JPS645878Y2 - - Google Patents
Info
- Publication number
- JPS645878Y2 JPS645878Y2 JP5950683U JP5950683U JPS645878Y2 JP S645878 Y2 JPS645878 Y2 JP S645878Y2 JP 5950683 U JP5950683 U JP 5950683U JP 5950683 U JP5950683 U JP 5950683U JP S645878 Y2 JPS645878 Y2 JP S645878Y2
- Authority
- JP
- Japan
- Prior art keywords
- flash discharge
- discharge lamp
- parallel
- bundle
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000000137 annealing Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Discharge-Lamp Control Circuits And Pulse- Feed Circuits (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5950683U JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5950683U JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59166442U JPS59166442U (ja) | 1984-11-08 |
| JPS645878Y2 true JPS645878Y2 (enrdf_load_stackoverflow) | 1989-02-14 |
Family
ID=30189754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5950683U Granted JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59166442U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010247576A (ja) * | 2009-04-13 | 2010-11-04 | Nec Lighting Ltd | 閃光灯システム及びその配線方法 |
| JP2012068002A (ja) * | 2010-09-27 | 2012-04-05 | Ulvac-Riko Inc | 加熱装置 |
-
1983
- 1983-04-22 JP JP5950683U patent/JPS59166442U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59166442U (ja) | 1984-11-08 |
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