JPS6479094A - Molecular ray source - Google Patents
Molecular ray sourceInfo
- Publication number
- JPS6479094A JPS6479094A JP23482687A JP23482687A JPS6479094A JP S6479094 A JPS6479094 A JP S6479094A JP 23482687 A JP23482687 A JP 23482687A JP 23482687 A JP23482687 A JP 23482687A JP S6479094 A JPS6479094 A JP S6479094A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater
- posts
- case
- molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23482687A JPS6479094A (en) | 1987-09-21 | 1987-09-21 | Molecular ray source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23482687A JPS6479094A (en) | 1987-09-21 | 1987-09-21 | Molecular ray source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6479094A true JPS6479094A (en) | 1989-03-24 |
JPH054956B2 JPH054956B2 (ja) | 1993-01-21 |
Family
ID=16976991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23482687A Granted JPS6479094A (en) | 1987-09-21 | 1987-09-21 | Molecular ray source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6479094A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101942697A (zh) * | 2010-08-23 | 2011-01-12 | 清华大学 | 光伏多晶硅铸锭炉测温热电偶套管抽真空装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59152296A (ja) * | 1983-02-17 | 1984-08-30 | Agency Of Ind Science & Technol | 分子線エピタキシヤル成長における分子線強度制御方法 |
-
1987
- 1987-09-21 JP JP23482687A patent/JPS6479094A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59152296A (ja) * | 1983-02-17 | 1984-08-30 | Agency Of Ind Science & Technol | 分子線エピタキシヤル成長における分子線強度制御方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101942697A (zh) * | 2010-08-23 | 2011-01-12 | 清华大学 | 光伏多晶硅铸锭炉测温热电偶套管抽真空装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH054956B2 (ja) | 1993-01-21 |
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