JPWO2014156409A1 - 誘電体磁器組成物及び複合セラミックス構造体 - Google Patents
誘電体磁器組成物及び複合セラミックス構造体 Download PDFInfo
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Abstract
Description
本発明の誘電体磁器組成物は、基本組成(SrTiO3)(1-X)(BaZrO3)Xで表されるものであり、SrTiO3とBaZrO3との固溶体であることが好ましい。式中、Xは、0.63≦X≦0.95を満たす。こうしたものでは、例えば30kV/mm以上などの高い耐電圧を得ることができる。このうち、Xの下限値は0.67が好ましく0.75がより好ましい。上限値は0.90が好ましく、0.85がより好ましい。こうした範囲では、耐電圧をより高めることができるからである。
原料混合工程では、Sr源と、Ti源と、Ba源と、Zr源とを、基本組成(SrTiO3)(1-X)(BaZrO3)X(式中、Xは0.63≦X≦0.95を満たす)のうちの所望の比率となるように混合して、混合原料を得る。Sr源、Ti源、Ba源、Zr源は特に限定されるものではなく、金属単体としてもよいし、これらのうちの1以上を含む合金としてもよいし、これらのうちの1以上を含む酸化物や水酸化物、炭酸塩、硝酸塩、硫酸塩などとしてもよい。このうち、Sr源及びTi源としてSrTiO3を用い、Ba源及びZr源としてBaZrO3を用いると、比較的容易に基本組成(SrTiO3)(1-X)(BaZrO3)Xで表される誘電体磁器組成物を得られるため、好ましい。混合方法は、特に限定されるものでなく、乾式混合としてもよいし、溶媒存在下での湿式混合としてもよい。このとき、乳鉢やボールミルなどを用いて粉砕混合することが好ましい。粉砕混合することで、原料がより均一に混合されるため、全体にわたって均一な組織を有する誘電体磁器組成物が得られるからである。
成形工程では、原料混合工程で得られた混合原料を所望の形状に成形して、成形体を得る。成形方法としては、一軸プレスや、静水圧プレス、押出成形、射出成形などが挙げられる。
焼成工程では、成形工程で得られた成形体を焼成して、緻密化させる。焼成雰囲気は、酸化性雰囲気としてもよいし、還元性雰囲気としてもよいし、不活性雰囲気としてもよいし、減圧雰囲気としてもよいが、金属複合酸化物を作製する観点から、酸化性雰囲気下が好ましい。酸化性雰囲気としては、例えば、大気雰囲気や、酸素雰囲気などが挙げられる。焼成温度としては1400℃以上1600℃以下が好ましい。1400℃以上であれば、緻密化が十分に進み、相対密度が高くなるため、誘電体磁器組成物の耐電圧や比誘電率をより高めることができる。また、1600℃以下であれば、結晶粒が大きくなりすぎないため、耐電圧をより高めることができる。なお、焼成の際に加圧を行ってもよい。
本発明のセラミックス構造体は、上述した誘電体磁器組成物とアルミナ(Al2O3)とが一体化されたものである。一体化の方法は特に限定されるものではなく、誘電体磁器組成物とアルミナとが直接接合されたものとしてもよいし、接合剤を介して接合されたものとしてもよい。
原料として、チタン酸ストロンチウム(SrTiO3,富士チタン工業製,純度≧97%)と、ジルコン酸バリウム(BaZrO3,高純度化学研究所製、純度≧98%)とを用意した。用意したチタン酸ストロンチウムとジルコン酸バリウムとを表1に記載のモル比で秤量して混合し、混合原料を得た。続いて、溶媒としてのイソプロピルアルコール(IPA)に混合原料を加え、直径10mmのZrO2玉石を利用したボールミルにより湿式混合した。得られた粉体を#100篩に通したあと、窒素乾燥機にて一夜間乾燥した。こうして得られた乾燥後の粉体のうちの100gを、100kg/cm2のプレス圧により直径65mmの形状に金型成形して成形体を得た。さらに、得られた成形体を、3000kg/cm2のプレス圧、30秒の条件でCIP処理(静水圧処理)を行った。最後に、大気雰囲気下、1500℃で2時間焼成し、実験例1〜10の焼成体を得た。
