JPS6487768A - Multifunction vacuum plating device - Google Patents
Multifunction vacuum plating deviceInfo
- Publication number
- JPS6487768A JPS6487768A JP24249087A JP24249087A JPS6487768A JP S6487768 A JPS6487768 A JP S6487768A JP 24249087 A JP24249087 A JP 24249087A JP 24249087 A JP24249087 A JP 24249087A JP S6487768 A JPS6487768 A JP S6487768A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- target
- inorg
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form multi-layered films by the same vacuum vessel and to form the inorg. films having high purity by segmenting a vacuum plating chamber to org. film and inorg. film forming regions, providing targets to the respective regions and constructing a device in such a manner that a substrate can be opposed to either of the targets at proper times. CONSTITUTION:A copper film is formed by sputtering on, for example, the polytetrafluoroethylene (PTFE) substrate 6. The substrate 5 faces the PTFE target 5 in the figure. A substrate rotating and mounting jig 9 is rotated to direct the substrate toward a copper target 4 electrode 3 side in the case of forming the copper film. Sputtering is then executed under prescribed conditions to form the copper film on the substrate 6. The target 6 is kept mounted to the jig 9 and is opposed in this state to the target 5. The sputtering is then executed under the prescribed conditions to form the PTFE film on the copper film. The contamination in the inorg. film forming chamber 7 is suppressed by providing a partition plate 2 and adequately maintaining the spacing between the inside circumference and the jig 9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24249087A JPS6487768A (en) | 1987-09-29 | 1987-09-29 | Multifunction vacuum plating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24249087A JPS6487768A (en) | 1987-09-29 | 1987-09-29 | Multifunction vacuum plating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6487768A true JPS6487768A (en) | 1989-03-31 |
Family
ID=17089860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24249087A Pending JPS6487768A (en) | 1987-09-29 | 1987-09-29 | Multifunction vacuum plating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6487768A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002371351A (en) * | 2001-06-14 | 2002-12-26 | Hitachi Metals Ltd | Film forming apparatus |
JP2005320569A (en) * | 2004-05-07 | 2005-11-17 | Murata Mfg Co Ltd | Plating apparatus |
JP2010022684A (en) * | 2008-07-23 | 2010-02-04 | Matsumoto Kiko Kk | Hatch for evacuation ladder |
JP2010095756A (en) * | 2008-10-16 | 2010-04-30 | Ulvac Japan Ltd | Film deposition apparatus |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124968A (en) * | 1977-04-08 | 1978-10-31 | Hitachi Ltd | Continuous vapor deposition apparatus |
JPS5690975A (en) * | 1979-12-25 | 1981-07-23 | Toshiba Corp | Sputtering apparatus |
JPS5917236A (en) * | 1982-07-21 | 1984-01-28 | Hitachi Ltd | Forming device for film |
JPS59173268A (en) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | Apparatus for formation of thin film |
JPS6039162A (en) * | 1983-08-10 | 1985-02-28 | Anelva Corp | Vacuum apparatus for treating thin film |
JPS6082663A (en) * | 1983-10-08 | 1985-05-10 | Fujitsu Ltd | Method and apparatus for manufacturing mixture thin film |
JPS61158121A (en) * | 1984-12-29 | 1986-07-17 | Fujitsu Ltd | Magnetic film forming device |
JPS61227170A (en) * | 1985-03-29 | 1986-10-09 | Fujitsu Ltd | Sputtering device |
JPS61272363A (en) * | 1985-05-29 | 1986-12-02 | Hitachi Ltd | Formation of carbon film |
JPS6241291A (en) * | 1985-08-16 | 1987-02-23 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of solid lubricating film |
JPS6360278A (en) * | 1986-09-01 | 1988-03-16 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for preparing multi-layered thin film |
-
1987
- 1987-09-29 JP JP24249087A patent/JPS6487768A/en active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124968A (en) * | 1977-04-08 | 1978-10-31 | Hitachi Ltd | Continuous vapor deposition apparatus |
JPS5690975A (en) * | 1979-12-25 | 1981-07-23 | Toshiba Corp | Sputtering apparatus |
JPS5917236A (en) * | 1982-07-21 | 1984-01-28 | Hitachi Ltd | Forming device for film |
JPS59173268A (en) * | 1983-03-23 | 1984-10-01 | Fuji Photo Film Co Ltd | Apparatus for formation of thin film |
JPS6039162A (en) * | 1983-08-10 | 1985-02-28 | Anelva Corp | Vacuum apparatus for treating thin film |
JPS6082663A (en) * | 1983-10-08 | 1985-05-10 | Fujitsu Ltd | Method and apparatus for manufacturing mixture thin film |
JPS61158121A (en) * | 1984-12-29 | 1986-07-17 | Fujitsu Ltd | Magnetic film forming device |
JPS61227170A (en) * | 1985-03-29 | 1986-10-09 | Fujitsu Ltd | Sputtering device |
JPS61272363A (en) * | 1985-05-29 | 1986-12-02 | Hitachi Ltd | Formation of carbon film |
JPS6241291A (en) * | 1985-08-16 | 1987-02-23 | Nippon Telegr & Teleph Corp <Ntt> | Preparation of solid lubricating film |
JPS6360278A (en) * | 1986-09-01 | 1988-03-16 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for preparing multi-layered thin film |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002371351A (en) * | 2001-06-14 | 2002-12-26 | Hitachi Metals Ltd | Film forming apparatus |
JP2005320569A (en) * | 2004-05-07 | 2005-11-17 | Murata Mfg Co Ltd | Plating apparatus |
JP2010022684A (en) * | 2008-07-23 | 2010-02-04 | Matsumoto Kiko Kk | Hatch for evacuation ladder |
JP2010095756A (en) * | 2008-10-16 | 2010-04-30 | Ulvac Japan Ltd | Film deposition apparatus |
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