JPS62232911A - Magnetic film forming device - Google Patents

Magnetic film forming device

Info

Publication number
JPS62232911A
JPS62232911A JP7718886A JP7718886A JPS62232911A JP S62232911 A JPS62232911 A JP S62232911A JP 7718886 A JP7718886 A JP 7718886A JP 7718886 A JP7718886 A JP 7718886A JP S62232911 A JPS62232911 A JP S62232911A
Authority
JP
Japan
Prior art keywords
magnetic field
substrate
magnetic
film forming
generating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7718886A
Other languages
Japanese (ja)
Other versions
JPH0584657B2 (en
Inventor
Mitsuhiro Kamei
Keiji Arimatsu
Hidetsugu Setoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61077188A priority Critical patent/JPH0584657B2/ja
Publication of JPS62232911A publication Critical patent/JPS62232911A/en
Publication of JPH0584657B2 publication Critical patent/JPH0584657B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To form a magnetic thin film superior in magnetic characteristics on a substrate by means of a miniaturized device, by installing an auxiliary magnetic field generating device which generates the magnetic field nearly parallel to the one generated by a main magnetic field generating device in a magnetic film forming device.
CONSTITUTION: A magnetic film forming device is composed of a target 10, a substrate 6, a substrate holder 3 holding the substrate 6, a main magnetic field generating device 1 which impresses the magnetic field on the substrate 6plane, and a vacuum container 7 housing their parts. And, an auxiliary magnetic field generating device 14 which generates the magnetic field nearly parallel to that generated by the device 1 is installed. Then, a magnetic field, which is uniform and parallel to the substrate 6 plane, is generated over a wide range on the holder 3. Hence, a magnetic thin film superior in magnetic characteristics is formed on the substrate 6 by means of this miniaturized device.
COPYRIGHT: (C)1987,JPO&Japio
JP61077188A 1986-04-03 1986-04-03 Expired - Fee Related JPH0584657B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61077188A JPH0584657B2 (en) 1986-04-03 1986-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61077188A JPH0584657B2 (en) 1986-04-03 1986-04-03

Publications (2)

Publication Number Publication Date
JPS62232911A true JPS62232911A (en) 1987-10-13
JPH0584657B2 JPH0584657B2 (en) 1993-12-02

Family

ID=13626840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61077188A Expired - Fee Related JPH0584657B2 (en) 1986-04-03 1986-04-03

Country Status (1)

Country Link
JP (1) JPH0584657B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294859A (en) * 1988-05-23 1989-11-28 Hitachi Ltd Opposed target-type sputtering device
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
WO1997042649A1 (en) * 1996-05-07 1997-11-13 Nordiko Limited Magnet array
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
JP2008010540A (en) * 2006-06-28 2008-01-17 Shin Etsu Chem Co Ltd Magnetic circuit for generating radial magnetic field, and magnetic recording medium
WO2019011161A1 (en) * 2017-07-14 2019-01-17 北京北方华创微电子装备有限公司 Magnetic thin film deposition chamber and thin film deposition device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182711A (en) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd Method and apparatus for forming magnetic thin-film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182711A (en) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd Method and apparatus for forming magnetic thin-film

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294859A (en) * 1988-05-23 1989-11-28 Hitachi Ltd Opposed target-type sputtering device
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
US5902466A (en) * 1993-03-02 1999-05-11 Cvc Products, Inc. Sputtering apparatus with magnetic orienting device for thin film deposition
US6235164B1 (en) * 1993-03-02 2001-05-22 Cvc Products, Inc. Low-pressure processing system for magnetic orientation of thin magnetic film
WO1997042649A1 (en) * 1996-05-07 1997-11-13 Nordiko Limited Magnet array
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
US6126790A (en) * 1998-05-22 2000-10-03 Cvc Products, Inc. Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
US6475359B1 (en) 1998-05-22 2002-11-05 Cvc Products, Inc. Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation
JP2008010540A (en) * 2006-06-28 2008-01-17 Shin Etsu Chem Co Ltd Magnetic circuit for generating radial magnetic field, and magnetic recording medium
JP4648876B2 (en) * 2006-06-28 2011-03-09 信越化学工業株式会社 Magnetic circuit for radial magnetic field generation
WO2019011161A1 (en) * 2017-07-14 2019-01-17 北京北方华创微电子装备有限公司 Magnetic thin film deposition chamber and thin film deposition device

Also Published As

Publication number Publication date
JPH0584657B2 (en) 1993-12-02

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees