JPWO2014196348A1 - セラミック基板用組成物およびセラミック回路部品 - Google Patents
セラミック基板用組成物およびセラミック回路部品 Download PDFInfo
- Publication number
- JPWO2014196348A1 JPWO2014196348A1 JP2015521372A JP2015521372A JPWO2014196348A1 JP WO2014196348 A1 JPWO2014196348 A1 JP WO2014196348A1 JP 2015521372 A JP2015521372 A JP 2015521372A JP 2015521372 A JP2015521372 A JP 2015521372A JP WO2014196348 A1 JPWO2014196348 A1 JP WO2014196348A1
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- ceramic substrate
- glass
- powder
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0009—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing silica as main constituent
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
- C03C14/006—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of microcrystallites, e.g. of optically or electrically active material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2214/00—Nature of the non-vitreous component
- C03C2214/20—Glass-ceramics matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/129—Ceramic dielectrics containing a glassy phase, e.g. glass ceramic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/20—Dielectrics using combinations of dielectrics from more than one of groups H01G4/02 - H01G4/06
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/096—Vertically aligned vias, holes or stacked vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Glass Compositions (AREA)
Abstract
Description
以下に、この発明に係るセラミック基板用組成物に関して、実験例に基づき、より具体的に説明する。
結晶化度は、以下のように求めた。
LogIR(絶縁抵抗)は、層間絶縁信頼性の指標となるべきもので、以下のように求めた。
層間距離は、図2に示したセラミック基板11におけるパッド電極16とパッド電極17とで挟まれたセラミック層12の厚みであり、以下のように求めた。
εr(比誘電率)は、以下のように求めた。
Qは、以下のように求めた。
複数のグリーンシートを積層してなるもので、導体部を形成しない生の積層体を、最高温度を1000℃以下とする所定の温度プロファイルで焼成することによって、長さ50mm、幅4mm、厚み0.5mmのセラミック基板を作製した。このセラミック基板を試料として、JIS規格(JIS R−1601)に準じて、オートグラフを用いて抗折強度(3点曲げ)を測定した。なお、JIS規格と異なる点は、試料厚みがJIS規格とは異なることと、および試料の表面やエッジ部の研磨処理を行なわなかったことである。
2 セラミック基板
3 導体部
4 セラミック層
上述した結晶化度調整剤がウォラストナイト結晶物であるとき、その添加量は、ホウケイ酸系ガラス粉末およびセラミック粉末の合計量100重量部に対して、0.005〜0.1重量部であり、結晶化度調整剤がアノーサイト結晶物であるとき、その添加量は、ホウケイ酸系ガラス粉末およびセラミック粉末の合計量100重量部に対して、0.03〜0.2重量部であることが好ましい。
Claims (3)
- 4〜8重量%のB2O3、38〜44重量%のSiO2、3〜10重量%のAl2O3、および40〜48重量%のMO(ただし、MOは、CaO、MgOおよびBaOから選ばれた少なくとも1種である。)を含むホウケイ酸系ガラス粉末とセラミック粉末とを混合したものであり、前記ホウケイ酸系ガラス粉末を50〜56重量%、および前記セラミック粉末を50〜44重量%それぞれ含有し、前記セラミック粉末は、平均粒径D50が0.4〜1.5μmである、セラミック基板用組成物。
- さらに結晶化度調整剤を含む、請求項1に記載のセラミック基板用組成物。
- 請求項1または2に記載のセラミック基板用組成物を成形し焼成して得られたセラミック基板と、前記セラミック基板に関連して形成された導体部とを備える、セラミック回路部品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013118433 | 2013-06-05 | ||
JP2013118433 | 2013-06-05 | ||
PCT/JP2014/063274 WO2014196348A1 (ja) | 2013-06-05 | 2014-05-20 | セラミック基板用組成物およびセラミック回路部品 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2014196348A1 true JPWO2014196348A1 (ja) | 2017-02-23 |
JP6103051B2 JP6103051B2 (ja) | 2017-03-29 |
Family
ID=52008001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015521372A Active JP6103051B2 (ja) | 2013-06-05 | 2014-05-20 | セラミック基板用組成物およびセラミック回路部品 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9607765B2 (ja) |
JP (1) | JP6103051B2 (ja) |
WO (1) | WO2014196348A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018105333A1 (ja) * | 2016-12-08 | 2018-06-14 | 株式会社村田製作所 | 多層セラミック基板及び電子装置 |
JP7119583B2 (ja) * | 2018-05-29 | 2022-08-17 | Tdk株式会社 | プリント配線板およびその製造方法 |
CN112500172B (zh) * | 2020-05-11 | 2021-10-01 | 深圳前海发维新材料科技有限公司 | 一种高软化点、低热膨胀系数、高耐磨、低热导率的玻璃复合材料在发动机气轮机中的应用 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58104042A (ja) * | 1981-11-23 | 1983-06-21 | コ−ニング・グラス・ワ−クス | 金属基体に使用されるガラスセラミツクとその製造方法 |
JPS63307141A (ja) * | 1987-06-09 | 1988-12-14 | Asahi Glass Co Ltd | 絶縁層用ガラス組成物 |
JP2000351668A (ja) * | 1999-06-08 | 2000-12-19 | Murata Mfg Co Ltd | セラミック基板用組成物およびセラミック回路部品 |
