JPS6455840A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS6455840A
JPS6455840A JP21330587A JP21330587A JPS6455840A JP S6455840 A JPS6455840 A JP S6455840A JP 21330587 A JP21330587 A JP 21330587A JP 21330587 A JP21330587 A JP 21330587A JP S6455840 A JPS6455840 A JP S6455840A
Authority
JP
Japan
Prior art keywords
oxide film
silicon
enclosed
film
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21330587A
Other languages
English (en)
Inventor
Keiichi Higashiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21330587A priority Critical patent/JPS6455840A/ja
Publication of JPS6455840A publication Critical patent/JPS6455840A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP21330587A 1987-08-27 1987-08-27 Semiconductor device Pending JPS6455840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21330587A JPS6455840A (en) 1987-08-27 1987-08-27 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21330587A JPS6455840A (en) 1987-08-27 1987-08-27 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS6455840A true JPS6455840A (en) 1989-03-02

Family

ID=16636929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21330587A Pending JPS6455840A (en) 1987-08-27 1987-08-27 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS6455840A (ja)

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