JPS6447028A - Plasma device - Google Patents

Plasma device

Info

Publication number
JPS6447028A
JPS6447028A JP20561787A JP20561787A JPS6447028A JP S6447028 A JPS6447028 A JP S6447028A JP 20561787 A JP20561787 A JP 20561787A JP 20561787 A JP20561787 A JP 20561787A JP S6447028 A JPS6447028 A JP S6447028A
Authority
JP
Japan
Prior art keywords
chamber
plasma
gases
gas
diffused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20561787A
Other languages
English (en)
Inventor
Takashi Akahori
Satoru Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP20561787A priority Critical patent/JPS6447028A/ja
Publication of JPS6447028A publication Critical patent/JPS6447028A/ja
Pending legal-status Critical Current

Links

JP20561787A 1987-08-18 1987-08-18 Plasma device Pending JPS6447028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20561787A JPS6447028A (en) 1987-08-18 1987-08-18 Plasma device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20561787A JPS6447028A (en) 1987-08-18 1987-08-18 Plasma device

Publications (1)

Publication Number Publication Date
JPS6447028A true JPS6447028A (en) 1989-02-21

Family

ID=16509846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20561787A Pending JPS6447028A (en) 1987-08-18 1987-08-18 Plasma device

Country Status (1)

Country Link
JP (1) JPS6447028A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03180032A (ja) * 1989-12-08 1991-08-06 Mitsubishi Electric Corp 微細加工方法
US5351258A (en) * 1992-07-30 1994-09-27 Sharp Kabushiki Kaisha Semiconductor laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03180032A (ja) * 1989-12-08 1991-08-06 Mitsubishi Electric Corp 微細加工方法
US5351258A (en) * 1992-07-30 1994-09-27 Sharp Kabushiki Kaisha Semiconductor laser device

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