JP2001114556A (ja) * | 1999-10-20 | 2001-04-24 | Sumitomo Metal Electronics Devices Inc | ガラスセラミック基板の製造方法 |
JP2005298259A (ja) * | 2004-04-09 | 2005-10-27 | Murata Mfg Co Ltd | ガラスセラミック原料組成物、ガラスセラミック焼結体およびガラスセラミック多層基板 |
JP2010052970A (ja) * | 2008-08-27 | 2010-03-11 | Murata Mfg Co Ltd | セラミック組成物、セラミックグリーンシート、及びセラミック電子部品 |
WO2011021484A1 (ja) * | 2009-08-18 | 2011-02-24 | 株式会社村田製作所 | ガラスセラミック組成物、セラミックグリーンシートおよび多層セラミック基板 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4687749A (en) * | 1986-10-24 | 1987-08-18 | Corning Glass Works | Refractory glass-ceramics containing enstatite |
JPH11335162A (ja) * | 1998-05-25 | 1999-12-07 | Murata Mfg Co Ltd | セラミック基板用組成物およびセラミック回路部品 |
US6835682B2 (en) * | 2002-06-04 | 2004-12-28 | E. I. Du Pont De Nemours And Company | High thermal expansion glass and tape composition |
JP5263112B2 (ja) * | 2009-10-07 | 2013-08-14 | 旭硝子株式会社 | セラミックス原料組成物 |
JP5928847B2 (ja) * | 2011-12-27 | 2016-06-01 | 株式会社村田製作所 | 多層セラミック基板およびそれを用いた電子部品 |
-
2014
- 2014-05-20 WO PCT/JP2014/063274 patent/WO2014196348A1/ja active Application Filing
- 2014-05-20 JP JP2015521372A patent/JP6103051B2/ja active Active
-
2015
- 2015-11-30 US US14/953,976 patent/US9607765B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58104042A (ja) * | 1981-11-23 | 1983-06-21 | コ−ニング・グラス・ワ−クス | 金属基体に使用されるガラスセラミツクとその製造方法 |
JPS63307141A (ja) * | 1987-06-09 | 1988-12-14 | Asahi Glass Co Ltd | 絶縁層用ガラス組成物 |
JP2000351668A (ja) * | 1999-06-08 | 2000-12-19 | Murata Mfg Co Ltd | セラミック基板用組成物およびセラミック回路部品 |
JP2001114556A (ja) * | 1999-10-20 | 2001-04-24 | Sumitomo Metal Electronics Devices Inc | ガラスセラミック基板の製造方法 |
JP2005298259A (ja) * | 2004-04-09 | 2005-10-27 | Murata Mfg Co Ltd | ガラスセラミック原料組成物、ガラスセラミック焼結体およびガラスセラミック多層基板 |
JP2010052970A (ja) * | 2008-08-27 | 2010-03-11 | Murata Mfg Co Ltd | セラミック組成物、セラミックグリーンシート、及びセラミック電子部品 |
WO2011021484A1 (ja) * | 2009-08-18 | 2011-02-24 | 株式会社村田製作所 | ガラスセラミック組成物、セラミックグリーンシートおよび多層セラミック基板 |
Also Published As
Publication number | Publication date |
---|---|
US20160086732A1 (en) | 2016-03-24 |
JP6103051B2 (ja) | 2017-03-29 |
US9607765B2 (en) | 2017-03-28 |
WO2014196348A1 (ja) | 2014-12-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2007039325A (ja) | 低温焼結用ガラス組成物、ガラスフリット、誘電体組成物及びこれを用いた積層セラミックコンデンサー | |
JP2006290719A (ja) | 誘電体用ガラスフリット、誘電体磁器組成物、積層セラミックキャパシタ及びその製造方法 | |
KR102174577B1 (ko) | 세라믹 배선 기판, 세라믹 배선 기판용 세라믹 그린 시트 및 세라믹 배선 기판용 유리 세라믹스 분말 | |
JP6103051B2 (ja) | セラミック基板用組成物およびセラミック回路部品 | |
JP2006012687A (ja) | 低温焼成基板材料及びそれを用いた多層配線基板 | |
JP4772071B2 (ja) | グリーンシート用セラミック粉末及び低温焼成多層セラミック基板 | |
JP2010052953A (ja) | 配線基板用ガラスセラミックス組成物及びガラスセラミックス焼結体 | |
JP2006236921A (ja) | 導体ペーストおよびこれを用いたセラミック配線基板とその製造方法 | |
JP2019161219A (ja) | ガラスセラミック誘電体 | |
JP2008085034A (ja) | 配線基板 | |
WO2009119433A1 (ja) | 無鉛ガラス及び無鉛ガラスセラミックス用組成物 | |
JP2010034176A (ja) | 多層配線基板およびその製造方法 | |
JP4880022B2 (ja) | 低温焼成用低誘電率セラミック誘電体組成物及び低誘電率セラミック誘電体 | |
JPWO2020129858A1 (ja) | 積層体、電子部品及び積層体の製造方法 | |
JP6048665B2 (ja) | ガラスセラミックス用材料及びガラスセラミックス | |
JP4373198B2 (ja) | 低温焼成基板用無鉛ガラスセラミックス組成物 | |
JPH1160266A (ja) | ガラス及びガラスセラミック材料 | |
JP4442077B2 (ja) | 高周波部品用磁器組成物 | |
JP4872990B2 (ja) | グリーンシート用セラミック粉末および多層セラミック基板並びに多層セラミック基板の製造方法 | |
JP4345458B2 (ja) | ガラスセラミック基板 | |
JP4534413B2 (ja) | 高周波部品用低誘電率磁器組成物の製造方法 | |
JP2009181987A (ja) | セラミック多層基板の製造方法 | |
JP5533120B2 (ja) | 多層セラミック基板の製造方法 | |
TW202229876A (zh) | 陶瓷基板、陶瓷基板用生片及陶瓷基板用複合粉末 | |
JP4066631B2 (ja) | 低温焼成セラミック材料及び低温焼成セラミック基板 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161022 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170106 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170131 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170213 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6103051 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |