JPWO2013035726A1 - 測定方法および測定装置 - Google Patents
測定方法および測定装置 Download PDFInfo
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- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8883—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges involving the calculation of gauges, generating models
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Abstract
Description
10 分光装置
11 光源
20 制御部
21 事前測定DB
22 演算装置
23 記憶装置
30 被検体
また、本発明に係る測定方法は、上記発明において、前記主成分得点のうちのいずれか1つに基づいて表面性状を推定する。
Claims (9)
- 被検体の表面に形成された被膜の膜厚および組成を測定する測定方法であって、
事前に既知の被検体の分光データを測定する事前測定ステップと、
前記事前測定ステップで測定された分光データを基底分解して該分光データの特徴量を抽出し、当該特徴量と前記既知の被検体の表面に形成された被膜の膜厚および組成との関係を算出する事前算出ステップと、
前記被検体の分光データを測定する測定ステップと、
前記測定ステップで測定された被検体の分光データを基底分解して該分光データの特徴量を抽出し、前記事前算出ステップで算出された特徴量と被膜の膜厚および組成との関係に基づいて、前記被検体の表面に形成された被膜の膜厚および組成を算出する算出ステップと、
を有する測定方法。 - 前記基底分解に主成分分析を適用する請求項1に記載の測定方法。
- 前記算出ステップは、前記被検体の分光データから算出された単一種または複数種の主成分得点または残差に基づいて、前記被検体の表面に形成された被膜の膜厚および組成を算出し、表面性状を推定する請求項2に記載の測定方法。
- 前記被検体は鉄鋼製品であり、前記被膜は酸化膜である請求項1〜3のいずれか1項に記載の測定方法。
- 前記酸化膜は、マグネタイト、ヘマタイト、ウスタイトのうちの少なくとも1種類を含んで組成される請求項1〜4のいずれか1項に記載の測定方法。
- 前記分光データは、10〜25μmの波長の赤外線に対する反射率または吸光度である請求項1〜5のいずれか1項に記載の測定方法。
- 被検体の表面に形成された被膜の膜厚および組成を測定する測定装置であって、
事前に既知の被検体の分光データを測定する事前測定手段と、
前記事前測定手段によって測定された分光データを基底分解して該分光データの特徴量を抽出し、当該特徴量と前記既知の被検体の表面に形成された被膜の膜厚および組成との関係を算出する事前算出手段と、
前記被検体の分光データを測定する測定手段と、
前記測定手段により測定された被検体の分光データを基底分解して該分光データの特徴量を抽出し、前記事前算出手段によって算出された特徴量と被膜の膜厚および組成との関係に基づいて、前記被検体の表面に形成された被膜の膜厚および組成を算出する算出手段と、
を備える測定装置。 - 被検体の表面に形成された被膜の組成を測定する測定方法であって、
事前に既知の被検体の分光データを測定する事前測定ステップと、
前記事前測定ステップで測定された分光データを基底分解して該分光データの特徴量を抽出し、当該特徴量と前記既知の被検体の表面に形成された被膜の組成との関係を算出する事前算出ステップと、
前記被検体の分光データを測定する測定ステップと、
前記測定ステップで測定された被検体の分光データを基底分解して該分光データの特徴量を抽出し、前記事前算出ステップで算出された特徴量と被膜の組成との関係に基づいて、前記被検体の表面に形成された被膜の組成を算出する算出ステップと、
を有する測定方法。 - 被検体の表面に形成された被膜の組成を測定する測定装置であって、
事前に既知の被検体の分光データを測定する事前測定手段と、
前記事前測定手段によって測定された分光データを基底分解して該分光データの特徴量を抽出し、当該特徴量と前記既知の被検体の表面に形成された被膜の組成との関係を算出する事前算出手段と、
前記被検体の分光データを測定する測定手段と、
前記測定手段により測定された被検体の分光データを基底分解して該分光データの特徴量を抽出し、前記事前算出手段によって算出された特徴量と被膜の組成との関係に基づいて、前記被検体の表面に形成された被膜の組成を算出する算出手段と、
を備える測定装置。
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JP (1) | JP5817831B2 (ja) |
KR (1) | KR20140054165A (ja) |
CN (1) | CN103765158B (ja) |
WO (1) | WO2013035726A1 (ja) |
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US10215554B2 (en) | 2015-04-17 | 2019-02-26 | Industry-University Cooperation Foundation Hanyang University | Apparatus and method for non-contact sample analyzing using terahertz wave |
DE102015221697B3 (de) * | 2015-11-05 | 2017-02-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur Bestimmung der Oberflächenbeschaffenheit von Bauteiloberflächen |
CN105627936A (zh) * | 2015-12-21 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | 基于od测量的金属膜厚度快速测量方法 |
