JPWO2005074037A1 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JPWO2005074037A1 JPWO2005074037A1 JP2005517449A JP2005517449A JPWO2005074037A1 JP WO2005074037 A1 JPWO2005074037 A1 JP WO2005074037A1 JP 2005517449 A JP2005517449 A JP 2005517449A JP 2005517449 A JP2005517449 A JP 2005517449A JP WO2005074037 A1 JPWO2005074037 A1 JP WO2005074037A1
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- gate insulating
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- insulating film
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 239000010408 film Substances 0.000 claims abstract description 214
- 238000010438 heat treatment Methods 0.000 claims abstract description 57
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 37
- 239000010703 silicon Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 239000007800 oxidant agent Substances 0.000 claims abstract description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 10
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 10
- 229910052914 metal silicate Inorganic materials 0.000 claims abstract description 8
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 31
- 239000001301 oxygen Substances 0.000 claims description 31
- 229910052760 oxygen Inorganic materials 0.000 claims description 31
- 230000004913 activation Effects 0.000 claims description 19
- 239000002019 doping agent Substances 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 2
- 229910001882 dioxygen Inorganic materials 0.000 claims description 2
- 239000012466 permeate Substances 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 47
- 229920005591 polysilicon Polymers 0.000 abstract description 47
- 230000007547 defect Effects 0.000 abstract description 20
- 238000012545 processing Methods 0.000 abstract description 5
- 239000000470 constituent Substances 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- 230000008569 process Effects 0.000 description 17
- 238000000137 annealing Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- 229910004129 HfSiO Inorganic materials 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- SDHZVBFDSMROJJ-UHFFFAOYSA-N CCCCO[Hf] Chemical group CCCCO[Hf] SDHZVBFDSMROJJ-UHFFFAOYSA-N 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- -1 ammonia (NH 3 ) Chemical compound 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004335 scaling law Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28176—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
この数式1は、εoに比べて大きな誘電率εhをもった材料を使用すれば、絶縁膜が厚くても薄いシリコン酸化膜と同等になりうることを示している。シリコン酸化膜の比誘電率εoは3.9程度なので、例えばεh=39の高誘電体膜を使用すれば、この高誘電体膜の厚さを15nmにしても、1.5nmのシリコン酸化膜換算膜厚になり、トンネル電流を激減できるわけである。
102、202、302、402:高誘電率ゲート絶縁膜
103、203、303、403:下地酸化膜
104、204、304、404:ポリシリコンゲート電極
105、205、305、405:界面欠陥
106、206、406:電極界面シリコン酸化膜
407:サイドウォール
408:ソース領域
409:ドレイン領域
Claims (12)
- 基板上にHf、Zr及びAlからなる群から選択された少なくとも一つの元素を含有する金属酸化物薄膜又は金属シリケート薄膜からなるゲート絶縁膜を形成する工程と、前記ゲート絶縁膜上にゲート電極を形成する工程と、分子中に酸素原子を含む酸化剤の雰囲気中において前記ゲート絶縁膜中に酸素が透過できる状態で熱処理を施す工程とを有することを特徴とする半導体装置の製造方法。
- 前記熱処理は、前記ゲート絶縁膜の側面又は表面が露出した状態で実施することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記熱処理は、前記ゲート絶縁膜の側面にスペーサー又はサイドウオールを形成した後に実施することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記酸化剤は、酸素ガスを含むガスであることを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置の製造方法。
