IT1179418B - Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionica - Google Patents
Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionicaInfo
- Publication number
- IT1179418B IT1179418B IT48600/84A IT4860084A IT1179418B IT 1179418 B IT1179418 B IT 1179418B IT 48600/84 A IT48600/84 A IT 48600/84A IT 4860084 A IT4860084 A IT 4860084A IT 1179418 B IT1179418 B IT 1179418B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- construction
- thin film
- resistive layer
- film resistors
- Prior art date
Links
- 238000010276 construction Methods 0.000 title 1
- 230000003628 erosive effect Effects 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT48600/84A IT1179418B (it) | 1984-07-20 | 1984-07-20 | Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionica |
| EP85830185A EP0175654B1 (en) | 1984-07-20 | 1985-07-17 | Procedure for the manufacturing of double layer resistive thin film integrated resistors through ion erosion |
| DE8585830185T DE3579987D1 (de) | 1984-07-20 | 1985-07-17 | Verfahren zum herstellen integrierter duennfilmwiderstaende aus einer widerstands-doppelschicht mittels ionenerosion. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT48600/84A IT1179418B (it) | 1984-07-20 | 1984-07-20 | Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionica |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT8448600A0 IT8448600A0 (it) | 1984-07-20 |
| IT1179418B true IT1179418B (it) | 1987-09-16 |
Family
ID=11267560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT48600/84A IT1179418B (it) | 1984-07-20 | 1984-07-20 | Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionica |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0175654B1 (it) |
| DE (1) | DE3579987D1 (it) |
| IT (1) | IT1179418B (it) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4136198A1 (de) * | 1991-11-02 | 1993-05-06 | Deutsche Aerospace Ag, 8000 Muenchen, De | Verfahren zur herstellung eines strukturierten duennfilm-widerstandsschichtsystems sowie schaltungsanordnung mit einem insbesondere nach diesem verfahren hergestellten duennfilm-widerstandsschichtsystem |
| DE69505099T2 (de) | 1994-08-05 | 1999-05-20 | Koninkl Philips Electronics Nv | Elektrische widerstandsstruktur |
| AU2003901730A0 (en) | 2003-04-11 | 2003-05-01 | Cochlear Limited | Power management system |
| AU2003903532A0 (en) * | 2003-07-09 | 2003-07-24 | Cochlear Limited | Conductive elements |
| US8782884B2 (en) | 2009-12-01 | 2014-07-22 | Cochlear Limited | Manufacturing an electrode assembly having contoured electrode contact surfaces |
| US8461042B2 (en) | 2009-12-01 | 2013-06-11 | Cochlear Limited | Electrode contact contaminate removal |
| KR102228454B1 (ko) | 2014-02-24 | 2021-03-16 | 삼성전자주식회사 | 보안 디버깅 회로를 갖는 디바이스 및 그것에 대한 디버깅 방법 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1074235B (it) * | 1976-12-28 | 1985-04-17 | Selenia Ind Elettroniche | Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde |
| JPS606546B2 (ja) * | 1980-01-19 | 1985-02-19 | 富士通株式会社 | ハイブリッドｉｃの製造方法 |
| DE3200983A1 (de) * | 1982-01-14 | 1983-07-21 | Siemens AG, 1000 Berlin und 8000 München | Elektrisches netzwerk |
| FR2532472B1 (fr) * | 1982-08-31 | 1985-12-20 | Lignes Telegraph Telephon | Procede de fabrication de connexions electriques pour circuit hybride et circuit hybride comportant de telles connexions |
-
1984
- 1984-07-20 IT IT48600/84A patent/IT1179418B/it active
-
1985
- 1985-07-17 EP EP85830185A patent/EP0175654B1/en not_active Expired
- 1985-07-17 DE DE8585830185T patent/DE3579987D1/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| IT8448600A0 (it) | 1984-07-20 |
| DE3579987D1 (de) | 1990-11-08 |
| EP0175654A2 (en) | 1986-03-26 |
| EP0175654B1 (en) | 1990-10-03 |
| EP0175654A3 (en) | 1987-08-26 |
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