JPS5656685A - Electrostrictive substrate - Google Patents

Electrostrictive substrate

Info

Publication number
JPS5656685A
JPS5656685A JP13185779A JP13185779A JPS5656685A JP S5656685 A JPS5656685 A JP S5656685A JP 13185779 A JP13185779 A JP 13185779A JP 13185779 A JP13185779 A JP 13185779A JP S5656685 A JPS5656685 A JP S5656685A
Authority
JP
Japan
Prior art keywords
slits
electrodes
displacement
piezoelectric
bimorph plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13185779A
Other languages
Japanese (ja)
Inventor
Katsuo Konishi
Norio Goto
Kuniaki Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13185779A priority Critical patent/JPS5656685A/en
Publication of JPS5656685A publication Critical patent/JPS5656685A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To make the linearity to the impressed voltage excellent and also obtain a large displacement by a method wherein at least more than one slit with an opening on one side thereof is formed on the electrostrictive substrate which is displaced flexibly and, by using the slit as a boundary, the flexible displacement is turned reversely by the polarization treatment. CONSTITUTION:Piezoelectric plates 4 and 5 are arranged on both surfaces of a negative electrode 2 and the component thus prepared is held by positive electrodes 1 and 3 in between, whereby a bimorph plate. Next, a plurality of slits 8 with openings on one sidethereof are cut in the bimorph plate, the polarization treatment is applied thereto by using the slits as boundaries, and fixed stands 6 are fixed to the side of electrodes 3 at the divided ends of the bimorph plate positioned on both ends. By providing the slits 8 in this way, the length l in the direction of displacement is increased, the piezoelectric plates 4a and 4c divided by the slits 8 are extended in the direction of l when the positive voltage is impressed on the electrodes 1 and 3 and the negative voltage on the electrode 2, while piezoelectric poles 5a and 5c are made to shrink. In addition, the piezoelectric poles 4b and 5b are made to extend, and thus the large displacement is caused as a whole.
JP13185779A 1979-10-15 1979-10-15 Electrostrictive substrate Pending JPS5656685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13185779A JPS5656685A (en) 1979-10-15 1979-10-15 Electrostrictive substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13185779A JPS5656685A (en) 1979-10-15 1979-10-15 Electrostrictive substrate

Publications (1)

Publication Number Publication Date
JPS5656685A true JPS5656685A (en) 1981-05-18

Family

ID=15067736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13185779A Pending JPS5656685A (en) 1979-10-15 1979-10-15 Electrostrictive substrate

Country Status (1)

Country Link
JP (1) JPS5656685A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915848A (en) * 1982-07-19 1984-01-26 Ngk Spark Plug Co Ltd Detector
JPS5933124U (en) * 1982-08-23 1984-03-01 ティーディーケイ株式会社 displacement device
JPS59126690A (en) * 1983-01-11 1984-07-21 Nec Home Electronics Ltd Piezoelectric oscillator for actuator
JPS62237779A (en) * 1986-04-08 1987-10-17 Tohoku Metal Ind Ltd Torsional displacement type piezoelectric element
JPS64783A (en) * 1987-10-24 1989-01-05 Kogyosha Tsushin Kiki Seisakusho:Kk Piezoelectric actuator
JPH02108353U (en) * 1989-02-15 1990-08-29
JPH0361360U (en) * 1989-10-18 1991-06-17

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5915848A (en) * 1982-07-19 1984-01-26 Ngk Spark Plug Co Ltd Detector
JPH033900B2 (en) * 1982-07-19 1991-01-21 Ngk Spark Plug Co
JPS5933124U (en) * 1982-08-23 1984-03-01 ティーディーケイ株式会社 displacement device
JPS59126690A (en) * 1983-01-11 1984-07-21 Nec Home Electronics Ltd Piezoelectric oscillator for actuator
JPS62237779A (en) * 1986-04-08 1987-10-17 Tohoku Metal Ind Ltd Torsional displacement type piezoelectric element
JPS64783A (en) * 1987-10-24 1989-01-05 Kogyosha Tsushin Kiki Seisakusho:Kk Piezoelectric actuator
JPH02108353U (en) * 1989-02-15 1990-08-29
JPH0361360U (en) * 1989-10-18 1991-06-17

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