JPWO2006030854A1 - Polishing method and polishing apparatus for complex shapes - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform fluid polishing without contact with an object to be polished, and to finish the entire surface into a mirror surface even if the object to be polished is a complex shape having irregularities such as grooves, and polishing without stress even for an object having low strength Mirror surface polishing method and mirror surface polishing apparatus for complex shape body capable of performing polishing [Solution] A polishing object (3) is fixed to the bottom of a fluidized tank (2), and a polishing tool (4) is attached to the polishing object. The tank is made to face non-contact, and the tank is filled with the magnetic polishing liquid (1) so that both are immersed. Nonmagnetic abrasive grains are mixed in the magnetic polishing liquid, and α-cellulose or the like is mixed as a thickener. The polishing tool is provided with a permanent magnet (41) and is rotated by a rotating means (5). The fluid tank is vibrated in an appropriate manner by the vibration means (6) linked thereto, and the magnetic polishing liquid in the tank is agitated. The magnetic cluster generated in the polishing liquid by the magnetic field of the permanent magnet presses the abrasive grains in the liquid against the surface of the object to be polished, and the polishing liquid flows, so that the abrasive grains move around even in a concave portion having a complicated shape.

Description

  The present invention relates to a polishing method and a polishing apparatus for complex shaped bodies having complicated uneven shapes such as precision machine parts and molds. More specifically, the present invention relates to a non-polishing tool for complex shaped bodies to be polished. The present invention relates to an improvement in a technique of facing a contact and performing a fluid polishing in the presence of a magnetic polishing liquid around these contacts.

  As a technique for finishing the surface to be polished into a mirror surface, generally, lapping or lapping is performed in which an abrasive in which loose abrasive grains are dispersed is rubbed between the object to be polished and a lapping surface. Polishing is performed by using a finer abrasive grain and performing a rubbing operation with a polishing object with a soft tool called a polishing pad.

  Non-contact polishing techniques include float polishing. This float polishing involves rotating the tin surface plate and the object to be polished simultaneously in a polishing liquid in which a fine abrasive is turbid, so that the object to be polished floats slightly due to the fluid pressure of the polishing liquid interposed between them. It is a technology that advances the processing with the abrasive in the liquid.

  However, such conventional mirror polishing techniques have the following problems. Lapping and polishing are processing methods in which a tool such as a lapping plate or a polishing pad is applied to the object to be polished to apply a force, and thus a large stress is generated on the object to be polished. For this reason, it is difficult to polish an object to be polished with low strength, and there is a problem that a work-affected layer is formed on the object to be polished if the object is polished.

  In addition, lapping and polishing are performed by bringing a tool into contact with the object to be polished, so if the object to be polished has a complicated shape (complex shape body) having irregularities such as a groove, a complicated part such as the bottom of the groove is polished. Can not. As a result, there is a problem in that the entire surface cannot be mirror-finished, and unevenness is caused partially. The same applies to the above-described float policing. Float polishing is polishing that floats the object to be polished in a non-contact manner, but the point of transferring the flatness of the tin surface plate to the object to be polished is the same as contact polishing, and it cannot cope with complicated shapes. The problem with such complex shaped bodies is not limited to mirror polishing, but the same can be said for removal of burrs, removal of coatings, and other polishing.

  The present invention solves the above-mentioned problems, and its purpose is to perform fluid polishing in a non-contact manner with respect to the object to be polished, and to polish the entire surface even if the object to be polished is a complex shape having irregularities such as grooves. An object of the present invention is to provide a polishing method and a polishing apparatus for a complex-shaped body that can perform polishing without stress even on a polishing object having a low strength.

  In order to achieve the above-described object, the polishing method according to the present invention makes a polishing tool face non-contact with a polishing object that is a complex shape body, and makes a magnetic polishing liquid exist around the polishing tool to perform fluid polishing. A method of polishing a complex shape body, wherein the polishing tool is provided with a magnetic field generating source for generating a magnetic field, is rotated by a rotating means, and faces the polishing tool to support the object to be polished. The magnetic polishing liquid is filled in the periphery in a soaked state, nonmagnetic abrasive grains are mixed in the magnetic polishing liquid, the polishing tool is rotated, and the magnetic polishing liquid is temporally steady by the magnetic field generation source. The magnetic polishing liquid was stirred by a stirring means and fluid polishing was performed in a non-contact state by applying a magnetic field or a variable magnetic field.

