JPS61158121A - Magnetic film forming device - Google Patents

Abstract

PURPOSE:To enable to obtain a magnetic anisotropy with an excellent reproducibility by a method wherein the title device is constituted in such a manner that the magnetic pole ofthe permanent magnetic plate, with which the substrate providing surface of a polygonal column-shaped substrate, becomes the same magnetic pole at the position of the ridgeline of the substrate holder. CONSTITUTION:A substrate providing surface 13 is formed with a permanent magnetic plate, a fixing frame 15 with which the substrate providing surface 13 is fixed is attached to the position of each ridgeline of a substrate holder 11, and the substrate providing surface 13 is fitted in the fixing frame 15. A permanent magnet is arranged on the fixing frame 15 of the substrate holder 11 at the position of the ridgeline 14 where each of the substrate providing surfaces 13 is butted together. Besides, a shielding plate 17, with which the part of the substrate providing surface 13 other than the region where a substrate 16 is provided, is formed and a premanent magnet plate is protected in such a manner that a magnetic film is not formed on the substrate providing surface 13 of the part other than the region where the substrate 16 is provided. As a result, the distribution of the magnetic field to be applied to the substrate on the substrate providing surface can be made uniform, thereby enabling to obtain a magnetic anisotropy with excellent reproducibility.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic film forming apparatus, and particularly to a magnetic film forming apparatus that applies a magnetic field to a growing magnetic film and forms the magnetic film in the magnetic field. Regarding equipment.

For example, a lower magnetic pole layer made of N1-Fe (permalloy) in a predetermined shape is formed on a non-magnetic substrate made of photoceram, a gap layer made of an insulating film is provided on top of the lower magnetic pole layer, and a gap layer made of an insulating film is provided on top of the lower magnetic pole layer, and a resin insulating film is further placed on top of the gap layer. A thin film coil of a predetermined shape made of a conductive layer is then formed on this, and an upper magnetic pole layer made of permalloy is formed in a predetermined shape. Shaped thin film magnetic heads are well known.

The magnetic films that form the top and bottom pole layers are usually formed using sputtering or vapor deposition, and in order to improve the recording density of the manufactured thin-film magnetic head, the magnetic films are made with magnetic anisotropy. It is necessary to have direction.

[Conventional technology]

FIG. 3 is an explanatory diagram of a magnetic film forming apparatus seen from above when the magnetic film is formed by sputtering, and FIG. 4 is an explanatory diagram of a substrate holder of this apparatus.

As shown in FIGS. 3 and 4, inside the container 1, which is evacuated to a high vacuum, is a stainless steel polygonal columnar substrate that is rotated by a rotating shaft 2 installed on a base (not shown). A holder 3 is provided, and a substrate installation surface 4 of this substrate holder 3
A predetermined number of targets 5 made of a component for forming a magnetic film are placed at positions facing the target.

As shown in FIG. 4, a substrate 6 made of photoceram is installed in the recess (not shown) of the substrate installation surface 4 using an appropriate jig (not shown), and each of the substrates 6 is A magnetic field applying magnet 7 is installed on the substrate installation surface 4 so as to be sandwiched therebetween.

The magnetic field applying magnets 7 are arranged at opposing positions with the substrate 6 in between, so that the magnetic poles of the magnets 7 are different, and a magnetic field is formed by each magnet 7 on the surface of each substrate 6. .

The board 61 and the board installation surface 4 on which the magnet 7 is installed are fitted into the fixed frame 8 at the ridgeline of the board holder 3.

The inside of the container 1 of such a magnetic film forming apparatus is, for example, 10=
After evacuating to a vacuum level of torr, a sputtering gas such as argon (^r) gas is introduced into the container, and a high frequency voltage is applied between the substrate holder 3, which rotates in a predetermined direction, and the target 5, and the magnet While forming a magnetic field on the substrate 6 using the magnet 7, components of the target 5 sputtered by this sputtering gas are deposited on the substrate 6, and the magnet 7
A magnetic film having magnetic anisotropy is formed by a magnetic field formed on the substrate installation surface 4.

[Problem that the invention seeks to solve]

However, in the sputtering apparatus having the above structure, a pair of magnetic field applying magnets 7 are required so as to sandwich the substrate 6 therebetween, and each magnet 7 is installed with the north and south poles facing each other so as to sandwich the substrate 6 therebetween. Therefore, a large number of magnets 7 must be prepared, and when the magnets 7 are installed on the substrate installation surface 4, there is a problem that the magnetic poles of each magnet 7 may be placed incorrectly.

