JPS6481234A - Pickup device - Google Patents

Pickup device

Info

Publication number
JPS6481234A
JPS6481234A JP62237230A JP23723087A JPS6481234A JP S6481234 A JPS6481234 A JP S6481234A JP 62237230 A JP62237230 A JP 62237230A JP 23723087 A JP23723087 A JP 23723087A JP S6481234 A JPS6481234 A JP S6481234A
Authority
JP
Japan
Prior art keywords
conforming
pellets
coordinate
pellet
thrust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62237230A
Other languages
Japanese (ja)
Inventor
Fusayoshi Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Semiconductor Package and Test Solutions Co Ltd
Original Assignee
Hitachi Hokkai Semiconductor Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Hokkai Semiconductor Ltd, Hitachi Ltd filed Critical Hitachi Hokkai Semiconductor Ltd
Priority to JP62237230A priority Critical patent/JPS6481234A/en
Publication of JPS6481234A publication Critical patent/JPS6481234A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors

Abstract

PURPOSE:To improve throughput drastically by performing pickup efficiently by judging confirming and non-conforming articles of pellet, advancing recognition means which can freely travel over pickup means. CONSTITUTION:By setting a wafer 3 where a non-conforming article was marked by a non-conforming mark 4 between a thrust-up means 5 and pick-up means 7 and by moving a recognition means 9 in X and Y directions, image input signal I on pellet surface is transmitted to a conforming and non-conforming discrimination means 10 in sequence. The conforming and non-conforming discrimination means 10 determines a conforming or non-conforming article by making comparison with data of conforming pellets which was previously registered and sends the coordinate of conforming pellets to a memory means 11 for temporary storage. If the coordinate of first conforming pellet 3a is A, a control means 12 shifts the pick-up means and the thrust-up means 5 to the coordinate A, pushes up the pellet at the coordinate A with the thrust-up means 5, separates conforming pellets from the wafer 3, and performs suction with the pick-up means 7. The recognition means advances and detects conforming pellets while picking up and transferring conforming pellets.
JP62237230A 1987-09-24 1987-09-24 Pickup device Pending JPS6481234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62237230A JPS6481234A (en) 1987-09-24 1987-09-24 Pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62237230A JPS6481234A (en) 1987-09-24 1987-09-24 Pickup device

Publications (1)

Publication Number Publication Date
JPS6481234A true JPS6481234A (en) 1989-03-27

Family

ID=17012311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62237230A Pending JPS6481234A (en) 1987-09-24 1987-09-24 Pickup device

Country Status (1)

Country Link
JP (1) JPS6481234A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457639U (en) * 1987-10-01 1989-04-10
JP5158282B1 (en) * 2012-08-23 2013-03-06 富士ゼロックス株式会社 Conveying apparatus, semiconductor element conveying method, and semiconductor element manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457639U (en) * 1987-10-01 1989-04-10
JP5158282B1 (en) * 2012-08-23 2013-03-06 富士ゼロックス株式会社 Conveying apparatus, semiconductor element conveying method, and semiconductor element manufacturing method

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