  The polishing apparatus according to the present invention includes a rotating means for rotating the output shaft, a polishing tool having a magnetic field generating source for generating a magnetic field such as a permanent magnet and an electromagnetic coil, and detachably attached to the tip of the output shaft. A fluid tank that fills the magnetic polishing liquid in a state where the object to be polished is supported while facing the polishing tool, and the both are immersed, and a vibration means that provides vibrations of appropriate operation in conjunction with the fluid tank, The magnetic polishing liquid is mixed with non-magnetic abrasive grains, and the polishing tool rotates at a predetermined interval without being in contact with the object to be polished, and is constantly in time with the magnetic polishing liquid by the magnetic field generation source. Alternatively, a variable magnetic field is applied, and the fluid tank is vibrated to stir the magnetic polishing liquid in the tank.

  The polishing tool may be configured such that a permanent magnet is concentrically embedded in a cylindrical body made of a non-magnetic material, and a magnetic field is generated by the permanent magnet. As another configuration, the polishing tool may be configured such that a plurality of annular permanent magnets are concentrically embedded in a cylindrical body made of a nonmagnetic material, and a magnetic part and a nonmagnetic part are alternately and concentrically repeated. it can. Of course, the polishing tool may take other configurations.

The magnetic polishing liquid used in each of the inventions described above is preferably 10 to 95 wt% of ferromagnetic particles having a particle diameter of 1 to 80 μm in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. To the dispersed fluid, a composite fluid in which spherical magnetite particles having a particle diameter of 10 to 50 nm are uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulation properties is preferably mixed to 5 to 90 wt%. A nonmagnetic abrasive having a particle diameter of 0.01 to 100 μm may be mixed, and a fibrous material such as α cellulose or a resin such as polyvinyl alcohol may be further mixed as a thickener.

  Accordingly, in the present invention, the rotating polishing tool has a magnetic field generation source, and therefore, a magnetic field acts between the polishing tool and the object to be polished, and magnetic clusters are generated in the magnetic polishing liquid. Specifically, in the compositions shown in claims 2 and 6, a large number of ferromagnetic particles (for example, iron particles) and magnetite particles are aggregated by a magnetic attractive force to form a magnetic cluster. The magnetic cluster is along the magnetic flux. Accordingly, a large number of magnetic clusters are arranged in a needle shape in opposition to the object to be polished, whereby the abrasive grains present in the magnetic polishing liquid are pressed against the surface of the object to be polished. Moreover, since there are abrasive grains entangled in the magnetic cluster, they are also pressed against the surface of the object to be polished.

  Since the polishing tool rotates in this state, the abrasive grains move while contacting the surface of the object to be polished by relative movement with the object to be polished. For this reason, an abrasive grain grinds the convex part of the surface of grinding | polishing object, and a smoother surface is obtained. Therefore, even if burrs exist on the object to be polished, such burrs are also removed.

  In addition, since the magnetic polishing liquid is agitated by moving the fluid tank, the magnetic polishing liquid is exchanged even in the concave portion to be polished, and the abrasive grains move around in the magnetic polishing liquid, so that the polishing action is performed and the polishing proceeds.

  Furthermore, there are magnetic clusters that jump off the magnetic field of the magnetic field generation source (permanent magnet). These are dispersed in the magnetic polishing liquid and eventually disappear, but the shape is maintained for a while. Therefore, the magnetic cluster that has jumped out of the magnetic field wraps around each part such as a side portion to be polished due to the flow motion of the magnetic polishing liquid. Then, the magnetic cluster that wraps around hits the part and performs grinding, or moves the abrasive grains existing in the vicinity at the part. As a result, polishing proceeds even on the side that does not face the polishing tool. Of course, the floating magnetic cluster also moves around the concave portion to be polished and acts as a grinding, and polishing proceeds.