CN105466368A (zh) * | 2016-01-01 | 2016-04-06 | 广州兴森快捷电路科技有限公司 | 一种镍基底表面处理可焊性的分析方法 |
EP3617693B1 (en) * | 2017-04-25 | 2021-11-24 | Nippon Steel Corporation | Scale composition determining system, scale composition determining method, and computer program |
CN114235970B (zh) * | 2021-12-20 | 2024-04-23 | 西安科技大学 | 一种自适应超声重叠回波分离方法 |
Citations (7)
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JPH01132936A (ja) * | 1987-11-18 | 1989-05-25 | Kawasaki Steel Corp | 被膜の分析方法及び装置 |
JPH07270130A (ja) * | 1994-03-31 | 1995-10-20 | Nippon Steel Corp | 酸化膜厚さ測定方法 |
JP2000131229A (ja) * | 1998-10-23 | 2000-05-12 | Nireco Corp | 鉄亜鉛合金メッキ鋼板の表層Fe量測定方法 |
JP2001203250A (ja) * | 2000-01-18 | 2001-07-27 | Fuji Electric Co Ltd | 膜厚管理方法 |
JP2008180618A (ja) * | 2007-01-25 | 2008-08-07 | Toray Ind Inc | 表面欠点検出装置 |
JP2009508571A (ja) * | 2005-09-16 | 2009-03-05 | ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン | 検体の表面直下の組成を計測する方法及びシステム |
JP2009186333A (ja) * | 2008-02-06 | 2009-08-20 | Nippon Steel Corp | 酸化膜厚測定方法及び酸化膜厚測定装置 |
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CN2151439Y (zh) * | 1992-09-29 | 1993-12-29 | 清华大学 | 润滑介质膜厚度测量仪 |
US6504618B2 (en) * | 2001-03-21 | 2003-01-07 | Rudolph Technologies, Inc. | Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system |
JP5294938B2 (ja) * | 2009-03-27 | 2013-09-18 | Hoya株式会社 | 膜厚測定方法およびガラス光学素子の製造方法 |
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2012
- 2012-09-05 CN CN201280041663.7A patent/CN103765158B/zh not_active Expired - Fee Related
- 2012-09-05 KR KR1020147005610A patent/KR20140054165A/ko not_active Application Discontinuation
- 2012-09-05 JP JP2013532620A patent/JP5817831B2/ja not_active Expired - Fee Related
- 2012-09-05 WO PCT/JP2012/072573 patent/WO2013035726A1/ja active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01132936A (ja) * | 1987-11-18 | 1989-05-25 | Kawasaki Steel Corp | 被膜の分析方法及び装置 |
JPH07270130A (ja) * | 1994-03-31 | 1995-10-20 | Nippon Steel Corp | 酸化膜厚さ測定方法 |
JP2000131229A (ja) * | 1998-10-23 | 2000-05-12 | Nireco Corp | 鉄亜鉛合金メッキ鋼板の表層Fe量測定方法 |
JP2001203250A (ja) * | 2000-01-18 | 2001-07-27 | Fuji Electric Co Ltd | 膜厚管理方法 |
JP2009508571A (ja) * | 2005-09-16 | 2009-03-05 | ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン | 検体の表面直下の組成を計測する方法及びシステム |
JP2008180618A (ja) * | 2007-01-25 | 2008-08-07 | Toray Ind Inc | 表面欠点検出装置 |
JP2009186333A (ja) * | 2008-02-06 | 2009-08-20 | Nippon Steel Corp | 酸化膜厚測定方法及び酸化膜厚測定装置 |
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JP5817831B2 (ja) | 2015-11-18 |
CN103765158A (zh) | 2014-04-30 |
CN103765158B (zh) | 2016-09-07 |
KR20140054165A (ko) | 2014-05-08 |
WO2013035726A1 (ja) | 2013-03-14 |
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