JPWO2004051758A1 - 半導体発光素子及びその製造方法 - Google Patents
半導体発光素子及びその製造方法 Download PDFInfo
- Publication number
- JPWO2004051758A1 JPWO2004051758A1 JP2004556835A JP2004556835A JPWO2004051758A1 JP WO2004051758 A1 JPWO2004051758 A1 JP WO2004051758A1 JP 2004556835 A JP2004556835 A JP 2004556835A JP 2004556835 A JP2004556835 A JP 2004556835A JP WO2004051758 A1 JPWO2004051758 A1 JP WO2004051758A1
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor
- light emitting
- main surface
- ohmic contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 251
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims abstract description 118
- 229910052737 gold Inorganic materials 0.000 claims abstract description 31
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 23
- 150000003624 transition metals Chemical class 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 239000012535 impurity Substances 0.000 claims abstract description 22
- 230000005496 eutectics Effects 0.000 claims abstract description 12
- 239000010931 gold Substances 0.000 claims description 64
- 150000001875 compounds Chemical class 0.000 claims description 55
- 239000002131 composite material Substances 0.000 claims description 26
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 21
- 239000007769 metal material Substances 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 16
- 239000000956 alloy Substances 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- -1 compound compound Chemical class 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052706 scandium Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 230000031700 light absorption Effects 0.000 abstract description 9
- 238000005253 cladding Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 10
- 238000001579 optical reflectometry Methods 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 239000007790 solid phase Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/387—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002348416 | 2002-11-29 | ||
JP2002348416 | 2002-11-29 | ||
PCT/JP2003/014890 WO2004051758A1 (ja) | 2002-11-29 | 2003-11-21 | 半導体発光素子及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2004051758A1 true JPWO2004051758A1 (ja) | 2006-04-06 |
Family
ID=32462916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004556835A Pending JPWO2004051758A1 (ja) | 2002-11-29 | 2003-11-21 | 半導体発光素子及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPWO2004051758A1 (zh) |
CN (1) | CN100521261C (zh) |
TW (1) | TWI230472B (zh) |
WO (1) | WO2004051758A1 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100420044C (zh) * | 2004-09-29 | 2008-09-17 | 晶元光电股份有限公司 | 发光二极管及其制作方法 |
KR100657941B1 (ko) * | 2004-12-31 | 2006-12-14 | 삼성전기주식회사 | 요철 구조를 포함하는 발광 소자 및 그 제조 방법 |
JP4935136B2 (ja) * | 2006-03-22 | 2012-05-23 | パナソニック株式会社 | 発光素子 |
US7501295B2 (en) * | 2006-05-25 | 2009-03-10 | Philips Lumileds Lighting Company, Llc | Method of fabricating a reflective electrode for a semiconductor light emitting device |
CN100386899C (zh) * | 2006-05-26 | 2008-05-07 | 北京工业大学 | 高效高亮全反射发光二极管及制作方法 |
JP5346443B2 (ja) | 2007-04-16 | 2013-11-20 | ローム株式会社 | 半導体発光素子およびその製造方法 |
JP4770785B2 (ja) * | 2007-04-25 | 2011-09-14 | 日立電線株式会社 | 発光ダイオード |
KR100992728B1 (ko) * | 2008-10-20 | 2010-11-05 | 엘지이노텍 주식회사 | 발광 소자 및 그 제조방법 |
KR101007113B1 (ko) * | 2008-11-25 | 2011-01-10 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
TWI412161B (zh) * | 2009-11-06 | 2013-10-11 | Semileds Optoelectronics Co | 發光二極體裝置 |
CN102280552B (zh) * | 2010-06-14 | 2015-06-03 | 鸿富锦精密工业(深圳)有限公司 | 发光二极管晶粒及其制作方法 |
TWI437738B (zh) | 2010-10-06 | 2014-05-11 | Huga Optotech Inc | 半導體發光元件 |
WO2021059485A1 (ja) * | 2019-09-27 | 2021-04-01 | 三菱電機株式会社 | 光半導体装置およびその製造方法 |
CN112652689B (zh) * | 2020-12-30 | 2022-09-02 | 深圳第三代半导体研究院 | 一种发光二极管及其制造方法 |
CN112614921A (zh) * | 2020-12-31 | 2021-04-06 | 深圳第三代半导体研究院 | 一种发光二极管及其制造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4940863A (zh) * | 1972-08-25 | 1974-04-17 | ||
JPH05251739A (ja) * | 1992-03-06 | 1993-09-28 | Toshiba Corp | 半導体発光デバイス |
JP4050444B2 (ja) * | 2000-05-30 | 2008-02-20 | 信越半導体株式会社 | 発光素子及びその製造方法 |
JP2002217450A (ja) * | 2001-01-22 | 2002-08-02 | Sanken Electric Co Ltd | 半導体発光素子及びその製造方法 |
JP2002261044A (ja) * | 2001-03-06 | 2002-09-13 | Sony Corp | 半導体装置の製造方法および半導体装置 |
-
2003
- 2003-11-21 WO PCT/JP2003/014890 patent/WO2004051758A1/ja active Application Filing
- 2003-11-21 CN CNB2003801043339A patent/CN100521261C/zh not_active Expired - Fee Related
- 2003-11-21 TW TW92132791A patent/TWI230472B/zh not_active IP Right Cessation
- 2003-11-21 JP JP2004556835A patent/JPWO2004051758A1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2004051758A1 (ja) | 2004-06-17 |
TWI230472B (en) | 2005-04-01 |
CN1717812A (zh) | 2006-01-04 |
CN100521261C (zh) | 2009-07-29 |
TW200425537A (en) | 2004-11-16 |
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