  That is, a part of the magnetic cluster generated by agglomeration by the magnetic field of the magnetic field generation source flows away from the magnetic field along with the rotation operation of the polishing bite and the vibration operation of the flow tank, enters the concave portion to be polished, and Grinding action such as hitting a part that does not face the polishing bite such as the side part or moving and hitting a nearby abrasive grain, also polishes even a concave part having a complicated shape or a side part that does not face the polishing bite.

  In the composition described above, since the magnetic polishing liquid contains a thickener such as α-cellulose, the added thickener acts to hold the magnetic cluster, and as a result, a large number of abrasive grains are polished. The situation of contacting the surface can be promoted, and polishing can be performed with high efficiency.

  In the polishing of complex shaped bodies according to the present invention, non-contact fluid polishing can be performed on the object to be polished by the magnetic clusters generated in the magnetic polishing liquid, and the magnetic polishing liquid is agitated by the stirring means. The action can be promoted, and even if the object to be polished is a complex shape having irregularities such as grooves, the entire surface can be polished evenly. In addition, since the polishing of the present invention is non-contact fluid polishing, polishing can be performed without stress even on a polishing object having low strength. And by performing such grinding | polishing, a burr | flash can be removed or it can finish to a mirror surface.

    The present invention will be described in more detail with reference to the accompanying drawings. FIG. 1 shows a preferred embodiment of the present invention. In the present embodiment, the polishing apparatus (mirror polishing apparatus) has a fluid tank 2 filled with a magnetic polishing liquid 1, and a polishing tool 4 with respect to an object to be polished (sample 3) fixed to the bottom of the fluid tank 2. To face non-contact. The polishing tool 4 includes a magnetic field generation source that generates a magnetic field, such as a permanent magnet, and is rotated by a drive motor 5. A vibrating table 6 is linked to the fluidized tank 2 so as to vibrate appropriately. The polishing apparatus is configured to perform fluid polishing by the action of magnetic clusters generated in the magnetic polishing liquid 1.

  The flow tank 2 fixes the sample 3 on the bottom surface, and is attached to the base 9 of the traverse device 8 with the spring screw 7, and the traverse device 8 is attached to the vibration table 6. A contact-type load cell 10 is arranged at the site of the spring screw 7. By moving the base 9 of the traverse device 8, the vertical position of the fluidized tank 2 is initially set, and an appropriate vibration operation is performed by the vibration table 6, for example, a figure 8 is drawn on the surface opposite to the rotating shaft of the polishing tool 4. A dynamic operation is given, and the operation state is detected by the load cell 10.

The magnetic polishing liquid 1 is mixed with nonmagnetic abrasive grains. Specifically, particles are dispersed in a fluid in which 10 to 95 wt% of ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. A non-magnetic particle having a particle diameter of 0.01 to 100 μm is mixed with a composite fluid in which 5 to 90 wt% of a fluid in which spherical magnetite particles having a diameter of 10 to 50 nm are uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulation properties is mixed. Abrasive grains are mixed, and a fibrous substance such as α cellulose or a resin such as polyvinyl alcohol is further mixed as a thickener.

As shown in FIGS. 2 to 4, the polishing tool 4 employs a configuration in which a permanent magnet 41 is concentrically embedded in a cylindrical body 40 made of a nonmagnetic material. That is, in the structure shown in FIG. 2, only one cylindrical permanent magnet 41 is embedded in the center of the cylindrical body 40, and regarding the diameter w2 of the cylindrical body 40 and the diameter w1 of the permanent magnet 41,
1.0 ≦ w2 / w1 ≦ 3.0
It is set to.

In the structure shown in FIG. 3, only one cylindrical permanent magnet 41 is embedded in the center of the cylindrical body 40, and the bite surface is recessed toward the permanent magnet 41 at the center. Regarding the diameter w1 of the permanent magnet 41, the depth h of the recess, and the width w3 of the recess,
w2 / w1 = 3
w3 / h = 4
w3 = (w2-w1) / 2
1.0 ≦ w2 / w1 ≦ 3.0
0.1 ≦ h / w3 ≦ 10.0
It is set to.

