会社 | AlGaN結晶層の形成方法 |
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US9556535B2 (en) | 2017-01-31 |
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WO2016031039A1 (ja) | 2016-03-03 |
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