Furthermore, in the conventional substrate holder 3, the uniformity of the magnetic field on the substrate mounting surface 4 is poor, resulting in the disadvantage that a magnetic film with good magnetic anisotropy cannot be formed.

[Means for solving problems]

The above problem is solved by placing a rotating polygonal columnar substrate holder and a target in a container facing each other, and creating a magnetic field on the substrate placed in the substrate holder while introducing a sputtering gas into the container. In an apparatus for forming a magnetic film on
This problem is solved by the magnetic film forming apparatus of the present invention, in which the substrate installation surface of the aforementioned polygonal columnar substrate holder is formed of a permanent magnet plate, and the magnetic poles of the magnet plate are the same magnetic pole at the ridgeline of the substrate holder. be done.

[Effect]

That is, in the magnetic film forming apparatus of the present invention, the substrate mounting surface of the polygonal columnar substrate holder is formed of a permanent magnet plate, and the magnetic film is configured so that the magnetic poles of the magnet plate are the same on each edge line of the substrate holder. To obtain a magnetic film having a uniform thickness and imparting magnetic anisotropy with good reproducibility by obtaining a magnetic field distribution of uniform strength on a surface. In addition, by forming the substrate installation surface with a permanent magnet plate, there is no need for a large number of field-applying magnets as in conventional equipment, and this allows the magnetic field-applying magnet to be used as a magnetic pole when attached to the substrate holder. This is to prevent mistakes in the position of the .

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a plan view illustrating a main part of the substrate holder of the magnetic film forming apparatus of the present invention in cross section, and FIG. 2 is an explanatory diagram of the substrate holder of the magnetic film forming apparatus of the present invention.

As shown in FIGS. 1 and 2, the substrate holder 11 of the present invention is made of stainless steel and is formed into a polygonal column shape, and a rotating shaft 12 is provided at the center thereof. The board installation surface 13 of this board holder 11 is formed of a permanent magnet plate, and a fixing frame 15 for fixing this board installation surface 13 is attached to each ridgeline 14 of this board holder 11.
The board mounting surface 13 is fitted into the fixed frame 15. Further, the board installation surface 13 is provided with a recess (not shown) for accommodating the board 16, and the board 16 is installed in the recess. Further, at the position of the ridge line 14 where each of the board installation surfaces 13 butts against each other, the permanent magnet plates constituting the base temporary installation surface 13 are arranged on the fixed frame 15 of the board holder 11 so that they have the same magnetic pole. ing.

Furthermore, this fixed frame 15 is provided with a shielding plate 17 that shields a portion of the board installation surface 13 other than the area where the board 16 is installed. The permanent magnet plate constituting the substrate mounting surface 13 is protected by preventing a magnetic film from being formed on the substrate mounting surface 13.

According to the substrate holder of the present invention, a large number of magnets for applying a magnetic field are not required, and therefore problems such as wrong magnetic poles when attaching the magnets for applying a magnetic field to the substrate installation surface do not occur, and the handling is easy. A high-performance magnetic film forming apparatus can be obtained.

〔Effect of the invention〕

As described above, according to the magnetic film forming apparatus of the present invention, the distribution of the magnetic field applied to the substrate on the substrate installation surface becomes uniform,
Magnetic anisotropy can be imparted with good reproducibility. Furthermore, there is no need to prepare a large number of magnets for applying a magnetic field, and an easy-to-handle magnetic film forming apparatus can be obtained.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing the main parts of the substrate holder of the magnetic film forming apparatus of the present invention, Fig. 2 is an explanatory diagram of the substrate holder of the magnetic film forming apparatus of the present invention, and Fig. 3 is a general magnetic film forming method. FIG. 4, a plan view of the apparatus, is an explanatory diagram of a conventional substrate holder. In the figure, 11 is a substrate holder, 12 is a rotating shaft, 13 is a substrate installation surface, 14 is a ridgeline, 15 is a fixed frame, 16 is a substrate, 1
7 indicates a shielding plate. 11111 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A polygonal columnar substrate holder and a target are provided in a container in opposition to the substrate holder.The substrate holder is rotated, a magnetic field is applied to the substrate, and the components of the target are transferred to the substrate using sputtering gas introduced into the container. In the device for depositing the substrate on the substrate mounting surface of the polygonal columnar substrate holder,
1. An apparatus for forming a magnetic film, characterized in that it is formed of a permanent magnet plate, and is arranged so that the magnetic poles of the permanent magnet plate become the same magnetic pole at the position of the ridge line of the substrate holder.