  Further, as shown in FIGS. 4A and 4B, the polishing tool 4 includes a cylindrical body 40 made of a non-magnetic material and a plurality of annular permanent magnets 41 concentrically embedded therein. It is also possible to adopt a configuration in which these are repeated concentrically and alternately.

  As the drive motor 5, for example, a rotary drive mechanism such as a drilling machine, a lathe, an NC lathe, or a milling machine can be used, and the shaft of the polishing tool 4 is attached to the chuck portion 11 connected to the output shaft so that it can be attached and detached. ing.

  The vibration table 6 has a drive source (not shown) and adopts a configuration in which the fluid tank 4 is moved on a plane opposite to the rotation axis of the polishing tool 4. A plurality of modes are set for the vibration operation, and they are appropriately selected or combined. That is, the vibration operation of the vibration table 6 is a simple rotation operation centered on a fixed point, a rotation operation that draws a figure 8, or a reciprocation in a fixed direction on the plane in the plane opposite to the rotation axis of the polishing tool 4. There are a plurality of vibration modes such as a vibrating operation, and these are appropriately selected or combined in the polishing operation.

  According to such a configuration, as shown in FIG. 5, a magnetic flux is generated between the polishing tool 4 and the sample 3 to generate a magnetic cluster 12 in the magnetic polishing liquid 1. That is, since the permanent magnet 41 is embedded in the polishing tool 4, a magnetic field acts, a magnetic flux is generated between the permanent magnet 41 and the sample 3, and ferromagnetic particles (for example, iron particles) and magnetite particles are attracted by magnetic attraction. Many aggregate to form magnetic clusters 12. Since the magnetic cluster 12 is along the magnetic flux, many magnetic clusters 12 are arranged in a needle shape against the sample 3.

  At this time, in the magnetic polishing liquid 1, α-cellulose 13 added as a thickener occupies a position in a woven state between the magnetic clusters 12. Further, since nonmagnetic abrasive grains 14 are added to the magnetic polishing liquid 1, some of them are entangled with the magnetic cluster 12, but many exist on the surface of the sample 3. Accordingly, the abrasive grains 14 present in the magnetic polishing liquid 1 are pressed against the surface of the sample 3 by the magnetic clusters 12 arranged in a needle shape and the α cellulose 13 in a woven state. Further, since there are abrasive grains 14 entangled with the magnetic clusters 12 and the α cellulose 13, they are also pressed against the surface of the sample 3.

  Since the polishing tool 4 (permanent magnet 41) rotates in such a state, the abrasive grains 14 move while contacting the surface of the sample 3 by relative movement with the sample 3. For this reason, the abrasive grain 14 grinds the convex part of the surface of the sample 3, and a smoother surface is obtained. In other words, when burrs are generated on the object to be polished, the burrs can be removed and mirror polishing can be performed.

  When the magnetic field is stationary, the magnetic clusters 12 are aligned along the magnetic flux, and the aligned state is maintained by the magnetic force, so that the abrasive grains 14 can be properly applied to the surface (polishing surface) of the sample 3 for polishing. In addition, when the magnetic field is variable, the magnetic cluster 12 is shaken, and at this time, the abrasive grains 14 strike the polishing surface appropriately and can be polished. Thus, even if the polishing tool 4 is not in contact with the sample 3 and is in a non-contact state, the polishing can be performed by the pressing action of the magnetic cluster 12 and the α cellulose 13, and fluid polishing can be performed. Yes.

  Further, since the magnetic polishing liquid 1 is agitated by moving the fluidizing tank 2, the magnetic polishing liquid 1 is also replaced in the concave portion of the sample 3, and the abrasive grains 14 move around in the magnetic polishing liquid 1, so that the polishing action is performed. Will go on.

