JPS64783A - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- JPS64783A JPS64783A JP62268520A JP26852087A JPS64783A JP S64783 A JPS64783 A JP S64783A JP 62268520 A JP62268520 A JP 62268520A JP 26852087 A JP26852087 A JP 26852087A JP S64783 A JPS64783 A JP S64783A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- segments
- thin
- layers
- segment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Impact Printers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62268520A JPS64783A (en) | 1987-10-24 | 1987-10-24 | Piezoelectric actuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62268520A JPS64783A (en) | 1987-10-24 | 1987-10-24 | Piezoelectric actuator |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24898283A Division JPS60140380A (ja) | 1983-12-28 | 1983-12-28 | 点字、点図触知装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01783A JPH01783A (ja) | 1989-01-05 |
JPS64783A true JPS64783A (en) | 1989-01-05 |
Family
ID=17459659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62268520A Pending JPS64783A (en) | 1987-10-24 | 1987-10-24 | Piezoelectric actuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64783A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
US5430344A (en) * | 1991-07-18 | 1995-07-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia |
WO2002041413A1 (de) * | 2000-11-20 | 2002-05-23 | Festo Ag & Co | Piezo-biegewandlereinheit und damit ausgestattetes piezoventil |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5387683A (en) * | 1977-01-12 | 1978-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Assembling method of electrostrictive element |
JPS5435079A (en) * | 1977-08-12 | 1979-03-14 | Shin Nippon Jitsugiyou Kk | Apparatus for fixing small animal |
JPS5656685A (en) * | 1979-10-15 | 1981-05-18 | Hitachi Ltd | Electrostrictive substrate |
JPS5750433A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Electron beam exposure method |
JPS583248B2 (ja) * | 1974-07-24 | 1983-01-20 | 株式会社リコー | キ−ボ−ド |
JPS583249B2 (ja) * | 1978-04-28 | 1983-01-20 | 富士通株式会社 | バツフア装置 |
JPS58103184A (ja) * | 1981-12-15 | 1983-06-20 | Matsushita Electric Ind Co Ltd | 電気・機械変換装置 |
-
1987
- 1987-10-24 JP JP62268520A patent/JPS64783A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS583248B2 (ja) * | 1974-07-24 | 1983-01-20 | 株式会社リコー | キ−ボ−ド |
JPS5387683A (en) * | 1977-01-12 | 1978-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Assembling method of electrostrictive element |
JPS5435079A (en) * | 1977-08-12 | 1979-03-14 | Shin Nippon Jitsugiyou Kk | Apparatus for fixing small animal |
JPS583249B2 (ja) * | 1978-04-28 | 1983-01-20 | 富士通株式会社 | バツフア装置 |
JPS5656685A (en) * | 1979-10-15 | 1981-05-18 | Hitachi Ltd | Electrostrictive substrate |
JPS5750433A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Electron beam exposure method |
JPS58103184A (ja) * | 1981-12-15 | 1983-06-20 | Matsushita Electric Ind Co Ltd | 電気・機械変換装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
US5681410A (en) * | 1990-07-26 | 1997-10-28 | Ngk Insulators, Ltd. | Method of producing a piezoelectric/electrostrictive actuator |
US5430344A (en) * | 1991-07-18 | 1995-07-04 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia |
US5691594A (en) * | 1991-07-18 | 1997-11-25 | Ngk Insulators, Ltd. | Piezoelectric/electrostricitve element having ceramic substrate formed essentially of stabilized zirconia |
WO2002041413A1 (de) * | 2000-11-20 | 2002-05-23 | Festo Ag & Co | Piezo-biegewandlereinheit und damit ausgestattetes piezoventil |
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