IT1074235B - Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde - Google Patents

Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde

Info

Publication number
IT1074235B
IT1074235B IT52808/76A IT5280876A IT1074235B IT 1074235 B IT1074235 B IT 1074235B IT 52808/76 A IT52808/76 A IT 52808/76A IT 5280876 A IT5280876 A IT 5280876A IT 1074235 B IT1074235 B IT 1074235B
Authority
IT
Italy
Prior art keywords
microcircuits
microwaves
conductive
procedure
production
Prior art date
Application number
IT52808/76A
Other languages
English (en)
Inventor
Carlo Misiano
Enrico Simonetti
Marina Buiatti
Original Assignee
Selenia Ind Elettroniche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche filed Critical Selenia Ind Elettroniche
Priority to IT52808/76A priority Critical patent/IT1074235B/it
Priority to GB52490/77A priority patent/GB1593787A/en
Priority to FR7739383A priority patent/FR2376592A1/fr
Priority to DE19772757519 priority patent/DE2757519A1/de
Priority to US05/864,639 priority patent/US4157284A/en
Priority to NL7714473A priority patent/NL7714473A/xx
Application granted granted Critical
Publication of IT1074235B publication Critical patent/IT1074235B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors
    • H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors incorporating printed resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/062—Etching masks consisting of metals or alloys or metallic inorganic compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0302—Properties and characteristics in general
    • H05K2201/0317—Thin film conductor layer; Thin film passive component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0384—Etch stop layer, i.e. a buried barrier layer for preventing etching of layers under the etch stop layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Weting (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
IT52808/76A 1976-12-28 1976-12-28 Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde IT1074235B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT52808/76A IT1074235B (it) 1976-12-28 1976-12-28 Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde
GB52490/77A GB1593787A (en) 1976-12-28 1977-12-16 Process for forming conductive and resistive elements in microwave microcircuits
FR7739383A FR2376592A1 (fr) 1976-12-28 1977-12-20 Procede pour obtenir des elements conducteurs et des elements resistifs dans les microcircuits pour hyperfrequences
DE19772757519 DE2757519A1 (de) 1976-12-28 1977-12-23 Verfahren zur herstellung von leitern und widerstandselementen fuer mikroschaltkreise
US05/864,639 US4157284A (en) 1976-12-28 1977-12-27 Process to obtain conductive and resistive elements in microwave microcircuits
NL7714473A NL7714473A (nl) 1976-12-28 1977-12-28 Werkwijze voor de vervaardiging van geleidende elementen en weerstandselementen in micro- golf-microcircuits.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT52808/76A IT1074235B (it) 1976-12-28 1976-12-28 Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde

Publications (1)

Publication Number Publication Date
IT1074235B true IT1074235B (it) 1985-04-17

Family

ID=11277619

Family Applications (1)

Application Number Title Priority Date Filing Date
IT52808/76A IT1074235B (it) 1976-12-28 1976-12-28 Procedimento per la realizzazione degli elementi conduttivi e resististivi in microcircuiti per microonde

Country Status (6)

Country Link
US (1) US4157284A (it)
DE (1) DE2757519A1 (it)
FR (1) FR2376592A1 (it)
GB (1) GB1593787A (it)
IT (1) IT1074235B (it)
NL (1) NL7714473A (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3139670A1 (de) * 1981-10-06 1983-04-21 Robert Bosch Gmbh, 7000 Stuttgart Elektronische duennschichtschaltung und deren herstellungsverfahren
IT1179418B (it) * 1984-07-20 1987-09-16 Selenia Ind Elettroniche Procedimento per la realizzazione di resistori integrati a film sottile con doppio strato resistivo, mediante erosione ionica

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3217209A (en) * 1960-05-12 1965-11-09 Xerox Corp Printed circuits with resistive and capacitive elements
US3256588A (en) * 1962-10-23 1966-06-21 Philco Corp Method of fabricating thin film r-c circuits on single substrate
US3423260A (en) * 1966-03-21 1969-01-21 Bunker Ramo Method of making a thin film circuit having a resistor-conductor pattern
US3449828A (en) * 1966-09-28 1969-06-17 Control Data Corp Method for producing circuit module
GB1248142A (en) * 1969-06-20 1971-09-29 Decca Ltd Improvements in or relating to electrical circuits assemblies
US3864180A (en) * 1971-07-23 1975-02-04 Litton Systems Inc Process for forming thin-film circuit devices
US3904461A (en) * 1972-10-02 1975-09-09 Bendix Corp Method of manufacturing solderable thin film microcircuit with stabilized resistive films
FR2290762A1 (fr) * 1974-11-06 1976-06-04 Lignes Telegraph Telephon Procede de realisation de contacts ohmiques pour circuits en couche mince

Also Published As

Publication number Publication date
US4157284A (en) 1979-06-05
FR2376592A1 (fr) 1978-07-28
DE2757519A1 (de) 1978-06-29
FR2376592B1 (it) 1983-02-04
GB1593787A (en) 1981-07-22
NL7714473A (nl) 1978-06-30

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