- 前記酸化剤の雰囲気は、酸素分圧が1Torr以上の大気圧下であることを特徴とする請求項1乃至4のいずれか1項に記載の半導体装置の製造方法。
- 前記熱処理は、ドーパントの活性化温度以下であって500℃以上の温度で実施することを特徴とする請求項1乃至5のいずれか1項に記載の半導体装置の製造方法。
- 前記熱処理は、700乃至950℃で実施することを特徴とする請求項1乃至5のいずれか1項に記載の半導体装置の製造方法。
- 前記熱処理は、800乃至900℃で実施することを特徴とする請求項7に記載の半導体装置の製造方法。
- 前記基板はシリコン基板であり、前記シリコン基板の上に、シリコン酸化膜層又はシリコン酸窒化膜層を形成した後、このシリコン酸化膜層又はシリコン酸窒化膜層の上に、前記ゲート絶縁膜を形成することを特徴とする請求項1乃至8のいずれか1項に記載の半導体装置の製造方法。
- 前記熱処理の後、前記ゲート電極及び前記ゲート絶縁膜の側壁に、シリコン窒化膜又はシリコン酸窒化膜からなるオフセットスペーサー又はサイドウオールを形成し、その後、ドーパントの活性化のための熱処理を実施することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記熱処理の後、酸素を含有しない不活性雰囲気中で、ドーパントの活性化のための熱処理を実施することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記ゲート電極は、前記基板上に形成される全ての半導体装置について、ゲート長が0.3μm以下であることを特徴とする請求項1乃至11のいずれか1項に記載の半導体装置の製造方法。
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JP2005517449A JP5050351B2 (ja) | 2004-01-28 | 2005-01-26 | 半導体装置の製造方法 |
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JP2004019952 | 2004-01-28 | ||
JP2004019952 | 2004-01-28 | ||
JP2005517449A JP5050351B2 (ja) | 2004-01-28 | 2005-01-26 | 半導体装置の製造方法 |
PCT/JP2005/000980 WO2005074037A1 (ja) | 2004-01-28 | 2005-01-26 | 半導体装置の製造方法 |
Publications (2)
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JPWO2005074037A1 true JPWO2005074037A1 (ja) | 2007-09-13 |
JP5050351B2 JP5050351B2 (ja) | 2012-10-17 |
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JP2005517449A Expired - Fee Related JP5050351B2 (ja) | 2004-01-28 | 2005-01-26 | 半導体装置の製造方法 |
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JP (1) | JP5050351B2 (ja) |
WO (1) | WO2005074037A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006041306A (ja) * | 2004-07-29 | 2006-02-09 | Sharp Corp | 半導体装置の製造方法 |
JP2006086151A (ja) * | 2004-09-14 | 2006-03-30 | Fujitsu Ltd | 半導体装置の製造方法 |
JP4757579B2 (ja) * | 2005-09-15 | 2011-08-24 | 富士通株式会社 | 絶縁ゲート型半導体装置及びその製造方法 |
US7655994B2 (en) * | 2005-10-26 | 2010-02-02 | International Business Machines Corporation | Low threshold voltage semiconductor device with dual threshold voltage control means |
US7932150B2 (en) * | 2008-05-21 | 2011-04-26 | Kabushiki Kaisha Toshiba | Lateral oxidation with high-K dielectric liner |
CN114361019A (zh) * | 2022-01-11 | 2022-04-15 | 长鑫存储技术有限公司 | 半导体结构及其制备方法和存储器件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000260979A (ja) * | 1999-03-11 | 2000-09-22 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2003069011A (ja) * | 2001-08-27 | 2003-03-07 | Hitachi Ltd | 半導体装置とその製造方法 |
JP2003249649A (ja) * | 2002-02-26 | 2003-09-05 | Toshiba Corp | 半導体装置及びその製造方法 |
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- 2005-01-26 WO PCT/JP2005/000980 patent/WO2005074037A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000260979A (ja) * | 1999-03-11 | 2000-09-22 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2003069011A (ja) * | 2001-08-27 | 2003-03-07 | Hitachi Ltd | 半導体装置とその製造方法 |
JP2003249649A (ja) * | 2002-02-26 | 2003-09-05 | Toshiba Corp | 半導体装置及びその製造方法 |
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JP5050351B2 (ja) | 2012-10-17 |
WO2005074037A1 (ja) | 2005-08-11 |
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