JPS6425970A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS6425970A JPS6425970A JP18150787A JP18150787A JPS6425970A JP S6425970 A JPS6425970 A JP S6425970A JP 18150787 A JP18150787 A JP 18150787A JP 18150787 A JP18150787 A JP 18150787A JP S6425970 A JPS6425970 A JP S6425970A
- Authority
- JP
- Japan
- Prior art keywords
- target
- metal
- thin film
- cathodic
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form a thin film of optional composition with good controllability by arranging the cathodic targets consisting of the silicide of a metal, the metal, and silicon almost in the form of an equilateral triangle, and appropriately sputtering the targets. CONSTITUTION:The cathodic target 2 made of the silicide of a metal, the cathodic target 4 made of the metal, and the cathodic target 3 made of silicon are arranged on a cathode back plate 5 almost in the form of an equilateral triangle. An object 9 is fixed to an anode 1, and arranged above the center of the targets 2-4. The whole structure is placed in a vacuum vessel 10, and sputtering is carried out by the conventional method. At this time, a relatively high DC power is impressed on the target 2 to deposit a thin metal silicide film, and the thin film is formed by the particles 14 sputtered from the target 2. When a thin film having a high content of silicon is formed, an RF power is additionally impressed on the target 3, and a DC power is additionally impressed on the target 4 to obtain a thin film having a high content of the metal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18150787A JPS6425970A (en) | 1987-07-21 | 1987-07-21 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18150787A JPS6425970A (en) | 1987-07-21 | 1987-07-21 | Sputtering device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425970A true JPS6425970A (en) | 1989-01-27 |
Family
ID=16101971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18150787A Pending JPS6425970A (en) | 1987-07-21 | 1987-07-21 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425970A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008068826A (en) * | 2006-09-15 | 2008-03-27 | Mazda Motor Corp | Vehicle body structure for automobile |
-
1987
- 1987-07-21 JP JP18150787A patent/JPS6425970A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008068826A (en) * | 2006-09-15 | 2008-03-27 | Mazda Motor Corp | Vehicle body structure for automobile |
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