JPS6421709A - Manufacture of thin film magnetic head - Google Patents

Manufacture of thin film magnetic head

Info

Publication number
JPS6421709A
JPS6421709A JP17759487A JP17759487A JPS6421709A JP S6421709 A JPS6421709 A JP S6421709A JP 17759487 A JP17759487 A JP 17759487A JP 17759487 A JP17759487 A JP 17759487A JP S6421709 A JPS6421709 A JP S6421709A
Authority
JP
Japan
Prior art keywords
magnetic pole
layer
inter
film
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17759487A
Other languages
Japanese (ja)
Inventor
Masaaki Kanemine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17759487A priority Critical patent/JPS6421709A/en
Publication of JPS6421709A publication Critical patent/JPS6421709A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To simplify and shorten a process, by forming a main magnetic pole so as to thin the film thickness of the tip part of a magnetic pole and to thick that of another part by applying etching elimination to form a prescribed film thickness setting an inter-layer insulating layer on a conductor coil layer as a mask pattern. CONSTITUTION:A thick magnetic film 31 for forming the main magnetic pole is formed on a substrate 11, and the conductor coil layer 16 sandwiched by the inter-layer insulating layers 15 and 17 is formed on an area except a part scheduled to form the tip of the magnetic pole of the magnetic film 31. Next, the main magnetic pole 32 in which the film thickness at the tip part of the magnetic pole is formed thinly and that of another part thickly is formed by applying the etching elimination of an exposed magnetic film 31 pare to form the prescribed film thickness setting the inter-layer insulating layers 15 and 17 sandwiching the conductor coil layer 16. Afterwards, on the inter-layer insulating layer 17, an upper magnetic pole 18 with a form in which the tip of the magnetic pole recedes by a prescribed size from a plane confronting with a medium is formed laminatedly. In such a way, it is possible to simplify the forming process of the main magnetic pole 32 of thick pattern shape, only the tip part of the magnetic pole of which is made into a thin film partially.
JP17759487A 1987-07-15 1987-07-15 Manufacture of thin film magnetic head Pending JPS6421709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17759487A JPS6421709A (en) 1987-07-15 1987-07-15 Manufacture of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17759487A JPS6421709A (en) 1987-07-15 1987-07-15 Manufacture of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS6421709A true JPS6421709A (en) 1989-01-25

Family

ID=16033723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17759487A Pending JPS6421709A (en) 1987-07-15 1987-07-15 Manufacture of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS6421709A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6700737B1 (en) * 1998-08-04 2004-03-02 Hitachi Global Storage Technologies Japan, Ltd. Recording and reproducing separation type magnetic head having thin part in upper core or magnetic film and magnetic storage apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6700737B1 (en) * 1998-08-04 2004-03-02 Hitachi Global Storage Technologies Japan, Ltd. Recording and reproducing separation type magnetic head having thin part in upper core or magnetic film and magnetic storage apparatus using the same

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