  By the way, the magnetic cluster 12 may be out of the magnetic field of the permanent magnet 41. These disperse in the magnetic polishing liquid 1 and eventually disappear, but since the shape is maintained for a while, the magnetic polishing liquid 1 flows around each part such as the side of the sample 3 due to the flow motion. become. As a result, the magnetic cluster 12 that wraps around hits the part and acts as a grinding, or moves the abrasive grains 14 existing in the vicinity at the part. As a result, polishing proceeds even on the side portion that does not face the polishing tool 4. Of course, the floating magnetic cluster 12 also moves around the concave portion of the sample 3 and acts as a grinding so that polishing proceeds.

  That is, a part of the magnetic cluster 12 generated by agglomeration due to the magnetic field of the permanent magnet 41 flows away from the magnetic flux along with the rotation operation of the polishing tool 4 and the vibration operation of the flow vessel 2, and flows into the concave portion of the sample 3. Intruding and hitting a part that does not face the polishing tool 4 such as a side part, or by moving the abrasive grains 14 in the vicinity so as to apply contact, and polishing even on a concave part having a complicated shape or a side part that does not face the polishing tool 4 Become.

  Moreover, since the magnetic polishing liquid 1 contains α-cellulose 13 as a thickener, the added thickener acts to hold the magnetic cluster 12. As a result, the situation where a large number of abrasive grains 14 come into contact with the surface of the sample 3 can be promoted, and polishing can be performed with high efficiency.

  Therefore, according to the mirror polishing according to the present invention, the magnetic cluster 12 generated in the magnetic polishing liquid 1 can perform non-contact fluid polishing on the sample 3 (polishing target). Since it is stirred by the stirring means, the action of polishing can be promoted. Therefore, even if the object to be polished is a complex shape having irregularities such as grooves, the entire surface can be mirror-finished without unevenness. And since it is non-contact fluid grinding | polishing, it can grind | polish without stress also with the grinding | polishing object with weak intensity | strength.

  The sample was polished using the mirror polishing apparatus shown in FIG. That is, in order to demonstrate the effect of the present invention, a plurality of samples were polished under different polishing conditions, and the surface roughness Ra (arithmetic average roughness) was evaluated for each sample.

As the magnetic polishing liquid, the composition shown in Table 1 was used, and samples having the shape and dimensions shown in FIGS. 6A and 6B were used in the first evaluation test.

In other words, the magnetic polishing liquid contains, in its composition, alumina having a particle diameter of 0.05 μm as non-magnetic abrasive grains and α-cellulose as a thickener. In the first evaluation test, as shown in FIGS. 6A and 6B, the sample has a disc shape with an outer diameter of 12 mm and a thickness of 5 mm and has a concentric annular groove, Polishing was performed according to conditions. As a result, a surface roughness Ra as shown in the table was obtained.

  At this time, the sample is made of brass, and the polishing tool is as shown in FIGS. 4 (a) and 4 (b), and has a configuration in which an annular permanent magnet is concentric, the rotation speed is 915 rpm, and the distance from the sample is 1 mm, polishing time was 1 hour, and the vibration table was rotated in the shape of figure 8 on the surface opposite to the rotation axis of the polishing tool. The amplitude was 10 mm and the vibration was 20 times per minute.

  As a result, it was confirmed that the surface roughness Ra was 5.7 nm even in the annular groove portion (concave portion), and this was on the order of several nm equivalent to the upper surface (convex portion). That is, according to the polishing according to the present invention, it was possible to polish the entire surface of the complex shape body including the concave portion (mirror polishing), and the usefulness of the present invention could be confirmed.

Next, a second evaluation test was performed with the sample having a flat plate shape. In other words, the sample had a disk shape with an outer diameter of 20 mm and a thickness of 10 mm, and was polished under various conditions shown in Table 3. As a result, a surface roughness Ra as shown in the table was obtained.

  In the second evaluation test, the samples are brass, SUS304, aluminum, duralumin, copper, and Ti, and the polishing tool is the tool A shown in FIG. 2 and the tool B shown in FIG. The number is 515 rpm or 915 rpm, the distance from the sample is 2 mm or 1 mm, the polishing time is 1 hour or 30 minutes, and the vibration table rotates in a shape of 8 in the face opposite to the rotation axis of the polishing tool. Was 10 mm and 20 vibrations per minute.

