JPS6476412A - Production of thin film magnetic head - Google Patents
Production of thin film magnetic headInfo
- Publication number
- JPS6476412A JPS6476412A JP23111387A JP23111387A JPS6476412A JP S6476412 A JPS6476412 A JP S6476412A JP 23111387 A JP23111387 A JP 23111387A JP 23111387 A JP23111387 A JP 23111387A JP S6476412 A JPS6476412 A JP S6476412A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resist
- coil conductor
- production
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To eliminate short-circuit of a coil conductor by specifying the side wall angle of a first layer coil conductor and performing heat treatment and ion milling of a resist for production of second and higher layer coil conductors on a specific condition. CONSTITUTION:A lower magnetic layer 2, a first insulating layer 3, and a copper layer 4 are formed on a substrate 1 in order. A photoresist is coated on the layer 4 and is patterned and is subjected to heat treatment in a prescribed condition to form a hemispherical resist 10. The resist 10 is used as the mask and the angle of incidence of an ion beam is controlled to perform ion milling, thereby forming a first layer coil conductor 4 whose side wall angle is 40-70 deg.. Next, a second insulating layer 5, a copper layer 6, and the photoresist are formed on the conductor 4 in order, and the resist is patterned and is subjected to heat treatment at 130-<200 deg.C to perform ion milling, thereby forming a second layer coil conductor 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23111387A JPS6476412A (en) | 1987-09-17 | 1987-09-17 | Production of thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23111387A JPS6476412A (en) | 1987-09-17 | 1987-09-17 | Production of thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6476412A true JPS6476412A (en) | 1989-03-22 |
Family
ID=16918498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23111387A Pending JPS6476412A (en) | 1987-09-17 | 1987-09-17 | Production of thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6476412A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001067502A2 (en) * | 2000-03-10 | 2001-09-13 | Fei Company | Method and apparatus for milling copper interconnects in a charged particle beam system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61210508A (en) * | 1985-03-15 | 1986-09-18 | Fuji Photo Film Co Ltd | Manufacture of thin-film magnetic head |
JPS6247812A (en) * | 1985-08-26 | 1987-03-02 | Sony Corp | Thin film magnetic head |
-
1987
- 1987-09-17 JP JP23111387A patent/JPS6476412A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61210508A (en) * | 1985-03-15 | 1986-09-18 | Fuji Photo Film Co Ltd | Manufacture of thin-film magnetic head |
JPS6247812A (en) * | 1985-08-26 | 1987-03-02 | Sony Corp | Thin film magnetic head |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001067502A2 (en) * | 2000-03-10 | 2001-09-13 | Fei Company | Method and apparatus for milling copper interconnects in a charged particle beam system |
WO2001067502A3 (en) * | 2000-03-10 | 2002-02-21 | Fei Co | Method and apparatus for milling copper interconnects in a charged particle beam system |
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