JPS645878Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a lamp connection structure for a light irradiation device.

Annealing is performed to recover crystal damage caused when ions are implanted into semiconductor Si wafers, or to epitaxially grow a deposited Si layer, but conventionally it is performed by flowing nitrogen gas in an electric furnace. However, it was common to heat-process the material. However, this annealing method using an electric furnace has drawbacks such as long heating time, difficulty in uniformly heating a wide area of the wafer, and wafer warping and surface contamination. Therefore, among light irradiation devices, a flash irradiation device using a flash discharge lamp has recently been attracting attention as an excellent annealing device that can eliminate these drawbacks.

By the way, a light irradiation device, such as this flash irradiation device, uses a planar light source as a light source, so a large number of straight tube-shaped flash discharge lamps are closely arranged in parallel. The conductive wires at both ends of each were connected to terminal blocks provided on both sides of the flash discharge lamp, and the conductive wire bundles from both terminal blocks were connected to the power source. Therefore, this conducting wire bundle forms a loop inside the device box, and a large current flows through this conducting wire bundle, so that a magnetic field is generated. For this reason, there is a problem that the equipment box made of iron plate becomes magnetized, and furthermore,
Induced electromotive force was generated in the equipment box perpendicular to the magnetic field, and sparks were sometimes generated. Furthermore, the pulse width of the flash discharge lamp fluctuates due to the influence of this magnetic field, resulting in a problem that the irradiation characteristics deteriorate.

Therefore, the present invention aims to provide a lamp connection structure for a light irradiation device that can prevent the generation of a magnetic field due to a loop-shaped conducting wire bundle and eliminate the above-mentioned problems caused by this. In this method, each set consists of two of the many straight tube discharge lamps that are closely arranged in parallel in a steel plate device box to form a planar light source, and these two lamps are arranged in opposite directions to each other. The terminal blocks of the anode and cathode are provided on the same side with respect to the discharge lamp, and the bundle of conductive wires is led out in parallel from this terminal block.

The present invention will be specifically described below based on embodiments shown in the drawings.

In FIG. 1, the upper left side of an apparatus box 1 made of iron plate is an opening/closing door 1a, and by opening this opening/closing door 1a, a wafer 2, which is a sample, is taken in and taken out. At the top right of equipment box 1, there is a pipe with a diameter of 10 mm and an arc length of 80 mm.
The flash discharge lamps 5 of 5 mm in diameter are arranged closely in parallel in two stages, and the light source surface formed by the group of 5 flash discharge lamps has a width of 80 mm x 80 mm. A mirror 6 is disposed 2 mm above the flash discharge lamp 5, and the light is emitted downward. Next, the surface of the sample stage 8 is made of quartz glass, and the wafer 2 is placed thereon.
is preheated. The sample stage 8 is reciprocated by a drive device, and is positioned below the flash discharge lamp 5 only when it is irradiated with light, and immediately returns to the opening/closing door 1a when the irradiation is completed. When the sample stage 8 is located below the flash discharge lamp 5, the distance between the wafer 2 and the flash discharge lamp wafer 5 is approximately 10 mm.
Therefore, more than 80% of the illuminance of the planar light source is on the wafer 2.
Furthermore, since the surface of the wafer 2 is mirror-finished, a considerable amount of the incident light is reflected.
This reflected light is re-reflected by the mirror 6, and this repetition produces a multiple reflection effect, so that the emitted light from the planar light source can be used extremely efficiently.

Next, the wiring structure of the flash discharge lamps 5 will be explained with reference to FIGS. Pressure is maintained. here,
Among the large number of flash discharge lamps 5, two diagonally upper and lower ones are considered as one set, and the electrode directions of these two lamps are opposite to each other, that is, the anode and cathode of one flash discharge lamp 5 are are adjacent to the cathodes and anodes of other flash discharge lamps 5, respectively, and the anodes and cathodes at one end are connected in series by a conducting wire 11. The terminal block 7 is a combination of an anode and a cathode, and the anode of one flash discharge lamp 5 and the cathode of the other flash discharge lamp 5 in a set are connected to this terminal block 7, The anode conducting wires and the cathode conducting wires are bundled together, and the two conducting wire bundles 12 are connected in parallel to the power source section. At this time, it is preferable that the two conducting wire bundles 12 are close to each other. In addition,
In the illustrated example, there is an even number of flash discharge lamps 5, but if this is an odd number, one will be left over, but in this case, a dummy may be provided and paired with the remaining one. Note that although the above embodiments have been described with respect to flash discharge lamps, the present invention is not limited to this.

As explained above, in the present invention, two bundles of conductor wires are connected to the power supply unit from the terminal block provided on one side of the discharge lamp, so that the bundle of conductor wires does not form a loop in the equipment box. . Therefore, even if a large current flows through this conductor bundle when it is energized, almost no magnetic field is generated.
Even if the device box is made of iron plate, which is a magnetic material, the device box will not become magnetized. Since no induced electromotive force is generated, sparks are not generated, and in the case of a flash discharge lamp, the pulse width is not adversely affected, so the irradiation characteristics are not deteriorated.

[Brief explanation of the drawing]

Figure 1 is a sectional view, Figure 2 is a plan view of the main parts, Figure 3
The figure is a sectional view of the main part. 1...Equipment box, 2...Sample (wafer), 5...
...Flash discharge lamp, 6...Mirror, 7...Terminal block, 1
1...Conductor wire, 12...Conductor bundle.

Claims (1)

[Scope of utility model registration request] Two of the many straight tube discharge lamps that are closely arranged in parallel in a steel plate equipment box to form a planar light source.
Each set is made up of a set, and these two are arranged so that the electrode directions are opposite to each other and connected in series. Both the anode and cathode terminal blocks are installed on the same side with respect to the discharge lamp, and the terminals are connected in series. A lamp connection structure for a light irradiation device, characterized in that a bundle of conducting wires is led out in parallel from a base.