  As a result, the surface roughness Ra was in the order of several nanometers for any of the samples numbered 1 to 9, and at this time, it was confirmed that not only the top surface but also the side surface (circumferential surface) could be mirror-polished. did. That is, according to the mirror polishing according to the present invention, the mirror polishing can be performed with a sufficient surface roughness, and this covers the entire surface except the bottom surface fixed to the fluid tank, that is, the entire surface in contact with the magnetic polishing liquid. Polishing (mirror polishing) was possible, and the usefulness of the present invention was confirmed.

  The above experimental results prove that the present invention functions effectively for mirror polishing. The effect of the present invention is not limited to the above-described mirror polishing, and is not limited by the form of the object to be polished, and can be polished even if it is a complex shape. One aspect of this polishing is deburring (barrel polishing). That is, for example, as shown in FIG. 7, the polishing object 45 is formed with an arcuate groove 45a on the surface by machining, and a burr 45b is formed at the end of the groove 45a during the machining. Shall. Further, as shown in FIG. 8, it is assumed that the object to be polished 46 has a shape in which a flat metal plate is subjected to press working or the like and has an elongated strip-like plate portion 46a at the tip. And suppose that the burr | flash 46b remained in the side edge of the strip | belt-shaped board part 46a. In this example, the burrs 45b and 46b have dimensions of about several μm to several tens of μm.

As the magnetic polishing liquid, the composition shown in Table 4 was used, and in the third evaluation test, samples (with burrs) having the shape and dimensions shown in FIGS. 7 (No. 10) and 8 (No. 11) were used. Each sample was polished under the polishing conditions shown in Table 5. The polishing tool used for polishing has the structure shown in FIGS. Further, in the sixth vibration, the fluid tank was operated so that 2 moved circularly. As a result, the burrs were clearly removed from all the samples. Thus, it was confirmed that the polishing of the present invention also functions effectively for removing burrs. For example, as shown in FIG. 8, in the case of a member having a complicated shape and a very small and weak strength, the strip-shaped plate portion 46a is bent or damaged when an attempt is made to remove burrs by a normal method. Although there is a possibility, according to this invention, there is no damage with respect to the strip | belt-shaped board part 46a, and only a burr | flash can be removed.

  The polishing time for mirror polishing and burr removal, and polishing conditions such as the upper rotation speed and the lower rotation speed are appropriately set based on the material, dimensions, and other factors.

1 is a configuration diagram showing a preferred embodiment of a mirror polishing apparatus according to the present invention. It is sectional drawing which shows the suitable example 1 of a grinding | polishing tool. It is sectional drawing which shows the suitable example 2 of a grinding | polishing tool. A preferred example 3 of the polishing tool is shown, (a) is a sectional view, and (b) is a plan view showing the tool surface. It is explanatory drawing which shows the fluid grinding | polishing by a magnetic cluster. It is the perspective view (a) and sectional drawing (b) which show the geometric dimension of the complex shape body used as the sample of the grinding | polishing test. It is a figure which shows an example of the complex shape body used as the sample of grinding | polishing object. It is a figure which shows an example of the complex shape body used as the sample of grinding | polishing object.

1 Magnetic polishing liquid 2 Fluid tank 3 Sample (polishing object)
4 Polishing tool 5 Drive motor 6 Shaking table 7 Spring screw 8 Traverse device 9 Base 10 Load cell 11 Chuck part 12 Magnetic cluster 13 α cellulose 14 Abrasive grain 40 Cylindrical body 41 Permanent magnet 45 Polishing object 45a Concave groove 45b Burr 46 Polishing object 46a Strip plate 46b burr

Claims (8)