JIS−R1634に従い、純水を媒体としたアルキメデス法によって各焼成体のかさ密度を測定した。また、各焼成体を乳鉢で粉砕して得られた粉砕試料を用いて、乾式自動密度計(micrometrics社製,アキュピック1330)にて、各焼成体の真密度を測定した。測定したかさ密度を、測定した真密度で除することにより、相対密度を導出した。
まず、各焼成体の表面を研磨した。続いて、走査型電子顕微鏡(SEM)により研磨面を観察し、SEM画像を得た。得られたSEM画像に直線を引き、その直線上にある結晶の数を数え、直線の長さを結晶の数で除することにより、平均結晶粒径を導出した。なお、SEM観察は、フィリップス社製XL30を用い、加速電圧20kV、スポットサイズ4.0、倍率1万倍の条件にて行った。観察した視野数は各焼成体につき任意に選定した5視野であった。
まず、各焼成体から3×3×20mmの角形状の試験片を切り出した。続いて、試験片を縦型熱膨張計(Thermo plus EVO TMA8310,RIGAKU製)にセットし、熱膨張係数を測定した。測定は、アルミナを参照物質とし、10℃/分で昇温し、40℃以上1000℃以下の範囲で行った。熱膨張係数は、40℃を基準温度とし、1000℃での値とした。
まず、各焼成体からΦ50mm×1mmの円板形状の試験片を切り出した。続いて、JIS−C2141に従い、インピーダンスアナライザー(Wayne Kerr Electronics社製,6440B)を用いて測定した。
まず、各焼成体からΦ50mm×10mmの円板の板面にΦ10mmの窪みをつけた試験片を切り出した。続いて、国際規格IEC60672−2に従い、耐電圧を測定した。なお、この耐電圧の測定後の試験片は、絶縁破壊により穴があいていた。
まず、各焼成体から10×10×1mmの角形状の試験片を切り出した。また、アルミナ緻密体を用意し、10×10×1mmの角形状に切り出した。両者をガラスフリット(熱膨張係数8ppm/K)にて接着し、大気雰囲気下、950℃で2時間焼成した。焼成後、ガラス層やガラス層と試験片との接合界面にクラックが存在するか否かを、光学顕微鏡にて確認した。
表1には、実験例1〜10の組成、相対密度、平均結晶粒径、熱膨張係数、比誘電率、耐電圧、接合時のクラック有無を示した。図1には、Xの値と耐電圧との関係を表すグラフを示した。表1及び図1より、基本組成(SrTiO3)(1-X)(BaZrO3)XにおけるXが0.63≦X≦0.95を満たすものでは、30kV/mmを超える高い耐電圧が得られることが分かった。このうち、0.67≦X≦0.90を満たすものでは耐電圧が36kV/mm以上となるため好ましく、0.75≦X≦0.85を満たすものでは耐電圧が39kV/mm以上となるためより好ましいことがわかった。
Claims (9)
- 基本組成(SrTiO3)(1-X)(BaZrO3)X(式中、Xは0.63≦X≦0.95を満たす)で表される、誘電体磁器組成物。
- 前記誘電体磁器組成物は、SrTiO3とBaZrO3との固溶体である、請求項1に記載の誘電体磁器組成物。
- 前記Xは、0.67≦X≦0.90を満たす、請求項1又は2に記載の誘電体磁器組成物。
- 平均結晶粒径が4μm以下である、請求項1〜3のいずれか1項に記載の誘電体磁器組成物。
- 相対密度が97%以上である、請求項1〜4のいずれか1項に記載の誘電体磁器組成物。
- 耐電圧が30kV/mm以上である、請求項1〜5のいずれか1項に記載の誘電体磁器組成物。
- 比誘電率が44以上180以下である、請求項1〜6のいずれか1項に記載の誘電体磁器組成物。
- 熱膨張係数が7.7ppm/K以上9.0ppm/K以下である、請求項1〜7のいずれか1項に記載の誘電体磁器組成物。
- 請求項1〜8のいずれか1項に記載の誘電体磁器組成物とアルミナとが一体化された複合セラミックス構造体。
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JPH01103803A (ja) * | 1987-06-27 | 1989-04-20 | Aisin Seiki Co Ltd | 感温・感湿センサー素子およびその製造方法 |
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