JPS6450213A - Substrate for thin film magnetic head - Google Patents

Abstract

PURPOSE:To simplify a process for producing a head and to form an exact head element by constituting a surface on which a magnetic circuit is formed of a crystalline layer which does not contain carbon and has an electrical insulating characteristic and the balance of the surface of a layer which contains carbon. CONSTITUTION:The surface of the carbon-contg. substrate 2, on which surface at least the magnetic circuit is formed, is constituted of the crystalline layer 1 which does not contain carbon and has the electrical insulating characteristic. Since the substrate surface to be formed with the magnetic circuit is the electrically insulating layer, there is no need for forming an electrical insulating film by a sputtering method. The stage is, therefore, omitted. Since this layer is crystalline, the generation of large chipping as with a glass material by machining is obviated. Furthermore, since this layer and the remaining part of the substrate have about the same coefft. of thermal expansion, the warpage of the substrate by heating is obviated and the exact formation of the head element is executed. The thin film magnetic head substrate which is not adversely affected by the carbon, simplifies the process for producing the head and has the good working accuracy is thereby obtd.