JPS51147281A - Manufacturing process for thin film switching element - Google Patents
Manufacturing process for thin film switching elementInfo
- Publication number
- JPS51147281A JPS51147281A JP50070856A JP7085675A JPS51147281A JP S51147281 A JPS51147281 A JP S51147281A JP 50070856 A JP50070856 A JP 50070856A JP 7085675 A JP7085675 A JP 7085675A JP S51147281 A JPS51147281 A JP S51147281A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- manufacturing process
- switching element
- film switching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: A manufacturing process of a glass thin film mainly composed of vanadium pentaoxide which can be readily formed on a substrate of an inorganic material such as an IC substrate.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50070856A JPS51147281A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process for thin film switching element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50070856A JPS51147281A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process for thin film switching element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51147281A true JPS51147281A (en) | 1976-12-17 |
Family
ID=13443614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50070856A Pending JPS51147281A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process for thin film switching element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51147281A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291977A (en) * | 1985-06-18 | 1986-12-22 | Shinko Kagaku Kogyo Kk | Production of thin film of lower vanadium oxide |
KR100605289B1 (en) | 2006-04-06 | 2006-07-28 | 송건화 | Method of making vanadium dioxide film and homoiothermal temperature switch having same film |
-
1975
- 1975-06-13 JP JP50070856A patent/JPS51147281A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291977A (en) * | 1985-06-18 | 1986-12-22 | Shinko Kagaku Kogyo Kk | Production of thin film of lower vanadium oxide |
KR100605289B1 (en) | 2006-04-06 | 2006-07-28 | 송건화 | Method of making vanadium dioxide film and homoiothermal temperature switch having same film |
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