JPS6472863A - Thermal head - Google Patents

Thermal head

Info

Publication number
JPS6472863A
JPS6472863A JP23168087A JP23168087A JPS6472863A JP S6472863 A JPS6472863 A JP S6472863A JP 23168087 A JP23168087 A JP 23168087A JP 23168087 A JP23168087 A JP 23168087A JP S6472863 A JPS6472863 A JP S6472863A
Authority
JP
Japan
Prior art keywords
protective layer
al2o3
layer
sio2
abrasion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23168087A
Other languages
Japanese (ja)
Other versions
JPH0667633B2 (en
Inventor
Yozo Kobayashi
Tokuhito Mochizuki
Shinichi Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba TEC Corp
Original Assignee
Tokyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electric Co Ltd filed Critical Tokyo Electric Co Ltd
Priority to JP23168087A priority Critical patent/JPH0667633B2/en
Priority to DE3885523T priority patent/DE3885523T2/en
Priority to EP88306404A priority patent/EP0299735B1/en
Priority to US07/218,915 priority patent/US4905020A/en
Publication of JPS6472863A publication Critical patent/JPS6472863A/en
Publication of JPH0667633B2 publication Critical patent/JPH0667633B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To improve resistance to heat, humidity and abrasion and chemical stability by forming a protective layer with a mixture membrane consisting mainly of Al2O3 and SiO2 and containing nitrogen on the surface. CONSTITUTION:A thermal head is composed of a glass glazed layer 2, a thermal resistor layer 3, an electrode layer 4 and a protective layer 5 laminated on a substrate of Al2O3. This protective layer 5 has a 2mum-thick membrane formed by RF sputtering method using argon gas with a mixed target of 65mol% of Al2O3 and 35mol% of SiO2 and further a 3mum-thick mixed membrane of argon gas and nitrogen gas. Thus the characteristics of the protective layer such as resistance to heat, humidity, cracking and abrasion as well as chemical stability can be improved and also reliability can be maintained for a long time.
JP23168087A 1987-07-14 1987-09-16 Thermal head Expired - Lifetime JPH0667633B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP23168087A JPH0667633B2 (en) 1987-09-16 1987-09-16 Thermal head
DE3885523T DE3885523T2 (en) 1987-07-14 1988-07-13 Thermal print head.
EP88306404A EP0299735B1 (en) 1987-07-14 1988-07-13 Thermal print head
US07/218,915 US4905020A (en) 1987-07-14 1988-07-14 Thermal print head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23168087A JPH0667633B2 (en) 1987-09-16 1987-09-16 Thermal head

Publications (2)

Publication Number Publication Date
JPS6472863A true JPS6472863A (en) 1989-03-17
JPH0667633B2 JPH0667633B2 (en) 1994-08-31

Family

ID=16927304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23168087A Expired - Lifetime JPH0667633B2 (en) 1987-07-14 1987-09-16 Thermal head

Country Status (1)

Country Link
JP (1) JPH0667633B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020071552A (en) * 2001-03-07 2002-09-13 오태준 Electric razor having trimmer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020071552A (en) * 2001-03-07 2002-09-13 오태준 Electric razor having trimmer

Also Published As

Publication number Publication date
JPH0667633B2 (en) 1994-08-31

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