JPS6447028A - Plasma device - Google Patents
Plasma deviceInfo
- Publication number
- JPS6447028A JPS6447028A JP20561787A JP20561787A JPS6447028A JP S6447028 A JPS6447028 A JP S6447028A JP 20561787 A JP20561787 A JP 20561787A JP 20561787 A JP20561787 A JP 20561787A JP S6447028 A JPS6447028 A JP S6447028A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- plasma
- gases
- gas
- diffused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20561787A JPS6447028A (en) | 1987-08-18 | 1987-08-18 | Plasma device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20561787A JPS6447028A (en) | 1987-08-18 | 1987-08-18 | Plasma device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447028A true JPS6447028A (en) | 1989-02-21 |
Family
ID=16509846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20561787A Pending JPS6447028A (en) | 1987-08-18 | 1987-08-18 | Plasma device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447028A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03180032A (ja) * | 1989-12-08 | 1991-08-06 | Mitsubishi Electric Corp | 微細加工方法 |
US5351258A (en) * | 1992-07-30 | 1994-09-27 | Sharp Kabushiki Kaisha | Semiconductor laser device |
-
1987
- 1987-08-18 JP JP20561787A patent/JPS6447028A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03180032A (ja) * | 1989-12-08 | 1991-08-06 | Mitsubishi Electric Corp | 微細加工方法 |
US5351258A (en) * | 1992-07-30 | 1994-09-27 | Sharp Kabushiki Kaisha | Semiconductor laser device |
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