JPS6457639U - - Google Patents

Info

Publication number
JPS6457639U
JPS6457639U JP15076887U JP15076887U JPS6457639U JP S6457639 U JPS6457639 U JP S6457639U JP 15076887 U JP15076887 U JP 15076887U JP 15076887 U JP15076887 U JP 15076887U JP S6457639 U JPS6457639 U JP S6457639U
Authority
JP
Japan
Prior art keywords
dies
placement section
wafer placement
die
pushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15076887U
Other languages
English (en)
Other versions
JPH0639448Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150768U priority Critical patent/JPH0639448Y2/ja
Publication of JPS6457639U publication Critical patent/JPS6457639U/ja
Application granted granted Critical
Publication of JPH0639448Y2 publication Critical patent/JPH0639448Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)

Description

【図面の簡単な説明】
第１図は本考案ボンデイング装置の側面模式図
、第２図は従来のボンデイング装置の側面模式図
である。 １……ウエハシート、２，２……ダイ、３，６
……ＸＹテーブル、４……搬送シユート、５……
吸着具、７……突き上げ針ユニツト、８……認識
カメラ、９，１１……摺動軸、１０，１０，１２
，１２……ストツパ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 多数のダイに切断されたウエハが配置されるウ
    エハ配置部と、このウエハ配置部に近接され上記
    ダイをボンデイングするボンデイング位置と、上
    記ウエハ配置部からダイを吸着し、上記ボンデイ
    ング位置まで運搬する吸着ユニツトと、この吸着
    ユニツトで上記ウエハ配置部からダイを吸着する
    とき該当するダイを下方から突き上げる突き上げ
    手段と、この突き上げ手段を移動させる移動手段
    と、を有して成るボンデイング装置。
JP1987150768U 1987-10-01 1987-10-01 ボンデイング装置 Expired - Lifetime JPH0639448Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150768U JPH0639448Y2 (ja) 1987-10-01 1987-10-01 ボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150768U JPH0639448Y2 (ja) 1987-10-01 1987-10-01 ボンデイング装置

Publications (2)

Publication Number Publication Date
JPS6457639U true JPS6457639U (ja) 1989-04-10
JPH0639448Y2 JPH0639448Y2 (ja) 1994-10-12

Family

ID=31424202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150768U Expired - Lifetime JPH0639448Y2 (ja) 1987-10-01 1987-10-01 ボンデイング装置

Country Status (1)

Country Link
JP (1) JPH0639448Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132138A (ja) * 1983-01-18 1984-07-30 Toshiba Corp ペレツトマウント装置
JPS6373930U (ja) * 1986-10-30 1988-05-17
JPS6481234A (en) * 1987-09-24 1989-03-27 Hitachi Ltd Pickup device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132138A (ja) * 1983-01-18 1984-07-30 Toshiba Corp ペレツトマウント装置
JPS6373930U (ja) * 1986-10-30 1988-05-17
JPS6481234A (en) * 1987-09-24 1989-03-27 Hitachi Ltd Pickup device

Also Published As

Publication number Publication date
JPH0639448Y2 (ja) 1994-10-12

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