JPS6463218A - Forming superconductive thin film - Google Patents

Forming superconductive thin film

Info

Publication number
JPS6463218A
JPS6463218A JP62219091A JP21909187A JPS6463218A JP S6463218 A JPS6463218 A JP S6463218A JP 62219091 A JP62219091 A JP 62219091A JP 21909187 A JP21909187 A JP 21909187A JP S6463218 A JPS6463218 A JP S6463218A
Authority
JP
Japan
Prior art keywords
thin film
oxide
thin
film thickness
ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62219091A
Other languages
Japanese (ja)
Inventor
Kenji Kuroki
Taiji Tsuruoka
Takashi Kanamori
Susumu Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62219091A priority Critical patent/JPS6463218A/en
Publication of JPS6463218A publication Critical patent/JPS6463218A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To make it possible to form film in high reproducibility by laminating three kinds of thin films having specific materials in order and repeatedly by a sputter method, and conducting heat treatment in an oxygen atmosphere so that a predetermined film thickness ratio to be composed in order that the ratio of a total quantity of thin film thickness by individual composing elements obtains the component ratio of an objective superconductive thin layer. CONSTITUTION:Three kinds of thin films are laminated by a sputter method, which are a thin film composed of Ba and its Oxide, a thin film composed of Cu and its oxide, and a thin film composed of periodic table group IIIa elements and their oxides, so that a predetermined film thickness ratio is composed when a superconductive thin film is formed. Ba and its oxide are made to Ba, BaO, and BaCO3, Cu and its oxide to Cu, CuO, and Cu2O, and periodic table group IIIa elements and their oxides to Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Y2O3, La2O3, Ce2O3, Pr2O3, Nd2O3, Pm2O3, Sm2O3, Eu2O3, Gd2O3, Tb2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3.
JP62219091A 1987-09-03 1987-09-03 Forming superconductive thin film Pending JPS6463218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62219091A JPS6463218A (en) 1987-09-03 1987-09-03 Forming superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62219091A JPS6463218A (en) 1987-09-03 1987-09-03 Forming superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6463218A true JPS6463218A (en) 1989-03-09

Family

ID=16730113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62219091A Pending JPS6463218A (en) 1987-09-03 1987-09-03 Forming superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6463218A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465715A (en) * 1987-09-04 1989-03-13 Furukawa Electric Co Ltd Manufacture of superconductor molding
JPH01166412A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01166419A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Manufacture of superconductive membrane
JPH0320459A (en) * 1989-06-16 1991-01-29 Matsushita Electric Ind Co Ltd Production of thin film of copper oxide
CN103341624A (en) * 2013-07-16 2013-10-09 南开大学 Method for preparing Cu-Cu2O core-shell ferromagnetic nano-particles

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6465715A (en) * 1987-09-04 1989-03-13 Furukawa Electric Co Ltd Manufacture of superconductor molding
JPH01166412A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Complex oxide superconductive thin film and its manufacture
JPH01166419A (en) * 1987-12-22 1989-06-30 Sumitomo Electric Ind Ltd Manufacture of superconductive membrane
JPH0320459A (en) * 1989-06-16 1991-01-29 Matsushita Electric Ind Co Ltd Production of thin film of copper oxide
CN103341624A (en) * 2013-07-16 2013-10-09 南开大学 Method for preparing Cu-Cu2O core-shell ferromagnetic nano-particles

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