There is a method of mirror polishing of a complex shape body in which a polishing bite is faced in a non-contact manner with respect to an object to be polished which is a complex shape body, and fluid polishing is performed by causing a magnetic polishing liquid to exist around these objects
The polishing tool is provided with a magnetic field generating source for generating a magnetic field, and is rotated by a rotating means. The polishing tool faces the polishing tool to support the object to be polished, and the periphery is filled with a magnetic polishing liquid so that both are immersed. The magnetic polishing liquid is mixed with nonmagnetic abrasive grains,
In this state, the polishing tool is rotated, a magnetic field is applied to the magnetic polishing liquid by the magnetic field generation source, and the magnetic polishing liquid is stirred by a stirring means in a non-contact state. A polishing method for a complex-shaped body characterized by performing fluid polishing. The magnetic polishing liquid is
Spherical magnetite particles having a particle diameter of 10 to 50 nm are obtained with respect to a fluid in which ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. Mix non-magnetic abrasive grains with a particle size of 0.01-100 μm in a composite fluid in which 5-90 wt% of a fluid uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulating properties is mixed, and further increase the viscosity. The method for polishing a complex shaped body according to claim 1, wherein a fibrous substance such as α-cellulose or a resin such as polyvinyl alcohol is mixed as an agent. A polishing tool that has a rotating means for rotating the output shaft, a magnetic field generating source for generating a magnetic field such as a permanent magnet or an electromagnetic coil, and is detachably attached to the tip of the output shaft, and a polishing object facing the polishing tool And a fluid tank that fills the magnetic polishing liquid in a state in which both of them are immersed, and a vibration means that provides vibrations of appropriate operation in conjunction with the fluid tank,
The magnetic polishing liquid is mixed with non-magnetic abrasive grains, and the polishing tool rotates at a predetermined interval without being in contact with the object to be polished, and is constantly in time with the magnetic polishing liquid by the magnetic field generation source. A polishing apparatus for complex shapes, characterized by applying a magnetic field or a variable magnetic field and vibrating the fluid tank to stir the magnetic polishing liquid in the tank.   4. The polishing apparatus for a complex shaped body according to claim 3, wherein the polishing tool embeds a permanent magnet concentrically in a cylindrical body made of a non-magnetic material, and generates a magnetic field by the permanent magnet.   4. The polishing tool is configured such that a plurality of annular permanent magnets are concentrically embedded in a cylindrical body made of a non-magnetic material, and a magnetic portion and a non-magnetic portion are alternately and concentrically repeated. Polishing apparatus for complex shapes as described in 1. The magnetic polishing liquid is
Spherical magnetite particles having a particle diameter of 10 to 50 nm are obtained with respect to a fluid in which ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. Non-magnetic abrasive grains having a particle diameter of 0.01 to 100 μm are mixed in a composite fluid obtained by mixing a fluid uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulation properties, and α-cellulose as a thickener. 4. The mirror polishing apparatus for complex shapes according to claim 3, wherein a fibrous material such as polyvinyl alcohol or a resin such as polyvinyl alcohol is mixed. The magnetic polishing liquid is
Spherical magnetite particles having a particle diameter of 10 to 50 nm are obtained with respect to a fluid in which ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. Non-magnetic abrasive grains having a particle diameter of 0.01 to 100 μm are mixed in a composite fluid obtained by mixing a fluid uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulation properties, and α-cellulose as a thickener. 5. A mirror polishing apparatus for complex shaped bodies according to claim 4, wherein a fibrous substance such as polyvinyl alcohol or a resin such as polyvinyl alcohol is mixed. The magnetic polishing liquid is
Spherical magnetite particles having a particle diameter of 10 to 50 nm are obtained with respect to a fluid in which ferromagnetic particles having a particle diameter of 1 to 80 μm are dispersed in a dispersion medium such as water or kerosene having a kinematic viscosity of about 0.01 to 100 mm ² / s. Non-magnetic abrasive grains having a particle diameter of 0.01 to 100 μm are mixed in a composite fluid obtained by mixing a fluid uniformly dispersed in a dispersion medium such as water or kerosene having electrical insulation properties, and α-cellulose as a thickener. 6. A mirror polishing apparatus for complex-shaped bodies according to claim 5, wherein a fibrous substance such as polyvinyl alcohol or a resin such as polyvinyl alcohol is mixed.

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