JPS6489540A - Formation of wiring pattern - Google Patents
Formation of wiring patternInfo
- Publication number
- JPS6489540A JPS6489540A JP24738587A JP24738587A JPS6489540A JP S6489540 A JPS6489540 A JP S6489540A JP 24738587 A JP24738587 A JP 24738587A JP 24738587 A JP24738587 A JP 24738587A JP S6489540 A JPS6489540 A JP S6489540A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- mask
- wiring pattern
- wiring
- masking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To make a wiring pattern to come in contact with a step even when a second mask is formed staggeredly with respect to the step by coating a part of a wiring layer formed within the step on a substrate with a first mask formed in advance. CONSTITUTION:When a semiconductor device is developed after exposure to light using a mask 7A, the exposed part of a photoresist 6 is partially removed. Then a masking layer 6A is formed by etching the photoresist 6 and leaving the photoresist only in an opened hole 4 with a wiring film 5 interposed therebetween. When a photoresist 11, after formed on the masking layer 6A and wiring film 5, is exposed to light with a photomask 12 as a mask and developed, the photoresist 11 remains as a masking layer 11A. Then the wiring film 5, etched with the masking layers 11A, 6A as a mask, remains as a wiring pattern 5A. Then the masking layers 11A, 6A are removed. According to the constitution, a wiring pattern whose step is in good contact can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24738587A JPS6489540A (en) | 1987-09-30 | 1987-09-30 | Formation of wiring pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24738587A JPS6489540A (en) | 1987-09-30 | 1987-09-30 | Formation of wiring pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489540A true JPS6489540A (en) | 1989-04-04 |
Family
ID=17162643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24738587A Pending JPS6489540A (en) | 1987-09-30 | 1987-09-30 | Formation of wiring pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489540A (en) |
-
1987
- 1987-09-30 JP JP24738587A patent/JPS6489540A/en active Pending
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