JPS56124280A - Manufacture of photoelectrically transducing film - Google Patents
Manufacture of photoelectrically transducing filmInfo
- Publication number
- JPS56124280A JPS56124280A JP2833480A JP2833480A JPS56124280A JP S56124280 A JPS56124280 A JP S56124280A JP 2833480 A JP2833480 A JP 2833480A JP 2833480 A JP2833480 A JP 2833480A JP S56124280 A JPS56124280 A JP S56124280A
- Authority
- JP
- Japan
- Prior art keywords
- coated
- type amorphous
- mask
- film
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002463 transducing effect Effects 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 3
- 239000011521 glass Substances 0.000 abstract 2
- 239000012212 insulator Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To reproducibly obtain an element of uniform characteristics by a method wherein a photoelectrically transducing film is selectively formed on a conductive substrate by using a mask whose surface is an insulator. CONSTITUTION:On a substrate 8, which is formed by a glass plate 11 coated with a transparent conductive (InXSn1-X)2O3 film 12 by evaporation, P type amorphous Si 13, I type amorphous Si 14 and N type amorphous Si are piled, and an Al electrode 16 is provided. As the mask 9, a glass or metal which will not change the property at the order of 300 deg.C and is coated with an insulator can be used. By using such a mask coated with an insulating material, the number of the working processes can be reduced, and an element of excellent characteristics can be obtained at improved yield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2833480A JPS56124280A (en) | 1980-03-05 | 1980-03-05 | Manufacture of photoelectrically transducing film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2833480A JPS56124280A (en) | 1980-03-05 | 1980-03-05 | Manufacture of photoelectrically transducing film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56124280A true JPS56124280A (en) | 1981-09-29 |
Family
ID=12245704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2833480A Pending JPS56124280A (en) | 1980-03-05 | 1980-03-05 | Manufacture of photoelectrically transducing film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56124280A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7044719B2 (en) | 2002-01-30 | 2006-05-16 | Daikin Industries, Ltd | Enclosed compressor with vibration reduction |
-
1980
- 1980-03-05 JP JP2833480A patent/JPS56124280A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7044719B2 (en) | 2002-01-30 | 2006-05-16 | Daikin Industries, Ltd | Enclosed compressor with vibration reduction |
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