JPS6489449A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6489449A JPS6489449A JP24431687A JP24431687A JPS6489449A JP S6489449 A JPS6489449 A JP S6489449A JP 24431687 A JP24431687 A JP 24431687A JP 24431687 A JP24431687 A JP 24431687A JP S6489449 A JPS6489449 A JP S6489449A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sealing part
- sealed
- tube
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24431687A JPS6489449A (en) | 1987-09-30 | 1987-09-30 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24431687A JPS6489449A (en) | 1987-09-30 | 1987-09-30 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489449A true JPS6489449A (en) | 1989-04-03 |
Family
ID=17116909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24431687A Pending JPS6489449A (en) | 1987-09-30 | 1987-09-30 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489449A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006231439A (ja) * | 2005-02-23 | 2006-09-07 | Sony Corp | 微小機械素子とその製造方法、半導体装置、ならびに通信装置 |
-
1987
- 1987-09-30 JP JP24431687A patent/JPS6489449A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006231439A (ja) * | 2005-02-23 | 2006-09-07 | Sony Corp | 微小機械素子とその製造方法、半導体装置、ならびに通信装置 |
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